JPS5752954B2 - - Google Patents
Info
- Publication number
- JPS5752954B2 JPS5752954B2 JP50097901A JP9790175A JPS5752954B2 JP S5752954 B2 JPS5752954 B2 JP S5752954B2 JP 50097901 A JP50097901 A JP 50097901A JP 9790175 A JP9790175 A JP 9790175A JP S5752954 B2 JPS5752954 B2 JP S5752954B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9790175A JPS5221280A (en) | 1975-08-12 | 1975-08-12 | Heater for vacuum evaporation having resistance against corrosion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9790175A JPS5221280A (en) | 1975-08-12 | 1975-08-12 | Heater for vacuum evaporation having resistance against corrosion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5221280A JPS5221280A (en) | 1977-02-17 |
| JPS5752954B2 true JPS5752954B2 (da) | 1982-11-10 |
Family
ID=14204626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9790175A Granted JPS5221280A (en) | 1975-08-12 | 1975-08-12 | Heater for vacuum evaporation having resistance against corrosion |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221280A (da) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS573946A (en) * | 1980-06-06 | 1982-01-09 | Kajima Corp | Constructing method of acoustic space of large space |
| JPS5962147U (ja) * | 1982-10-20 | 1984-04-24 | 石川島播磨重工業株式会社 | 建造物構築用保護カバ− |
| JPS6272867A (ja) * | 1985-09-24 | 1987-04-03 | 酒見 照始 | 浮き屋根 |
| JPH0694196B2 (ja) * | 1990-05-17 | 1994-11-24 | 日本碍子株式会社 | ホウ化物の被覆層を有する複合耐食性電極および複合耐食性発熱体 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926180A (da) * | 1972-07-04 | 1974-03-08 | ||
| JPS5074578A (da) * | 1973-11-05 | 1975-06-19 | ||
| JPS5017517B2 (da) * | 1973-02-23 | 1975-06-21 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221710Y2 (da) * | 1973-06-13 | 1977-05-18 | ||
| JPS5048855U (da) * | 1973-09-04 | 1975-05-14 |
-
1975
- 1975-08-12 JP JP9790175A patent/JPS5221280A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4926180A (da) * | 1972-07-04 | 1974-03-08 | ||
| JPS5017517B2 (da) * | 1973-02-23 | 1975-06-21 | ||
| JPS5074578A (da) * | 1973-11-05 | 1975-06-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5221280A (en) | 1977-02-17 |