JPS52153497A - Production of gas sensitive element - Google Patents

Production of gas sensitive element

Info

Publication number
JPS52153497A
JPS52153497A JP6970876A JP6970876A JPS52153497A JP S52153497 A JPS52153497 A JP S52153497A JP 6970876 A JP6970876 A JP 6970876A JP 6970876 A JP6970876 A JP 6970876A JP S52153497 A JPS52153497 A JP S52153497A
Authority
JP
Japan
Prior art keywords
gas sensitive
production
sensitive element
metal layer
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6970876A
Other languages
Japanese (ja)
Inventor
Yuji Yokomizo
Zenichi Tanno
Hideo Okuma
Masaki Katsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6970876A priority Critical patent/JPS52153497A/en
Publication of JPS52153497A publication Critical patent/JPS52153497A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: High productivity is provided by heating and incinerating the resist material beforehand coated on the surface of a heat resisting insulation substrate, removing the metal layer formed thereon of the portions other than the electrode forming portions of the metal layer, thereafter depositing a gas sensitive substance on the substrate surface.
COPYRIGHT: (C)1977,JPO&Japio
JP6970876A 1976-06-16 1976-06-16 Production of gas sensitive element Pending JPS52153497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6970876A JPS52153497A (en) 1976-06-16 1976-06-16 Production of gas sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6970876A JPS52153497A (en) 1976-06-16 1976-06-16 Production of gas sensitive element

Publications (1)

Publication Number Publication Date
JPS52153497A true JPS52153497A (en) 1977-12-20

Family

ID=13410596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6970876A Pending JPS52153497A (en) 1976-06-16 1976-06-16 Production of gas sensitive element

Country Status (1)

Country Link
JP (1) JPS52153497A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61264247A (en) * 1985-05-17 1986-11-22 Agency Of Ind Science & Technol Production of moisture sensitive element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61264247A (en) * 1985-05-17 1986-11-22 Agency Of Ind Science & Technol Production of moisture sensitive element
JPH0514865B2 (en) * 1985-05-17 1993-02-26 Kogyo Gijutsuin

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