JPS5034439B1 - - Google Patents

Info

Publication number
JPS5034439B1
JPS5034439B1 JP44037385A JP3738569A JPS5034439B1 JP S5034439 B1 JPS5034439 B1 JP S5034439B1 JP 44037385 A JP44037385 A JP 44037385A JP 3738569 A JP3738569 A JP 3738569A JP S5034439 B1 JPS5034439 B1 JP S5034439B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP44037385A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP44037385A priority Critical patent/JPS5034439B1/ja
Priority to US36755A priority patent/US3686499A/en
Priority to DE19702023688 priority patent/DE2023688C3/de
Publication of JPS5034439B1 publication Critical patent/JPS5034439B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP44037385A 1969-05-16 1969-05-16 Pending JPS5034439B1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP44037385A JPS5034439B1 (ja) 1969-05-16 1969-05-16
US36755A US3686499A (en) 1969-05-16 1970-05-13 Ion micro-analyzer
DE19702023688 DE2023688C3 (de) 1969-05-16 1970-05-14 lonenmikroanalysator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44037385A JPS5034439B1 (ja) 1969-05-16 1969-05-16

Publications (1)

Publication Number Publication Date
JPS5034439B1 true JPS5034439B1 (ja) 1975-11-08

Family

ID=12496045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP44037385A Pending JPS5034439B1 (ja) 1969-05-16 1969-05-16

Country Status (2)

Country Link
US (1) US3686499A (ja)
JP (1) JPS5034439B1 (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221909B2 (ja) * 1972-03-17 1977-06-14
JPS5214999B2 (ja) * 1972-03-21 1977-04-26
FR2193253B1 (ja) * 1972-07-21 1975-03-07 Cameca
US3894233A (en) * 1972-10-27 1975-07-08 Hitachi Ltd Ion microprobe analyzer
JPS532599B2 (ja) * 1972-10-30 1978-01-30
JPS5015594A (ja) * 1973-06-08 1975-02-19
US4352985A (en) * 1974-01-08 1982-10-05 Martin Frederick W Scanning ion microscope
US3916190A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Depth profile analysis apparatus
US3916191A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Imaging apparatus and method for use with ion scattering spectrometer
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
US4236073A (en) * 1977-05-27 1980-11-25 Martin Frederick W Scanning ion microscope
DE3335625A1 (de) * 1983-09-30 1985-04-11 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur speicherung der messdaten aus teilbereichen eines sputterkraters, der in einem sekundaerionen-massenspektrometer erzeugt und analysiert wird
WO1986002581A1 (en) * 1984-10-26 1986-05-09 Ion Beam Systems, Inc. Focused substrate alteration
GB9006303D0 (en) * 1990-03-21 1990-05-16 Kratos Analytical Ltd Mass spectrometry systems
JP4137329B2 (ja) * 2000-01-11 2008-08-20 エスアイアイ・ナノテクノロジー株式会社 集束イオンビーム加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1000560A (en) * 1961-03-02 1965-08-04 Elion Instr Inc Electron probe system
JPS4122320Y1 (ja) * 1966-05-26 1966-11-07

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3445650A (en) * 1965-10-11 1969-05-20 Applied Res Lab Double focussing mass spectrometer including a wedge-shaped magnetic sector field
US3479505A (en) * 1966-06-30 1969-11-18 Applied Res Lab Method of operating an ion microprobe using secondary elections

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1000560A (en) * 1961-03-02 1965-08-04 Elion Instr Inc Electron probe system
JPS4122320Y1 (ja) * 1966-05-26 1966-11-07

Also Published As

Publication number Publication date
DE2023688B2 (de) 1976-01-02
DE2023688A1 (de) 1970-11-26
US3686499A (en) 1972-08-22

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