JPS5176979A - Ichiseigosochi - Google Patents

Ichiseigosochi

Info

Publication number
JPS5176979A
JPS5176979A JP14864074A JP14864074A JPS5176979A JP S5176979 A JPS5176979 A JP S5176979A JP 14864074 A JP14864074 A JP 14864074A JP 14864074 A JP14864074 A JP 14864074A JP S5176979 A JPS5176979 A JP S5176979A
Authority
JP
Japan
Prior art keywords
ichiseigosochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14864074A
Other languages
English (en)
Other versions
JPS5729045B2 (ja
Inventor
Mitsuyoshi Koizumi
Yasuhiko Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14864074A priority Critical patent/JPS5176979A/ja
Publication of JPS5176979A publication Critical patent/JPS5176979A/ja
Publication of JPS5729045B2 publication Critical patent/JPS5729045B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP14864074A 1974-12-27 1974-12-27 Ichiseigosochi Granted JPS5176979A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14864074A JPS5176979A (ja) 1974-12-27 1974-12-27 Ichiseigosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14864074A JPS5176979A (ja) 1974-12-27 1974-12-27 Ichiseigosochi

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP56182282A Division JPS6025896B2 (ja) 1981-11-16 1981-11-16 位置検出方式
JP56182283A Division JPS608724B2 (ja) 1981-11-16 1981-11-16 検出装置
JP56182284A Division JPS5943820B2 (ja) 1981-11-16 1981-11-16 位置整合装置

Publications (2)

Publication Number Publication Date
JPS5176979A true JPS5176979A (ja) 1976-07-03
JPS5729045B2 JPS5729045B2 (ja) 1982-06-21

Family

ID=15457302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14864074A Granted JPS5176979A (ja) 1974-12-27 1974-12-27 Ichiseigosochi

Country Status (1)

Country Link
JP (1) JPS5176979A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135653A (en) * 1977-05-01 1978-11-27 Canon Inc Photoelectric detecting optical device
JPS5453967A (en) * 1977-10-07 1979-04-27 Canon Inc Mask and wafer for semiconductor circuit manufacture and their alignment unit
JPS54152975A (en) * 1978-05-22 1979-12-01 Siemens Ag Method of and device for automatically coinciding
JPS5618936U (ja) * 1979-07-23 1981-02-19
JPS58208603A (ja) * 1982-05-31 1983-12-05 Hitachi Ltd 位置検出方法
JPS58502173A (ja) * 1981-12-21 1983-12-15 バロ−ス・コ−ポレ−ション ウエハ規模集積回路における、またそれに関する改良

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135653A (en) * 1977-05-01 1978-11-27 Canon Inc Photoelectric detecting optical device
JPS6337321B2 (ja) * 1977-05-01 1988-07-25 Canon Kk
JPS5453967A (en) * 1977-10-07 1979-04-27 Canon Inc Mask and wafer for semiconductor circuit manufacture and their alignment unit
JPS6124816B2 (ja) * 1977-10-07 1986-06-12 Canon Kk
JPS54152975A (en) * 1978-05-22 1979-12-01 Siemens Ag Method of and device for automatically coinciding
JPH0135492B2 (ja) * 1978-05-22 1989-07-25 Siemens Ag
JPS5618936U (ja) * 1979-07-23 1981-02-19
JPS58502173A (ja) * 1981-12-21 1983-12-15 バロ−ス・コ−ポレ−ション ウエハ規模集積回路における、またそれに関する改良
JPS58208603A (ja) * 1982-05-31 1983-12-05 Hitachi Ltd 位置検出方法

Also Published As

Publication number Publication date
JPS5729045B2 (ja) 1982-06-21

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