JPS52127074A - Pattern formation - Google Patents
Pattern formationInfo
- Publication number
- JPS52127074A JPS52127074A JP4382376A JP4382376A JPS52127074A JP S52127074 A JPS52127074 A JP S52127074A JP 4382376 A JP4382376 A JP 4382376A JP 4382376 A JP4382376 A JP 4382376A JP S52127074 A JPS52127074 A JP S52127074A
- Authority
- JP
- Japan
- Prior art keywords
- pattern formation
- pattern
- lift
- patterns
- manner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To effect fine fabrication of patterns by forming a pattern in lift-off manner so that the pattern to be removed is surely exposed and the pattern to be left is completely masked.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4382376A JPS6030100B2 (en) | 1976-04-16 | 1976-04-16 | Pattern formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4382376A JPS6030100B2 (en) | 1976-04-16 | 1976-04-16 | Pattern formation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52127074A true JPS52127074A (en) | 1977-10-25 |
JPS6030100B2 JPS6030100B2 (en) | 1985-07-15 |
Family
ID=12674459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4382376A Expired JPS6030100B2 (en) | 1976-04-16 | 1976-04-16 | Pattern formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6030100B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149750A (en) * | 1981-03-12 | 1982-09-16 | Nippon Telegr & Teleph Corp <Ntt> | Element isolating method |
-
1976
- 1976-04-16 JP JP4382376A patent/JPS6030100B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149750A (en) * | 1981-03-12 | 1982-09-16 | Nippon Telegr & Teleph Corp <Ntt> | Element isolating method |
JPS6217865B2 (en) * | 1981-03-12 | 1987-04-20 | Nippon Telegraph & Telephone |
Also Published As
Publication number | Publication date |
---|---|
JPS6030100B2 (en) | 1985-07-15 |
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