JPS5210089A - Method for manufacturing semiconductor device - Google Patents

Method for manufacturing semiconductor device

Info

Publication number
JPS5210089A
JPS5210089A JP8586275A JP8586275A JPS5210089A JP S5210089 A JPS5210089 A JP S5210089A JP 8586275 A JP8586275 A JP 8586275A JP 8586275 A JP8586275 A JP 8586275A JP S5210089 A JPS5210089 A JP S5210089A
Authority
JP
Japan
Prior art keywords
layer
semiconductor device
manufacturing semiconductor
wirings
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8586275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5730297B2 (enrdf_load_stackoverflow
Inventor
Masaaki Ishizaka
Masae Oota
Tadashi Uchiumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP8586275A priority Critical patent/JPS5210089A/ja
Publication of JPS5210089A publication Critical patent/JPS5210089A/ja
Publication of JPS5730297B2 publication Critical patent/JPS5730297B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP8586275A 1975-07-15 1975-07-15 Method for manufacturing semiconductor device Granted JPS5210089A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8586275A JPS5210089A (en) 1975-07-15 1975-07-15 Method for manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8586275A JPS5210089A (en) 1975-07-15 1975-07-15 Method for manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5210089A true JPS5210089A (en) 1977-01-26
JPS5730297B2 JPS5730297B2 (enrdf_load_stackoverflow) 1982-06-28

Family

ID=13870684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8586275A Granted JPS5210089A (en) 1975-07-15 1975-07-15 Method for manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5210089A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759394U (enrdf_load_stackoverflow) * 1980-09-27 1982-04-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759394U (enrdf_load_stackoverflow) * 1980-09-27 1982-04-08

Also Published As

Publication number Publication date
JPS5730297B2 (enrdf_load_stackoverflow) 1982-06-28

Similar Documents

Publication Publication Date Title
JPS5334484A (en) Forming method for multi layer wiring
JPS5397790A (en) Semiconductor device
JPS5240969A (en) Process for production of semiconductor device
JPS5324277A (en) Semiconductor devic e and its production
JPS5570060A (en) Semiconductor device
JPS5210089A (en) Method for manufacturing semiconductor device
JPS5283070A (en) Production of semiconductor device
JPS5331964A (en) Production of semiconductor substrates
JPS5261981A (en) Production of semiconductor device
JPS5272571A (en) Production of semiconductor device
JPS5380A (en) Manufacture of semiconductor device
JPS53141591A (en) Manufacture of semiconductor device
JPS5263080A (en) Production of semiconductor integrated circuit device
JPS539483A (en) Semiconductor device
JPS52154392A (en) Production of semiconductor device
JPS5368165A (en) Production of semiconductor device
JPS52123879A (en) Mos type semiconductor device and its production
JPS5283073A (en) Production of semiconductor device
JPS5213788A (en) Production method of semiconductor device
JPS5324289A (en) Production of semiconductor device
JPS5317286A (en) Production of semiconductor device
JPS5331966A (en) Production of semiconductor device
JPS5376681A (en) Production of semiconductor integrated circuit device
JPS5253680A (en) Semiconductor device
JPS5363986A (en) Production of semiconductor device