JPS52119073A - Control of semiconductor wafer - Google Patents

Control of semiconductor wafer

Info

Publication number
JPS52119073A
JPS52119073A JP3441476A JP3441476A JPS52119073A JP S52119073 A JPS52119073 A JP S52119073A JP 3441476 A JP3441476 A JP 3441476A JP 3441476 A JP3441476 A JP 3441476A JP S52119073 A JPS52119073 A JP S52119073A
Authority
JP
Japan
Prior art keywords
control
semiconductor wafer
wafer
code
peculiar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3441476A
Other languages
Japanese (ja)
Inventor
Hisashi Muraoka
Teruo Yoneyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3441476A priority Critical patent/JPS52119073A/en
Priority to US05/782,757 priority patent/US4095095A/en
Priority to GB13358/77A priority patent/GB1534248A/en
Publication of JPS52119073A publication Critical patent/JPS52119073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: A peculiar code is formed in thememory provided on a wafer, and the wafer having this code and the manufacturing conditions peculiar to each wafer are made to coincide with each other to obtain the required information--thereby making it possible to control each wafer.
COPYRIGHT: (C)1977,JPO&Japio
JP3441476A 1976-03-31 1976-03-31 Control of semiconductor wafer Pending JPS52119073A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP3441476A JPS52119073A (en) 1976-03-31 1976-03-31 Control of semiconductor wafer
US05/782,757 US4095095A (en) 1976-03-31 1977-03-30 Apparatus for manufacturing semiconductor devices
GB13358/77A GB1534248A (en) 1976-03-31 1977-03-30 Apparatus for manufacturing semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3441476A JPS52119073A (en) 1976-03-31 1976-03-31 Control of semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS52119073A true JPS52119073A (en) 1977-10-06

Family

ID=12413524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3441476A Pending JPS52119073A (en) 1976-03-31 1976-03-31 Control of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS52119073A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153156A (en) * 1984-01-23 1985-08-12 Toshiba Corp Semiconductor ic device
JPS62183522A (en) * 1986-02-07 1987-08-11 Nippon Kogaku Kk <Nikon> Projection and exposure apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153156A (en) * 1984-01-23 1985-08-12 Toshiba Corp Semiconductor ic device
JPH0564465B2 (en) * 1984-01-23 1993-09-14 Tokyo Shibaura Electric Co
JPS62183522A (en) * 1986-02-07 1987-08-11 Nippon Kogaku Kk <Nikon> Projection and exposure apparatus

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