JPS52131780A - Apparatus for and method of measuring pressure and indicating leakage by analyzing optically - Google Patents

Apparatus for and method of measuring pressure and indicating leakage by analyzing optically

Info

Publication number
JPS52131780A
JPS52131780A JP4750577A JP4750577A JPS52131780A JP S52131780 A JPS52131780 A JP S52131780A JP 4750577 A JP4750577 A JP 4750577A JP 4750577 A JP4750577 A JP 4750577A JP S52131780 A JPS52131780 A JP S52131780A
Authority
JP
Japan
Prior art keywords
measuring pressure
indicating leakage
optically
analyzing
analyzing optically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4750577A
Other languages
English (en)
Japanese (ja)
Inventor
Kaaru Man Jiyozefu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of JPS52131780A publication Critical patent/JPS52131780A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/38—Investigating fluid-tightness of structures by using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/40—Investigating fluid-tightness of structures by using electric means, e.g. by observing electric discharges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/69—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence specially adapted for fluids, e.g. molten metal

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measurement Of Radiation (AREA)
JP4750577A 1976-04-26 1977-04-26 Apparatus for and method of measuring pressure and indicating leakage by analyzing optically Pending JPS52131780A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68060976A 1976-04-26 1976-04-26

Publications (1)

Publication Number Publication Date
JPS52131780A true JPS52131780A (en) 1977-11-04

Family

ID=24731776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4750577A Pending JPS52131780A (en) 1976-04-26 1977-04-26 Apparatus for and method of measuring pressure and indicating leakage by analyzing optically

Country Status (6)

Country Link
US (1) US4147431A (enExample)
JP (1) JPS52131780A (enExample)
DE (1) DE2717436A1 (enExample)
FR (1) FR2349832A1 (enExample)
GB (2) GB1584613A (enExample)
IT (1) IT1085755B (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62184334A (ja) * 1986-02-07 1987-08-12 Japan Atom Energy Res Inst 強磁場下での分圧測定方法
JP2016170072A (ja) * 2015-03-13 2016-09-23 Ｖｉｓｔａ株式会社 真空排気監視装置
WO2019082893A1 (ja) 2017-10-24 2019-05-02 株式会社マルナカ ガス分析器
JP2022549223A (ja) * 2019-09-20 2022-11-24 インフィコン・アーゲー 圧力を決定するための方法および圧力センサ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3013765A1 (de) * 1980-04-10 1981-10-15 Philips Patentverwaltung Gmbh, 2000 Hamburg Detektroranordnung, insbesondere fuer die fluessigkeitschromatografie
DE3326737A1 (de) * 1983-07-25 1985-02-14 Kraftwerk Union AG, 4330 Mülheim Verfahren zur zerstoerungsfreien bestimmung des spaltgasdruckes in kernbrennstaeben
US4522065A (en) * 1984-04-02 1985-06-11 General Electric Company Remote pressure sensor
US5473162A (en) * 1987-10-26 1995-12-05 Baylor University Infrared emission detection of a gas
US4988871A (en) * 1989-05-08 1991-01-29 Leybold Inficon, Inc. Gas partial pressure sensor for vacuum chamber
US4939926A (en) * 1989-06-05 1990-07-10 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for monitoring pressure leaks from a sealed system
US5115668A (en) * 1990-11-30 1992-05-26 The United States Of America As Represented By The Secretary Of The Navy Non-invasive pressure measuring device and method
FR2697939B1 (fr) * 1992-11-06 1995-02-24 Electricite De France Procédé et dispositif de détection de fuites de traversées de couvercle de cuve de réacteur nucléaire en fonctionnement.
US5302827A (en) * 1993-05-11 1994-04-12 Mks Instruments, Inc. Quadrupole mass spectrometer
DE19606826A1 (de) * 1996-02-23 1997-08-28 Knorr Bremse Electronic Gmbh Verfahren und Vorrichtung zur Überprüfung eines Sensors
JPH09304281A (ja) * 1996-05-09 1997-11-28 Tokyo Electric Power Co Inc:The 油検知装置
DE19651208C2 (de) * 1996-12-10 1999-05-27 Boehringer Ingelheim Kg Verfahren und Vorrichtung zur zerstörungsfreien Dichtigkeitsprüfung von mit Flüssigkeit gefüllten Behältnissen
WO1998049533A1 (de) * 1997-04-25 1998-11-05 Leybold Vakuum Gmbh Detektor für ein testgas-lecksuchgerät
US5801384A (en) * 1997-08-29 1998-09-01 Ohmeda Inc. Infrared gas spectrometer having sealed sections for improved safety
FI113805B (fi) 1998-04-03 2004-06-15 Licentia Oy Menetelmä ja laite kaasuseosten analysoimiseksi
US6867859B1 (en) 1999-08-03 2005-03-15 Lightwind Corporation Inductively coupled plasma spectrometer for process diagnostics and control
US6538734B2 (en) * 2000-11-29 2003-03-25 Lightwind Corporation Method and device utilizing real-time gas sampling
US6791692B2 (en) * 2000-11-29 2004-09-14 Lightwind Corporation Method and device utilizing plasma source for real-time gas sampling
ATE310237T1 (de) * 2001-09-07 2005-12-15 Gloor Ag Geb Druckanzeigevorrichtung
US6680778B2 (en) * 2001-11-08 2004-01-20 Michele Hinnrichs Gas leak detector
US7072028B2 (en) * 2003-07-25 2006-07-04 Lightwind Corporation Method and apparatus for chemical monitoring
UA64623C2 (en) * 2003-07-25 2005-03-15 Subsidiary Entpr With Foreign Method for nondestructive testing the tightness of an article using gas discharge
GB2428087B (en) * 2005-07-07 2009-12-23 Rolls Royce Plc A gas turbine engine incorporating an engine monitoring arrangement for monitoring gas constituents in an exhaust flow
ES2254035B1 (es) * 2005-11-07 2007-02-16 Grifols, S.A. "procedimiento y aparato para evaluar el grado de vacio en cuerpos cerrados de paredes transparentes".
WO2016119060A1 (en) 2015-01-30 2016-08-04 Mécanique Analytique Inc. Systems and methods for testing for a gas leak through a gas flow component
US10498001B2 (en) 2017-08-21 2019-12-03 Texas Instruments Incorporated Launch structures for a hermetically sealed cavity
US10775422B2 (en) 2017-09-05 2020-09-15 Texas Instruments Incorporated Molecular spectroscopy cell with resonant cavity
US10589986B2 (en) 2017-09-06 2020-03-17 Texas Instruments Incorporated Packaging a sealed cavity in an electronic device
US10551265B2 (en) * 2017-09-07 2020-02-04 Texas Instruments Incorporated Pressure sensing using quantum molecular rotational state transitions
US10444102B2 (en) * 2017-09-07 2019-10-15 Texas Instruments Incorporated Pressure measurement based on electromagnetic signal output of a cavity
US10549986B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell
US10131115B1 (en) 2017-09-07 2018-11-20 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with dual wafer bonding
US10424523B2 (en) 2017-09-07 2019-09-24 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with buried ground plane
US10544039B2 (en) 2017-09-08 2020-01-28 Texas Instruments Incorporated Methods for depositing a measured amount of a species in a sealed cavity
AT521072B1 (de) * 2018-04-12 2020-01-15 Joanneum Res Forschungsgmbh Verfahren und Vorrichtung zur Detektion von Gaslecks
US20220291072A1 (en) * 2021-03-10 2022-09-15 Dell Products, Lp Optical liquid coolant leak detector

