JPS5131172A - Gaas no tasoseichoeha no sakuseihoho - Google Patents

Gaas no tasoseichoeha no sakuseihoho

Info

Publication number
JPS5131172A
JPS5131172A JP10399974A JP10399974A JPS5131172A JP S5131172 A JPS5131172 A JP S5131172A JP 10399974 A JP10399974 A JP 10399974A JP 10399974 A JP10399974 A JP 10399974A JP S5131172 A JPS5131172 A JP S5131172A
Authority
JP
Japan
Prior art keywords
tasoseichoeha
sakuseihoho
gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10399974A
Other languages
Japanese (ja)
Inventor
Michihiro Ito
Takao Oda
Hidejiro Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10399974A priority Critical patent/JPS5131172A/en
Publication of JPS5131172A publication Critical patent/JPS5131172A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP10399974A 1974-09-10 1974-09-10 Gaas no tasoseichoeha no sakuseihoho Pending JPS5131172A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10399974A JPS5131172A (en) 1974-09-10 1974-09-10 Gaas no tasoseichoeha no sakuseihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10399974A JPS5131172A (en) 1974-09-10 1974-09-10 Gaas no tasoseichoeha no sakuseihoho

Publications (1)

Publication Number Publication Date
JPS5131172A true JPS5131172A (en) 1976-03-17

Family

ID=14368977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10399974A Pending JPS5131172A (en) 1974-09-10 1974-09-10 Gaas no tasoseichoeha no sakuseihoho

Country Status (1)

Country Link
JP (1) JPS5131172A (en)

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