JPS52122092A - Thin film el panel - Google Patents

Thin film el panel

Info

Publication number
JPS52122092A
JPS52122092A JP3885876A JP3885876A JPS52122092A JP S52122092 A JPS52122092 A JP S52122092A JP 3885876 A JP3885876 A JP 3885876A JP 3885876 A JP3885876 A JP 3885876A JP S52122092 A JPS52122092 A JP S52122092A
Authority
JP
Japan
Prior art keywords
thin film
panel
coating
cleanin
thoroughly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3885876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728198B2 (cs
Inventor
Mikiro Takeda
Toshio Inoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP3885876A priority Critical patent/JPS52122092A/ja
Publication of JPS52122092A publication Critical patent/JPS52122092A/ja
Publication of JPS5728198B2 publication Critical patent/JPS5728198B2/ja
Granted legal-status Critical Current

Links

JP3885876A 1976-04-06 1976-04-06 Thin film el panel Granted JPS52122092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3885876A JPS52122092A (en) 1976-04-06 1976-04-06 Thin film el panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3885876A JPS52122092A (en) 1976-04-06 1976-04-06 Thin film el panel

Publications (2)

Publication Number Publication Date
JPS52122092A true JPS52122092A (en) 1977-10-13
JPS5728198B2 JPS5728198B2 (cs) 1982-06-15

Family

ID=12536888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3885876A Granted JPS52122092A (en) 1976-04-06 1976-04-06 Thin film el panel

Country Status (1)

Country Link
JP (1) JPS52122092A (cs)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59185049A (ja) * 1983-03-28 1984-10-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 光学記録デイスク
JPS6113595A (ja) * 1984-06-28 1986-01-21 シャープ株式会社 薄膜ｅｌ素子
JPS62143394A (ja) * 1985-12-17 1987-06-26 シャープ株式会社 薄膜ｅｌ素子
JPS63281395A (ja) * 1987-05-14 1988-11-17 Nec Corp 薄膜ｅｌ表示パネルの製造方法
EP1093167A2 (en) 1999-10-12 2001-04-18 Sel Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and manufacturing method thereof
US6399222B2 (en) 1997-12-27 2002-06-04 Tdk Corporation Organic electroluminescent device
EP1058314A3 (en) * 1999-06-04 2005-09-14 Sel Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59185049A (ja) * 1983-03-28 1984-10-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン 光学記録デイスク
JPS6113595A (ja) * 1984-06-28 1986-01-21 シャープ株式会社 薄膜ｅｌ素子
JPS62143394A (ja) * 1985-12-17 1987-06-26 シャープ株式会社 薄膜ｅｌ素子
JPS63281395A (ja) * 1987-05-14 1988-11-17 Nec Corp 薄膜ｅｌ表示パネルの製造方法
US6399222B2 (en) 1997-12-27 2002-06-04 Tdk Corporation Organic electroluminescent device
EP1058314A3 (en) * 1999-06-04 2005-09-14 Sel Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device
CN1333379C (zh) * 1999-06-04 2007-08-22 株式会社半导体能源研究所 制作电光器件的方法
US9293726B2 (en) 1999-06-04 2016-03-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing an electro-optical device
EP1093167A2 (en) 1999-10-12 2001-04-18 Sel Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and manufacturing method thereof
EP1093167A3 (en) * 1999-10-12 2007-02-21 Sel Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and manufacturing method thereof

Also Published As

Publication number Publication date
JPS5728198B2 (cs) 1982-06-15

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