JPS5017517U - - Google Patents

Info

Publication number
JPS5017517U
JPS5017517U JP6993273U JP6993273U JPS5017517U JP S5017517 U JPS5017517 U JP S5017517U JP 6993273 U JP6993273 U JP 6993273U JP 6993273 U JP6993273 U JP 6993273U JP S5017517 U JPS5017517 U JP S5017517U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6993273U
Other languages
Japanese (ja)
Other versions
JPS5221710Y2 (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6993273U priority Critical patent/JPS5221710Y2/ja
Publication of JPS5017517U publication Critical patent/JPS5017517U/ja
Application granted granted Critical
Publication of JPS5221710Y2 publication Critical patent/JPS5221710Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6993273U 1973-06-13 1973-06-13 Expired JPS5221710Y2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6993273U JPS5221710Y2 (da) 1973-06-13 1973-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6993273U JPS5221710Y2 (da) 1973-06-13 1973-06-13

Publications (2)

Publication Number Publication Date
JPS5017517U true JPS5017517U (da) 1975-02-25
JPS5221710Y2 JPS5221710Y2 (da) 1977-05-18

Family

ID=28238275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6993273U Expired JPS5221710Y2 (da) 1973-06-13 1973-06-13

Country Status (1)

Country Link
JP (1) JPS5221710Y2 (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221280A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221280A (en) * 1975-08-12 1977-02-17 Denki Kagaku Kogyo Kk Heater for vacuum evaporation having resistance against corrosion

Also Published As

Publication number Publication date
JPS5221710Y2 (da) 1977-05-18

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