JPS5221278A - Heater for vacuum evaporation having resistance against corrosion - Google Patents

Heater for vacuum evaporation having resistance against corrosion

Info

Publication number
JPS5221278A
JPS5221278A JP50097899A JP9789975A JPS5221278A JP S5221278 A JPS5221278 A JP S5221278A JP 50097899 A JP50097899 A JP 50097899A JP 9789975 A JP9789975 A JP 9789975A JP S5221278 A JPS5221278 A JP S5221278A
Authority
JP
Japan
Prior art keywords
heater
vacuum evaporation
resistance against
against corrosion
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50097899A
Other languages
Japanese (ja)
Inventor
Masahiko Nakajima
Shuzo Watanabe
Masaji Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP50097899A priority Critical patent/JPS5221278A/en
Publication of JPS5221278A publication Critical patent/JPS5221278A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:Heater for vacuum evaporation, coating with corrosion resisting substance on high melting point metal such as W, Mo, Ta etc., having prolonged life.
JP50097899A 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion Pending JPS5221278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50097899A JPS5221278A (en) 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50097899A JPS5221278A (en) 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion

Publications (1)

Publication Number Publication Date
JPS5221278A true JPS5221278A (en) 1977-02-17

Family

ID=14204575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50097899A Pending JPS5221278A (en) 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion

Country Status (1)

Country Link
JP (1) JPS5221278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162272A (en) * 1983-03-04 1984-09-13 Natl Res Inst For Metals Titanium carbide coated material having superior thermal stability at high temperature

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5074578A (en) * 1973-11-05 1975-06-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5074578A (en) * 1973-11-05 1975-06-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162272A (en) * 1983-03-04 1984-09-13 Natl Res Inst For Metals Titanium carbide coated material having superior thermal stability at high temperature
JPS6315988B2 (en) * 1983-03-04 1988-04-07 Kagaku Gijutsucho Kinzoku Zairyo Gijutsu Kenkyu Shocho

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