JPS52136572A - Cvd apparatus - Google Patents

Cvd apparatus

Info

Publication number
JPS52136572A
JPS52136572A JP5345776A JP5345776A JPS52136572A JP S52136572 A JPS52136572 A JP S52136572A JP 5345776 A JP5345776 A JP 5345776A JP 5345776 A JP5345776 A JP 5345776A JP S52136572 A JPS52136572 A JP S52136572A
Authority
JP
Japan
Prior art keywords
cvd apparatus
susceptors
evenness
pedestals
thinner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5345776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5528545B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Itaru Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP5345776A priority Critical patent/JPS52136572A/ja
Publication of JPS52136572A publication Critical patent/JPS52136572A/ja
Publication of JPS5528545B2 publication Critical patent/JPS5528545B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP5345776A 1976-05-10 1976-05-10 Cvd apparatus Granted JPS52136572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5345776A JPS52136572A (en) 1976-05-10 1976-05-10 Cvd apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5345776A JPS52136572A (en) 1976-05-10 1976-05-10 Cvd apparatus

Publications (2)

Publication Number Publication Date
JPS52136572A true JPS52136572A (en) 1977-11-15
JPS5528545B2 JPS5528545B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-29

Family

ID=12943377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5345776A Granted JPS52136572A (en) 1976-05-10 1976-05-10 Cvd apparatus

Country Status (1)

Country Link
JP (1) JPS52136572A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5528545B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-29

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