JPS5150884A - gaas no ekisoseichohoho - Google Patents

gaas no ekisoseichohoho

Info

Publication number
JPS5150884A
JPS5150884A JP12437374A JP12437374A JPS5150884A JP S5150884 A JPS5150884 A JP S5150884A JP 12437374 A JP12437374 A JP 12437374A JP 12437374 A JP12437374 A JP 12437374A JP S5150884 A JPS5150884 A JP S5150884A
Authority
JP
Japan
Prior art keywords
ekisoseichohoho
gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12437374A
Other languages
Japanese (ja)
Inventor
Konen Doi
Masatoshi Utaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12437374A priority Critical patent/JPS5150884A/en
Publication of JPS5150884A publication Critical patent/JPS5150884A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP12437374A 1974-10-30 1974-10-30 gaas no ekisoseichohoho Pending JPS5150884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12437374A JPS5150884A (en) 1974-10-30 1974-10-30 gaas no ekisoseichohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12437374A JPS5150884A (en) 1974-10-30 1974-10-30 gaas no ekisoseichohoho

Publications (1)

Publication Number Publication Date
JPS5150884A true JPS5150884A (en) 1976-05-04

Family

ID=14883782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12437374A Pending JPS5150884A (en) 1974-10-30 1974-10-30 gaas no ekisoseichohoho

Country Status (1)

Country Link
JP (1) JPS5150884A (en)

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