JPS52143771A - Aligning method for reticle datum plane - Google Patents

Aligning method for reticle datum plane

Info

Publication number
JPS52143771A
JPS52143771A JP6002376A JP6002376A JPS52143771A JP S52143771 A JPS52143771 A JP S52143771A JP 6002376 A JP6002376 A JP 6002376A JP 6002376 A JP6002376 A JP 6002376A JP S52143771 A JPS52143771 A JP S52143771A
Authority
JP
Japan
Prior art keywords
reticle
datum plane
aligning method
positioning
aligning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6002376A
Other languages
Japanese (ja)
Inventor
Joichiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6002376A priority Critical patent/JPS52143771A/en
Publication of JPS52143771A publication Critical patent/JPS52143771A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To improve the positioning accuracy in a z direction by directly supporting the bottom surface of a reticle plate to a reticle frame based on the three through-holes and there point pins thereby positioning the reticle plate.
COPYRIGHT: (C)1977,JPO&Japio
JP6002376A 1976-05-26 1976-05-26 Aligning method for reticle datum plane Pending JPS52143771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6002376A JPS52143771A (en) 1976-05-26 1976-05-26 Aligning method for reticle datum plane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6002376A JPS52143771A (en) 1976-05-26 1976-05-26 Aligning method for reticle datum plane

Publications (1)

Publication Number Publication Date
JPS52143771A true JPS52143771A (en) 1977-11-30

Family

ID=13130044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6002376A Pending JPS52143771A (en) 1976-05-26 1976-05-26 Aligning method for reticle datum plane

Country Status (1)

Country Link
JP (1) JPS52143771A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205728A (en) * 1981-06-15 1982-12-16 Fujitsu Ltd Exposure device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205728A (en) * 1981-06-15 1982-12-16 Fujitsu Ltd Exposure device
JPH0235445B2 (en) * 1981-06-15 1990-08-10 Fujitsu Ltd

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