JPS5173872A - Taketsusho gaas nokisoseichoho - Google Patents

Taketsusho gaas nokisoseichoho

Info

Publication number
JPS5173872A
JPS5173872A JP45375A JP45375A JPS5173872A JP S5173872 A JPS5173872 A JP S5173872A JP 45375 A JP45375 A JP 45375A JP 45375 A JP45375 A JP 45375A JP S5173872 A JPS5173872 A JP S5173872A
Authority
JP
Japan
Prior art keywords
taketsusho
nokisoseichoho
gaas
taketsusho gaas
gaas nokisoseichoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45375A
Other languages
Japanese (ja)
Inventor
Yoshifumi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP45375A priority Critical patent/JPS5173872A/en
Publication of JPS5173872A publication Critical patent/JPS5173872A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Element Separation (AREA)
JP45375A 1974-12-24 1974-12-24 Taketsusho gaas nokisoseichoho Pending JPS5173872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP45375A JPS5173872A (en) 1974-12-24 1974-12-24 Taketsusho gaas nokisoseichoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45375A JPS5173872A (en) 1974-12-24 1974-12-24 Taketsusho gaas nokisoseichoho

Publications (1)

Publication Number Publication Date
JPS5173872A true JPS5173872A (en) 1976-06-26

Family

ID=11474203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45375A Pending JPS5173872A (en) 1974-12-24 1974-12-24 Taketsusho gaas nokisoseichoho

Country Status (1)

Country Link
JP (1) JPS5173872A (en)

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