Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP7222675ApriorityCriticalpatent/JPS51147966A/en
Publication of JPS51147966ApublicationCriticalpatent/JPS51147966A/en
PURPOSE: To enable the satisfactory connection between the electrode wiring and the external lead even when opening windows for bonding use by way of plasma etching process.
COPYRIGHT: (C)1976,JPO&Japio
JP7222675A1975-06-141975-06-14Plasma etching process
PendingJPS51147966A
(en)