JPS51140477A - Method of fabricating semiconductor device - Google Patents

Method of fabricating semiconductor device

Info

Publication number
JPS51140477A
JPS51140477A JP6423175A JP6423175A JPS51140477A JP S51140477 A JPS51140477 A JP S51140477A JP 6423175 A JP6423175 A JP 6423175A JP 6423175 A JP6423175 A JP 6423175A JP S51140477 A JPS51140477 A JP S51140477A
Authority
JP
Japan
Prior art keywords
semiconductor device
fabricating semiconductor
pellet
microscope
inclination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6423175A
Other languages
English (en)
Inventor
Seiji Kashioka
Masayoshi Kameyama
Norimasa Miyamoto
Hiroshi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6423175A priority Critical patent/JPS51140477A/ja
Publication of JPS51140477A publication Critical patent/JPS51140477A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
JP6423175A 1975-05-30 1975-05-30 Method of fabricating semiconductor device Pending JPS51140477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6423175A JPS51140477A (en) 1975-05-30 1975-05-30 Method of fabricating semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6423175A JPS51140477A (en) 1975-05-30 1975-05-30 Method of fabricating semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP60036335A Division JPS6181640A (ja) 1985-02-27 1985-02-27 半導体装置の製造方法

Publications (1)

Publication Number Publication Date
JPS51140477A true JPS51140477A (en) 1976-12-03

Family

ID=13252126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6423175A Pending JPS51140477A (en) 1975-05-30 1975-05-30 Method of fabricating semiconductor device

Country Status (1)

Country Link
JP (1) JPS51140477A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773618U (ja) * 1980-10-21 1982-05-07
JPH02132563A (ja) * 1988-03-31 1990-05-22 Tokyo Electron Ltd 画像読取方法
JPH02153480A (ja) * 1988-12-06 1990-06-13 Tokyo Electron Ltd パターン認識装置及びパターン認識方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773618U (ja) * 1980-10-21 1982-05-07
JPS639006Y2 (ja) * 1980-10-21 1988-03-17
JPH02132563A (ja) * 1988-03-31 1990-05-22 Tokyo Electron Ltd 画像読取方法
JPH02153480A (ja) * 1988-12-06 1990-06-13 Tokyo Electron Ltd パターン認識装置及びパターン認識方法

Similar Documents

Publication Publication Date Title
JPS5283177A (en) Electron beam exposure device
JPS51140477A (en) Method of fabricating semiconductor device
JPS51114887A (en) Semiconductor device
JPS5239366A (en) Electronic gun device
JPS539491A (en) Photo semiconductor device
JPS51139787A (en) Semiconductor light emitting device
JPS54134992A (en) Semiconductor device
JPS5349974A (en) Semiconductor laser device
JPS5429573A (en) Fine machining method of semiconductor
JPS5413732A (en) Light source device
JPS51149781A (en) Device for mounting semiconductor laserelement
JPS51114881A (en) Semiconductor device manufacturing method
JPS527670A (en) Automatic focus control method for electron beams
JPS5225487A (en) Incandescent lamp
JPS5353975A (en) Electronic beam exposure device
JPS547891A (en) Manufacture for planar semiconductor light emission device
JPS54133105A (en) Optical disposition in disc reader
JPS5428566A (en) Manufacture of semiconductor device
JPS5574155A (en) Semiconductor surface identifying device
JPS535574A (en) Manufacture of semiconductor device
JPS5223357A (en) Semiconductor photomodulator
JPS5242379A (en) Method of inspecting pinholes of insulating film formed on semiconduct or surface
JPS5297669A (en) Semiconductor device
JPS5371A (en) Scribing method of semiconductor wafer
JPS51142277A (en) Device for electron-beam exposure