JPS51126035A - Wafer-like semiconductor dope materials - Google Patents

Wafer-like semiconductor dope materials

Info

Publication number
JPS51126035A
JPS51126035A JP3109576A JP3109576A JPS51126035A JP S51126035 A JPS51126035 A JP S51126035A JP 3109576 A JP3109576 A JP 3109576A JP 3109576 A JP3109576 A JP 3109576A JP S51126035 A JPS51126035 A JP S51126035A
Authority
JP
Japan
Prior art keywords
wafer
semiconductor
dope materials
dope
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3109576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5441461B2 (enExample
Inventor
Tsuguaki Gunjikake
Masashi Hasegawa
Hiroshi Oizumi
Yoshio Ogata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP3109576A priority Critical patent/JPS51126035A/ja
Publication of JPS51126035A publication Critical patent/JPS51126035A/ja
Publication of JPS5441461B2 publication Critical patent/JPS5441461B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP3109576A 1976-03-22 1976-03-22 Wafer-like semiconductor dope materials Granted JPS51126035A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3109576A JPS51126035A (en) 1976-03-22 1976-03-22 Wafer-like semiconductor dope materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3109576A JPS51126035A (en) 1976-03-22 1976-03-22 Wafer-like semiconductor dope materials

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP901975A Division JPS5183773A (ja) 1975-01-21 1975-01-21 Uehaajohandotaidoopuzai

Publications (2)

Publication Number Publication Date
JPS51126035A true JPS51126035A (en) 1976-11-02
JPS5441461B2 JPS5441461B2 (enExample) 1979-12-08

Family

ID=12321828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3109576A Granted JPS51126035A (en) 1976-03-22 1976-03-22 Wafer-like semiconductor dope materials

Country Status (1)

Country Link
JP (1) JPS51126035A (enExample)

Also Published As

Publication number Publication date
JPS5441461B2 (enExample) 1979-12-08

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