JPS52101978A - Preparation of semiconductor device on insulating substrate - Google Patents

Preparation of semiconductor device on insulating substrate

Info

Publication number
JPS52101978A
JPS52101978A JP1791076A JP1791076A JPS52101978A JP S52101978 A JPS52101978 A JP S52101978A JP 1791076 A JP1791076 A JP 1791076A JP 1791076 A JP1791076 A JP 1791076A JP S52101978 A JPS52101978 A JP S52101978A
Authority
JP
Japan
Prior art keywords
semiconductor device
insulating substrate
preparation
semiconductor layers
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1791076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5617822B2 (enExample
Inventor
Eitaro Sugino
Hiroyuki Tango
Yoshio Nishi
Kenji Maeguchi
Minoru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1791076A priority Critical patent/JPS52101978A/ja
Publication of JPS52101978A publication Critical patent/JPS52101978A/ja
Publication of JPS5617822B2 publication Critical patent/JPS5617822B2/ja
Granted legal-status Critical Current

Links

JP1791076A 1976-02-23 1976-02-23 Preparation of semiconductor device on insulating substrate Granted JPS52101978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1791076A JPS52101978A (en) 1976-02-23 1976-02-23 Preparation of semiconductor device on insulating substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1791076A JPS52101978A (en) 1976-02-23 1976-02-23 Preparation of semiconductor device on insulating substrate

Publications (2)

Publication Number Publication Date
JPS52101978A true JPS52101978A (en) 1977-08-26
JPS5617822B2 JPS5617822B2 (enExample) 1981-04-24

Family

ID=11956894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1791076A Granted JPS52101978A (en) 1976-02-23 1976-02-23 Preparation of semiconductor device on insulating substrate

Country Status (1)

Country Link
JP (1) JPS52101978A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315086A (en) * 1976-07-27 1978-02-10 Sharp Corp Semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831888A (enExample) * 1971-08-30 1973-04-26
JPS49135578A (enExample) * 1973-04-28 1974-12-27
JPS505027A (enExample) * 1973-05-14 1975-01-20

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831888A (enExample) * 1971-08-30 1973-04-26
JPS49135578A (enExample) * 1973-04-28 1974-12-27
JPS505027A (enExample) * 1973-05-14 1975-01-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5315086A (en) * 1976-07-27 1978-02-10 Sharp Corp Semiconductor device

Also Published As

Publication number Publication date
JPS5617822B2 (enExample) 1981-04-24

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