JPS5214999B2 - - Google Patents

Info

Publication number
JPS5214999B2
JPS5214999B2 JP47027386A JP2738672A JPS5214999B2 JP S5214999 B2 JPS5214999 B2 JP S5214999B2 JP 47027386 A JP47027386 A JP 47027386A JP 2738672 A JP2738672 A JP 2738672A JP S5214999 B2 JPS5214999 B2 JP S5214999B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47027386A
Other versions
JPS4895887A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47027386A priority Critical patent/JPS5214999B2/ja
Priority to DE19732313852 priority patent/DE2313852C3/de
Priority to US00343019A priority patent/US3845304A/en
Publication of JPS4895887A publication Critical patent/JPS4895887A/ja
Publication of JPS5214999B2 publication Critical patent/JPS5214999B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP47027386A 1972-03-21 1972-03-21 Expired JPS5214999B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP47027386A JPS5214999B2 (ja) 1972-03-21 1972-03-21
DE19732313852 DE2313852C3 (de) 1972-03-21 1973-03-20 lonen-Mikroanalysator
US00343019A US3845304A (en) 1972-03-21 1973-03-20 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47027386A JPS5214999B2 (ja) 1972-03-21 1972-03-21

Publications (2)

Publication Number Publication Date
JPS4895887A JPS4895887A (ja) 1973-12-08
JPS5214999B2 true JPS5214999B2 (ja) 1977-04-26

Family

ID=12219598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47027386A Expired JPS5214999B2 (ja) 1972-03-21 1972-03-21

Country Status (2)

Country Link
US (1) US3845304A (ja)
JP (1) JPS5214999B2 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
FR2319196A1 (fr) * 1975-07-25 1977-02-18 Cameca Dispositif de mesure precis des courants ioniques et spectrometre de masse utilisant un tel dispositif
EP1245952B1 (en) 2001-03-20 2012-09-19 Morpho Detection, Inc. Ion mobility spectrometer and its usage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1246744A (en) * 1969-01-02 1971-09-15 Graham Stuart Plows Electron beam apparatus
JPS5034439B1 (ja) * 1969-05-16 1975-11-08

Also Published As

Publication number Publication date
JPS4895887A (ja) 1973-12-08
DE2313852A1 (de) 1973-10-04
DE2313852B2 (de) 1975-08-28
US3845304A (en) 1974-10-29

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