JPS4895887A - - Google Patents
Info
- Publication number
- JPS4895887A JPS4895887A JP47027386A JP2738672A JPS4895887A JP S4895887 A JPS4895887 A JP S4895887A JP 47027386 A JP47027386 A JP 47027386A JP 2738672 A JP2738672 A JP 2738672A JP S4895887 A JPS4895887 A JP S4895887A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47027386A JPS5214999B2 (ja) | 1972-03-21 | 1972-03-21 | |
| US00343019A US3845304A (en) | 1972-03-21 | 1973-03-20 | Ion microanalyzer |
| DE19732313852 DE2313852C3 (de) | 1972-03-21 | 1973-03-20 | lonen-Mikroanalysator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47027386A JPS5214999B2 (ja) | 1972-03-21 | 1972-03-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4895887A true JPS4895887A (ja) | 1973-12-08 |
| JPS5214999B2 JPS5214999B2 (ja) | 1977-04-26 |
Family
ID=12219598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47027386A Expired JPS5214999B2 (ja) | 1972-03-21 | 1972-03-21 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3845304A (ja) |
| JP (1) | JPS5214999B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4058724A (en) * | 1975-06-27 | 1977-11-15 | Minnesota Mining And Manufacturing Company | Ion Scattering spectrometer with two analyzers preferably in tandem |
| FR2319196A1 (fr) * | 1975-07-25 | 1977-02-18 | Cameca | Dispositif de mesure precis des courants ioniques et spectrometre de masse utilisant un tel dispositif |
| US6765198B2 (en) | 2001-03-20 | 2004-07-20 | General Electric Company | Enhancements to ion mobility spectrometers |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1246744A (en) * | 1969-01-02 | 1971-09-15 | Graham Stuart Plows | Electron beam apparatus |
| JPS5034439B1 (ja) * | 1969-05-16 | 1975-11-08 |
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1972
- 1972-03-21 JP JP47027386A patent/JPS5214999B2/ja not_active Expired
-
1973
- 1973-03-20 US US00343019A patent/US3845304A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2313852A1 (de) | 1973-10-04 |
| US3845304A (en) | 1974-10-29 |
| DE2313852B2 (de) | 1975-08-28 |
| JPS5214999B2 (ja) | 1977-04-26 |