JPS5160700A - gaas ekisoepitakisharuseichoho - Google Patents

gaas ekisoepitakisharuseichoho

Info

Publication number
JPS5160700A
JPS5160700A JP13483574A JP13483574A JPS5160700A JP S5160700 A JPS5160700 A JP S5160700A JP 13483574 A JP13483574 A JP 13483574A JP 13483574 A JP13483574 A JP 13483574A JP S5160700 A JPS5160700 A JP S5160700A
Authority
JP
Japan
Prior art keywords
ekisoepitakisharuseichoho
gaas
gaas ekisoepitakisharuseichoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13483574A
Other languages
Japanese (ja)
Other versions
JPS5434594B2 (en
Inventor
Tooru Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13483574A priority Critical patent/JPS5160700A/en
Publication of JPS5160700A publication Critical patent/JPS5160700A/en
Publication of JPS5434594B2 publication Critical patent/JPS5434594B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13483574A 1974-11-22 1974-11-22 gaas ekisoepitakisharuseichoho Granted JPS5160700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13483574A JPS5160700A (en) 1974-11-22 1974-11-22 gaas ekisoepitakisharuseichoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13483574A JPS5160700A (en) 1974-11-22 1974-11-22 gaas ekisoepitakisharuseichoho

Publications (2)

Publication Number Publication Date
JPS5160700A true JPS5160700A (en) 1976-05-26
JPS5434594B2 JPS5434594B2 (en) 1979-10-27

Family

ID=15137561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13483574A Granted JPS5160700A (en) 1974-11-22 1974-11-22 gaas ekisoepitakisharuseichoho

Country Status (1)

Country Link
JP (1) JPS5160700A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123086A (en) * 1977-04-01 1978-10-27 Fujitsu Ltd Varactor diode
JPS5546536A (en) * 1978-09-27 1980-04-01 Nec Corp Method of growing crystal
DE102018000627A1 (en) 2017-02-03 2018-08-09 Fanuc Corporation A processing system and machine controller, wherein a movable robot loads and unloads an object relative to the processing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6645977B2 (en) 2014-03-04 2020-02-14 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Formulation gas concentration pressure support system and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123086A (en) * 1977-04-01 1978-10-27 Fujitsu Ltd Varactor diode
JPS5546536A (en) * 1978-09-27 1980-04-01 Nec Corp Method of growing crystal
JPS6323651B2 (en) * 1978-09-27 1988-05-17 Nippon Electric Co
DE102018000627A1 (en) 2017-02-03 2018-08-09 Fanuc Corporation A processing system and machine controller, wherein a movable robot loads and unloads an object relative to the processing device

Also Published As

Publication number Publication date
JPS5434594B2 (en) 1979-10-27

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