JPS5221281A - Heater for vacuum evaporation having resistance against corrosion - Google Patents
Heater for vacuum evaporation having resistance against corrosionInfo
- Publication number
- JPS5221281A JPS5221281A JP9790275A JP9790275A JPS5221281A JP S5221281 A JPS5221281 A JP S5221281A JP 9790275 A JP9790275 A JP 9790275A JP 9790275 A JP9790275 A JP 9790275A JP S5221281 A JPS5221281 A JP S5221281A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- vacuum evaporation
- resistance against
- against corrosion
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:Heater for vacuum evaporation coating in high melting point metal such W, Mo, Ta etc. with corrosion resisting substance, having prolonged life.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9790275A JPS5221281A (en) | 1975-08-12 | 1975-08-12 | Heater for vacuum evaporation having resistance against corrosion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9790275A JPS5221281A (en) | 1975-08-12 | 1975-08-12 | Heater for vacuum evaporation having resistance against corrosion |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5221281A true JPS5221281A (en) | 1977-02-17 |
Family
ID=14204651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9790275A Pending JPS5221281A (en) | 1975-08-12 | 1975-08-12 | Heater for vacuum evaporation having resistance against corrosion |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5221281A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0485482A (en) * | 1990-07-27 | 1992-03-18 | Ohbayashi Corp | Winding guide device of sludge hose |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5074578A (en) * | 1973-11-05 | 1975-06-19 |
-
1975
- 1975-08-12 JP JP9790275A patent/JPS5221281A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5074578A (en) * | 1973-11-05 | 1975-06-19 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0485482A (en) * | 1990-07-27 | 1992-03-18 | Ohbayashi Corp | Winding guide device of sludge hose |
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