JPS52111432A - Exposing method in photooetching - Google Patents

Exposing method in photooetching

Info

Publication number
JPS52111432A
JPS52111432A JP2832176A JP2832176A JPS52111432A JP S52111432 A JPS52111432 A JP S52111432A JP 2832176 A JP2832176 A JP 2832176A JP 2832176 A JP2832176 A JP 2832176A JP S52111432 A JPS52111432 A JP S52111432A
Authority
JP
Japan
Prior art keywords
photooetching
exposing method
exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2832176A
Other languages
English (en)
Inventor
Kouichi Ishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilot Precision KK
Original Assignee
Pilot Precision KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilot Precision KK filed Critical Pilot Precision KK
Priority to JP2832176A priority Critical patent/JPS52111432A/ja
Publication of JPS52111432A publication Critical patent/JPS52111432A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP2832176A 1976-03-16 1976-03-16 Exposing method in photooetching Pending JPS52111432A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2832176A JPS52111432A (en) 1976-03-16 1976-03-16 Exposing method in photooetching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2832176A JPS52111432A (en) 1976-03-16 1976-03-16 Exposing method in photooetching

Publications (1)

Publication Number Publication Date
JPS52111432A true JPS52111432A (en) 1977-09-19

Family

ID=12245339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2832176A Pending JPS52111432A (en) 1976-03-16 1976-03-16 Exposing method in photooetching

Country Status (1)

Country Link
JP (1) JPS52111432A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189656A (ja) * 1988-01-25 1989-07-28 Sony Corp パターン転写装置
JPH0448542U (ja) * 1990-08-29 1992-04-24
JPH0587883U (ja) * 1991-02-07 1993-11-26 張 崇泰 Ｐｔｃヒーター

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189656A (ja) * 1988-01-25 1989-07-28 Sony Corp パターン転写装置
JPH0448542U (ja) * 1990-08-29 1992-04-24
JPH0587883U (ja) * 1991-02-07 1993-11-26 張 崇泰 Ｐｔｃヒーター

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