JPS52153497A - Production of gas sensitive element - Google Patents
Production of gas sensitive elementInfo
- Publication number
- JPS52153497A JPS52153497A JP6970876A JP6970876A JPS52153497A JP S52153497 A JPS52153497 A JP S52153497A JP 6970876 A JP6970876 A JP 6970876A JP 6970876 A JP6970876 A JP 6970876A JP S52153497 A JPS52153497 A JP S52153497A
- Authority
- JP
- Japan
- Prior art keywords
- gas sensitive
- production
- sensitive element
- metal layer
- portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: High productivity is provided by heating and incinerating the resist material beforehand coated on the surface of a heat resisting insulation substrate, removing the metal layer formed thereon of the portions other than the electrode forming portions of the metal layer, thereafter depositing a gas sensitive substance on the substrate surface.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6970876A JPS52153497A (en) | 1976-06-16 | 1976-06-16 | Production of gas sensitive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6970876A JPS52153497A (en) | 1976-06-16 | 1976-06-16 | Production of gas sensitive element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52153497A true JPS52153497A (en) | 1977-12-20 |
Family
ID=13410596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6970876A Pending JPS52153497A (en) | 1976-06-16 | 1976-06-16 | Production of gas sensitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52153497A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61264247A (en) * | 1985-05-17 | 1986-11-22 | Agency Of Ind Science & Technol | Production of moisture sensitive element |
-
1976
- 1976-06-16 JP JP6970876A patent/JPS52153497A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61264247A (en) * | 1985-05-17 | 1986-11-22 | Agency Of Ind Science & Technol | Production of moisture sensitive element |
JPH0514865B2 (en) * | 1985-05-17 | 1993-02-26 | Kogyo Gijutsuin |
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