JPS52153668A - Photo mask of semiconductor integrated circuit - Google Patents

Photo mask of semiconductor integrated circuit

Info

Publication number
JPS52153668A
JPS52153668A JP7075876A JP7075876A JPS52153668A JP S52153668 A JPS52153668 A JP S52153668A JP 7075876 A JP7075876 A JP 7075876A JP 7075876 A JP7075876 A JP 7075876A JP S52153668 A JPS52153668 A JP S52153668A
Authority
JP
Japan
Prior art keywords
photo mask
integrated circuit
semiconductor integrated
adhesiveness
improve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7075876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5344797B2 (cg-RX-API-DMAC10.html
Inventor
Masami Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7075876A priority Critical patent/JPS52153668A/ja
Publication of JPS52153668A publication Critical patent/JPS52153668A/ja
Publication of JPS5344797B2 publication Critical patent/JPS5344797B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP7075876A 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit Granted JPS52153668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7075876A JPS52153668A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7075876A JPS52153668A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS52153668A true JPS52153668A (en) 1977-12-20
JPS5344797B2 JPS5344797B2 (cg-RX-API-DMAC10.html) 1978-12-01

Family

ID=13440717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7075876A Granted JPS52153668A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS52153668A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012118500A (ja) * 2010-11-30 2012-06-21 Samsung Electro-Mechanics Co Ltd 露光装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127703A (cg-RX-API-DMAC10.html) * 1973-04-18 1974-12-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127703A (cg-RX-API-DMAC10.html) * 1973-04-18 1974-12-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012118500A (ja) * 2010-11-30 2012-06-21 Samsung Electro-Mechanics Co Ltd 露光装置

Also Published As

Publication number Publication date
JPS5344797B2 (cg-RX-API-DMAC10.html) 1978-12-01

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