JPS52115675A - Semiconductor strain gauge - Google Patents

Semiconductor strain gauge

Info

Publication number
JPS52115675A
JPS52115675A JP3197776A JP3197776A JPS52115675A JP S52115675 A JPS52115675 A JP S52115675A JP 3197776 A JP3197776 A JP 3197776A JP 3197776 A JP3197776 A JP 3197776A JP S52115675 A JPS52115675 A JP S52115675A
Authority
JP
Japan
Prior art keywords
strain gauge
semiconductor strain
strain
making
flown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3197776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5635313B2 (enExample
Inventor
Kazumichi Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP3197776A priority Critical patent/JPS52115675A/ja
Publication of JPS52115675A publication Critical patent/JPS52115675A/ja
Publication of JPS5635313B2 publication Critical patent/JPS5635313B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP3197776A 1976-03-25 1976-03-25 Semiconductor strain gauge Granted JPS52115675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3197776A JPS52115675A (en) 1976-03-25 1976-03-25 Semiconductor strain gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3197776A JPS52115675A (en) 1976-03-25 1976-03-25 Semiconductor strain gauge

Publications (2)

Publication Number Publication Date
JPS52115675A true JPS52115675A (en) 1977-09-28
JPS5635313B2 JPS5635313B2 (enExample) 1981-08-15

Family

ID=12345996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3197776A Granted JPS52115675A (en) 1976-03-25 1976-03-25 Semiconductor strain gauge

Country Status (1)

Country Link
JP (1) JPS52115675A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015084427A (ja) * 2014-11-24 2015-04-30 株式会社半導体エネルギー研究所 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015084427A (ja) * 2014-11-24 2015-04-30 株式会社半導体エネルギー研究所 半導体装置

Also Published As

Publication number Publication date
JPS5635313B2 (enExample) 1981-08-15

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