JPS51147966A - Plasma etching process - Google Patents

Plasma etching process

Info

Publication number
JPS51147966A
JPS51147966A JP7222675A JP7222675A JPS51147966A JP S51147966 A JPS51147966 A JP S51147966A JP 7222675 A JP7222675 A JP 7222675A JP 7222675 A JP7222675 A JP 7222675A JP S51147966 A JPS51147966 A JP S51147966A
Authority
JP
Japan
Prior art keywords
etching process
plasma etching
enable
way
electrode wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7222675A
Other languages
Japanese (ja)
Inventor
Keiji Nishimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7222675A priority Critical patent/JPS51147966A/en
Publication of JPS51147966A publication Critical patent/JPS51147966A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To enable the satisfactory connection between the electrode wiring and the external lead even when opening windows for bonding use by way of plasma etching process.
COPYRIGHT: (C)1976,JPO&Japio
JP7222675A 1975-06-14 1975-06-14 Plasma etching process Pending JPS51147966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7222675A JPS51147966A (en) 1975-06-14 1975-06-14 Plasma etching process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7222675A JPS51147966A (en) 1975-06-14 1975-06-14 Plasma etching process

Publications (1)

Publication Number Publication Date
JPS51147966A true JPS51147966A (en) 1976-12-18

Family

ID=13483124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7222675A Pending JPS51147966A (en) 1975-06-14 1975-06-14 Plasma etching process

Country Status (1)

Country Link
JP (1) JPS51147966A (en)

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