JPS52136589A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52136589A
JPS52136589A JP5358476A JP5358476A JPS52136589A JP S52136589 A JPS52136589 A JP S52136589A JP 5358476 A JP5358476 A JP 5358476A JP 5358476 A JP5358476 A JP 5358476A JP S52136589 A JPS52136589 A JP S52136589A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
evaporation
electrode wiring
midcourse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5358476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5753976B2 (enrdf_load_stackoverflow
Inventor
Kuniaki Makabe
Yoshiyuki Namiki
Toshihiko Ono
Akisuke Mori
Toru Mano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5358476A priority Critical patent/JPS52136589A/ja
Publication of JPS52136589A publication Critical patent/JPS52136589A/ja
Publication of JPS5753976B2 publication Critical patent/JPS5753976B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP5358476A 1976-05-10 1976-05-10 Production of semiconductor device Granted JPS52136589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5358476A JPS52136589A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5358476A JPS52136589A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52136589A true JPS52136589A (en) 1977-11-15
JPS5753976B2 JPS5753976B2 (enrdf_load_stackoverflow) 1982-11-16

Family

ID=12946888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5358476A Granted JPS52136589A (en) 1976-05-10 1976-05-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52136589A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5753976B2 (enrdf_load_stackoverflow) 1982-11-16

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