JPS5126050A - - Google Patents
Info
- Publication number
- JPS5126050A JPS5126050A JP49098171A JP9817174A JPS5126050A JP S5126050 A JPS5126050 A JP S5126050A JP 49098171 A JP49098171 A JP 49098171A JP 9817174 A JP9817174 A JP 9817174A JP S5126050 A JPS5126050 A JP S5126050A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49098171A JPS5813890B2 (ja) | 1974-08-27 | 1974-08-27 | ニジゲンテキヒカリヘンコウソウチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49098171A JPS5813890B2 (ja) | 1974-08-27 | 1974-08-27 | ニジゲンテキヒカリヘンコウソウチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5126050A true JPS5126050A (de) | 1976-03-03 |
| JPS5813890B2 JPS5813890B2 (ja) | 1983-03-16 |
Family
ID=14212592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49098171A Expired JPS5813890B2 (ja) | 1974-08-27 | 1974-08-27 | ニジゲンテキヒカリヘンコウソウチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5813890B2 (de) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5855804A (ja) * | 1981-09-30 | 1983-04-02 | Fujitsu Ltd | 物体検知装置 |
| JPS5924218A (ja) * | 1982-07-30 | 1984-02-07 | Sharp Corp | 振動モ−ド測定装置 |
| JPS613006A (ja) * | 1984-06-18 | 1986-01-09 | Koden Kogyo Kk | 平面形状測定装置 |
| US4734578A (en) * | 1985-03-27 | 1988-03-29 | Olympus Optical Co., Ltd. | Two-dimensional scanning photo-electric microscope |
| JPH031117A (ja) * | 1988-10-11 | 1991-01-07 | E I Du Pont De Nemours & Co | 走査型レーザ顕微鏡装置及びその使用方法 |
| US5046795A (en) * | 1987-12-23 | 1991-09-10 | Asahi Kogaku Kogyo Kabushiki Kaisha | Apparatus for producing a distortion-free two-dimensional image of a scanned object |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH037091Y2 (de) * | 1984-11-09 | 1991-02-21 |
-
1974
- 1974-08-27 JP JP49098171A patent/JPS5813890B2/ja not_active Expired
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5855804A (ja) * | 1981-09-30 | 1983-04-02 | Fujitsu Ltd | 物体検知装置 |
| JPH0311401B2 (de) * | 1981-09-30 | 1991-02-15 | Fujitsu Ltd | |
| JPS5924218A (ja) * | 1982-07-30 | 1984-02-07 | Sharp Corp | 振動モ−ド測定装置 |
| JPH0337692B2 (de) * | 1982-07-30 | 1991-06-06 | Sharp Kk | |
| JPS613006A (ja) * | 1984-06-18 | 1986-01-09 | Koden Kogyo Kk | 平面形状測定装置 |
| US4734578A (en) * | 1985-03-27 | 1988-03-29 | Olympus Optical Co., Ltd. | Two-dimensional scanning photo-electric microscope |
| US5046795A (en) * | 1987-12-23 | 1991-09-10 | Asahi Kogaku Kogyo Kabushiki Kaisha | Apparatus for producing a distortion-free two-dimensional image of a scanned object |
| US5067782A (en) * | 1987-12-23 | 1991-11-26 | Asahi Kogaku Kogyo Kabushiki Kaisha | Apparatus for producing a distortion-free two-dimensional image of a scanned object |
| US5107364A (en) * | 1987-12-23 | 1992-04-21 | Asahi Kogaku Kogyo Kabushiki Kaisha | Apparatus for producing a distortion-free two-dimensional image of a scanned object |
| JPH031117A (ja) * | 1988-10-11 | 1991-01-07 | E I Du Pont De Nemours & Co | 走査型レーザ顕微鏡装置及びその使用方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5813890B2 (ja) | 1983-03-16 |