JPS5219968A - Semiconductor ic manufacturig process - Google Patents

Semiconductor ic manufacturig process

Info

Publication number
JPS5219968A
JPS5219968A JP9560075A JP9560075A JPS5219968A JP S5219968 A JPS5219968 A JP S5219968A JP 9560075 A JP9560075 A JP 9560075A JP 9560075 A JP9560075 A JP 9560075A JP S5219968 A JPS5219968 A JP S5219968A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacturig
spacesaving
diffusion layer
small contract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9560075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211514B2 (enrdf_load_stackoverflow
Inventor
Toru Tsujiide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9560075A priority Critical patent/JPS5219968A/ja
Publication of JPS5219968A publication Critical patent/JPS5219968A/ja
Publication of JPS6211514B2 publication Critical patent/JPS6211514B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9560075A 1975-08-06 1975-08-06 Semiconductor ic manufacturig process Granted JPS5219968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9560075A JPS5219968A (en) 1975-08-06 1975-08-06 Semiconductor ic manufacturig process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9560075A JPS5219968A (en) 1975-08-06 1975-08-06 Semiconductor ic manufacturig process

Publications (2)

Publication Number Publication Date
JPS5219968A true JPS5219968A (en) 1977-02-15
JPS6211514B2 JPS6211514B2 (enrdf_load_stackoverflow) 1987-03-12

Family

ID=14142037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9560075A Granted JPS5219968A (en) 1975-08-06 1975-08-06 Semiconductor ic manufacturig process

Country Status (1)

Country Link
JP (1) JPS5219968A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586126A (ja) * 1981-07-03 1983-01-13 Fujitsu Ltd 半導体装置の製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01138525U (enrdf_load_stackoverflow) * 1988-03-07 1989-09-21
JPH0253321U (enrdf_load_stackoverflow) * 1988-10-08 1990-04-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586126A (ja) * 1981-07-03 1983-01-13 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6211514B2 (enrdf_load_stackoverflow) 1987-03-12

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