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1026101B (de) * 1953-06-05 1958-03-13 Siemens Reiniger Werke Ag Vorrichtung zur Anzeige von Lecks in Hochvakuumanlagen
US2899605A (en) * 1954-07-07 1959-08-11 Warmoltz
US2855820A (en) * 1955-06-10 1958-10-14 Cons Electrodynamics Corp Method of spectroscopic gas analysis
DE1149923B (de) * 1957-09-14 1963-06-06 Siemens Ag Verfahren zur Bestimmung des Anteils einer Komponente eines Gas- oder Dampfgemisches
GB1013818A (en) * 1962-06-06 1965-12-22 Atomic Energy Commission Electron-beam vacuum gauge
US3489498A (en) * 1965-11-05 1970-01-13 Melpar Inc Flame photometric detector with improved specificity to sulfur and phosphorus
US3951607A (en) * 1974-11-29 1976-04-20 Searle Cardio-Pulmonary Systems Inc. Gas analyzer

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62184334A (ja) * 1986-02-07 1987-08-12 Japan Atom Energy Res Inst 強磁場下での分圧測定方法
JP2016170072A (ja) * 2015-03-13 2016-09-23 Ｖｉｓｔａ株式会社 真空排気監視装置
WO2019082893A1 (ja) 2017-10-24 2019-05-02 株式会社マルナカ ガス分析器
KR20200080241A (ko) 2017-10-24 2020-07-06 가부시키가이샤 마루나카 가스 분석기
JP2022549223A (ja) * 2019-09-20 2022-11-24 インフィコン・アーゲー 圧力を決定するための方法および圧力センサ
JP2024059852A (ja) * 2019-09-20 2024-05-01 インフィコン・アーゲー 圧力を決定するための方法および圧力センサ
US12085467B2 (en) 2019-09-20 2024-09-10 Inficon ag Method for detecting pressure, and pressure sensor

Also Published As

Publication number Publication date
FR2349832B1 (enExample) 1982-04-09
DE2717436C2 (enExample) 1987-11-19
DE2717436A1 (de) 1977-11-10
US4147431A (en) 1979-04-03
GB1584613A (en) 1981-02-18
GB1584612A (en) 1981-02-18
IT1085755B (it) 1985-05-28
FR2349832A1 (fr) 1977-11-25

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