JPS52127074A - Pattern formation - Google Patents

Pattern formation

Info

Publication number
JPS52127074A
JPS52127074A JP4382376A JP4382376A JPS52127074A JP S52127074 A JPS52127074 A JP S52127074A JP 4382376 A JP4382376 A JP 4382376A JP 4382376 A JP4382376 A JP 4382376A JP S52127074 A JPS52127074 A JP S52127074A
Authority
JP
Japan
Prior art keywords
pattern formation
pattern
lift
patterns
manner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4382376A
Other languages
Japanese (ja)
Other versions
JPS6030100B2 (en
Inventor
Kenzo Hatada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4382376A priority Critical patent/JPS6030100B2/en
Publication of JPS52127074A publication Critical patent/JPS52127074A/en
Publication of JPS6030100B2 publication Critical patent/JPS6030100B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To effect fine fabrication of patterns by forming a pattern in lift-off manner so that the pattern to be removed is surely exposed and the pattern to be left is completely masked.
COPYRIGHT: (C)1977,JPO&Japio
JP4382376A 1976-04-16 1976-04-16 Pattern formation method Expired JPS6030100B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4382376A JPS6030100B2 (en) 1976-04-16 1976-04-16 Pattern formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4382376A JPS6030100B2 (en) 1976-04-16 1976-04-16 Pattern formation method

Publications (2)

Publication Number Publication Date
JPS52127074A true JPS52127074A (en) 1977-10-25
JPS6030100B2 JPS6030100B2 (en) 1985-07-15

Family

ID=12674459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4382376A Expired JPS6030100B2 (en) 1976-04-16 1976-04-16 Pattern formation method

Country Status (1)

Country Link
JP (1) JPS6030100B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149750A (en) * 1981-03-12 1982-09-16 Nippon Telegr & Teleph Corp <Ntt> Element isolating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149750A (en) * 1981-03-12 1982-09-16 Nippon Telegr & Teleph Corp <Ntt> Element isolating method
JPS6217865B2 (en) * 1981-03-12 1987-04-20 Nippon Telegraph & Telephone

Also Published As

Publication number Publication date
JPS6030100B2 (en) 1985-07-15

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