JPS5221710Y2 - - Google Patents
Info
- Publication number
- JPS5221710Y2 JPS5221710Y2 JP6993273U JP6993273U JPS5221710Y2 JP S5221710 Y2 JPS5221710 Y2 JP S5221710Y2 JP 6993273 U JP6993273 U JP 6993273U JP 6993273 U JP6993273 U JP 6993273U JP S5221710 Y2 JPS5221710 Y2 JP S5221710Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6993273U JPS5221710Y2 (da) | 1973-06-13 | 1973-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6993273U JPS5221710Y2 (da) | 1973-06-13 | 1973-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5017517U JPS5017517U (da) | 1975-02-25 |
| JPS5221710Y2 true JPS5221710Y2 (da) | 1977-05-18 |
Family
ID=28238275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6993273U Expired JPS5221710Y2 (da) | 1973-06-13 | 1973-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221710Y2 (da) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221280A (en) * | 1975-08-12 | 1977-02-17 | Denki Kagaku Kogyo Kk | Heater for vacuum evaporation having resistance against corrosion |
-
1973
- 1973-06-13 JP JP6993273U patent/JPS5221710Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5017517U (da) | 1975-02-25 |