JPS52117580A - Manufacture for mis type integrating circuit - Google Patents

Manufacture for mis type integrating circuit

Info

Publication number
JPS52117580A
JPS52117580A JP3485776A JP3485776A JPS52117580A JP S52117580 A JPS52117580 A JP S52117580A JP 3485776 A JP3485776 A JP 3485776A JP 3485776 A JP3485776 A JP 3485776A JP S52117580 A JPS52117580 A JP S52117580A
Authority
JP
Japan
Prior art keywords
mis type
manufacture
integrating circuit
type integrating
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3485776A
Other languages
Japanese (ja)
Inventor
Katsuyuki Inayoshi
Kazutoshi Miyao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3485776A priority Critical patent/JPS52117580A/en
Publication of JPS52117580A publication Critical patent/JPS52117580A/en
Pending legal-status Critical Current

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Landscapes

  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To enable MIS type IC of high yield rate and high density easily, by forming all the wirings such as resistors with the multi crystal semiconductor layers to the desired high resistance, making the mask for the parts requiring high resistance, and doping the impurity thru the window opening for the low resistance.
COPYRIGHT: (C)1977,JPO&Japio
JP3485776A 1976-03-30 1976-03-30 Manufacture for mis type integrating circuit Pending JPS52117580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3485776A JPS52117580A (en) 1976-03-30 1976-03-30 Manufacture for mis type integrating circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3485776A JPS52117580A (en) 1976-03-30 1976-03-30 Manufacture for mis type integrating circuit

Publications (1)

Publication Number Publication Date
JPS52117580A true JPS52117580A (en) 1977-10-03

Family

ID=12425835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3485776A Pending JPS52117580A (en) 1976-03-30 1976-03-30 Manufacture for mis type integrating circuit

Country Status (1)

Country Link
JP (1) JPS52117580A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324290A (en) * 1976-08-18 1978-03-06 Nec Corp Semiconductor device
JPS5342577A (en) * 1976-09-27 1978-04-18 Texas Instruments Inc Ic resistor element and method of producing same
JPS5372483A (en) * 1976-12-09 1978-06-27 Matsushita Electric Ind Co Ltd Semiconductor device and its manufacture
JPS54128689A (en) * 1978-03-27 1979-10-05 Intel Corp Method of forming contact area between polycrystal sllicon layers
JPS5570057A (en) * 1978-11-22 1980-05-27 Hitachi Ltd Preparation of semiconductor device
JPS5830151A (en) * 1981-08-18 1983-02-22 Toshiba Corp Semiconductor device and manufacture thereof
JPS6196756A (en) * 1984-10-17 1986-05-15 Nec Corp Semiconductor device and manufacture thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922871A (en) * 1972-06-20 1974-02-28
JPS501987A (en) * 1973-04-16 1975-01-10
JPS5011644A (en) * 1973-06-01 1975-02-06
JPS5040835A (en) * 1973-08-14 1975-04-14

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922871A (en) * 1972-06-20 1974-02-28
JPS501987A (en) * 1973-04-16 1975-01-10
JPS5011644A (en) * 1973-06-01 1975-02-06
JPS5040835A (en) * 1973-08-14 1975-04-14

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324290A (en) * 1976-08-18 1978-03-06 Nec Corp Semiconductor device
JPS5342577A (en) * 1976-09-27 1978-04-18 Texas Instruments Inc Ic resistor element and method of producing same
JPS5372483A (en) * 1976-12-09 1978-06-27 Matsushita Electric Ind Co Ltd Semiconductor device and its manufacture
JPS5755300B2 (en) * 1976-12-09 1982-11-24
JPS54128689A (en) * 1978-03-27 1979-10-05 Intel Corp Method of forming contact area between polycrystal sllicon layers
JPS5570057A (en) * 1978-11-22 1980-05-27 Hitachi Ltd Preparation of semiconductor device
JPS5830151A (en) * 1981-08-18 1983-02-22 Toshiba Corp Semiconductor device and manufacture thereof
JPS6196756A (en) * 1984-10-17 1986-05-15 Nec Corp Semiconductor device and manufacture thereof

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