JPS51138464A - Device for detecting relative position of plural articles - Google Patents

Device for detecting relative position of plural articles

Info

Publication number
JPS51138464A
JPS51138464A JP50061977A JP6197775A JPS51138464A JP S51138464 A JPS51138464 A JP S51138464A JP 50061977 A JP50061977 A JP 50061977A JP 6197775 A JP6197775 A JP 6197775A JP S51138464 A JPS51138464 A JP S51138464A
Authority
JP
Japan
Prior art keywords
relative position
plural articles
detecting relative
plural
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50061977A
Other languages
English (en)
Other versions
JPS5742971B2 (ja
Inventor
Mitsuyoshi Koizumi
Nobuyuki Akiyama
Hiroshi Makihira
Yasuo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50061977A priority Critical patent/JPS51138464A/ja
Publication of JPS51138464A publication Critical patent/JPS51138464A/ja
Publication of JPS5742971B2 publication Critical patent/JPS5742971B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP50061977A 1975-05-26 1975-05-26 Device for detecting relative position of plural articles Granted JPS51138464A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50061977A JPS51138464A (en) 1975-05-26 1975-05-26 Device for detecting relative position of plural articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50061977A JPS51138464A (en) 1975-05-26 1975-05-26 Device for detecting relative position of plural articles

Publications (2)

Publication Number Publication Date
JPS51138464A true JPS51138464A (en) 1976-11-30
JPS5742971B2 JPS5742971B2 (ja) 1982-09-11

Family

ID=13186736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50061977A Granted JPS51138464A (en) 1975-05-26 1975-05-26 Device for detecting relative position of plural articles

Country Status (1)

Country Link
JP (1) JPS51138464A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53111280A (en) * 1977-03-10 1978-09-28 Canon Inc Mask or wafer for production of semiconductor elements and device for aligning these
JPS5553439A (en) * 1978-10-16 1980-04-18 Fujitsu Ltd Dicing treatment method
JPS5875834A (ja) * 1981-10-30 1983-05-07 Hitachi Ltd プロキシミティ露光装置
US4614431A (en) * 1983-02-18 1986-09-30 Hitachi, Ltd. Alignment apparatus with optical length-varying optical system
JP2012042436A (ja) * 2010-08-23 2012-03-01 Hitachi High-Technologies Corp Ｆｐｄモジュールの位置決めマーク認識装置及びｆｐｄモジュールの組立装置
JP2018091896A (ja) * 2016-11-30 2018-06-14 株式会社オーク製作所 露光装置および露光装置用遮光部材
JP2020030378A (ja) * 2018-08-24 2020-02-27 国立研究開発法人理化学研究所 光切替器および観察装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922587A (ja) * 1972-06-26 1974-02-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922587A (ja) * 1972-06-26 1974-02-28

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53111280A (en) * 1977-03-10 1978-09-28 Canon Inc Mask or wafer for production of semiconductor elements and device for aligning these
JPS6216012B2 (ja) * 1977-03-10 1987-04-10 Canon Kk
JPS5553439A (en) * 1978-10-16 1980-04-18 Fujitsu Ltd Dicing treatment method
JPS5875834A (ja) * 1981-10-30 1983-05-07 Hitachi Ltd プロキシミティ露光装置
JPH0311540B2 (ja) * 1981-10-30 1991-02-18 Hitachi Ltd
US4614431A (en) * 1983-02-18 1986-09-30 Hitachi, Ltd. Alignment apparatus with optical length-varying optical system
JP2012042436A (ja) * 2010-08-23 2012-03-01 Hitachi High-Technologies Corp Ｆｐｄモジュールの位置決めマーク認識装置及びｆｐｄモジュールの組立装置
JP2018091896A (ja) * 2016-11-30 2018-06-14 株式会社オーク製作所 露光装置および露光装置用遮光部材
JP2020030378A (ja) * 2018-08-24 2020-02-27 国立研究開発法人理化学研究所 光切替器および観察装置

Also Published As

Publication number Publication date
JPS5742971B2 (ja) 1982-09-11

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