JPS52119073A - Control of semiconductor wafer - Google Patents
Control of semiconductor waferInfo
- Publication number
- JPS52119073A JPS52119073A JP3441476A JP3441476A JPS52119073A JP S52119073 A JPS52119073 A JP S52119073A JP 3441476 A JP3441476 A JP 3441476A JP 3441476 A JP3441476 A JP 3441476A JP S52119073 A JPS52119073 A JP S52119073A
- Authority
- JP
- Japan
- Prior art keywords
- control
- semiconductor wafer
- wafer
- code
- peculiar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: A peculiar code is formed in thememory provided on a wafer, and the wafer having this code and the manufacturing conditions peculiar to each wafer are made to coincide with each other to obtain the required information--thereby making it possible to control each wafer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3441476A JPS52119073A (en) | 1976-03-31 | 1976-03-31 | Control of semiconductor wafer |
US05/782,757 US4095095A (en) | 1976-03-31 | 1977-03-30 | Apparatus for manufacturing semiconductor devices |
GB13358/77A GB1534248A (en) | 1976-03-31 | 1977-03-30 | Apparatus for manufacturing semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3441476A JPS52119073A (en) | 1976-03-31 | 1976-03-31 | Control of semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52119073A true JPS52119073A (en) | 1977-10-06 |
Family
ID=12413524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3441476A Pending JPS52119073A (en) | 1976-03-31 | 1976-03-31 | Control of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119073A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60153156A (en) * | 1984-01-23 | 1985-08-12 | Toshiba Corp | Semiconductor ic device |
JPS62183522A (en) * | 1986-02-07 | 1987-08-11 | Nippon Kogaku Kk <Nikon> | Projection and exposure apparatus |
-
1976
- 1976-03-31 JP JP3441476A patent/JPS52119073A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60153156A (en) * | 1984-01-23 | 1985-08-12 | Toshiba Corp | Semiconductor ic device |
JPH0564465B2 (en) * | 1984-01-23 | 1993-09-14 | Tokyo Shibaura Electric Co | |
JPS62183522A (en) * | 1986-02-07 | 1987-08-11 | Nippon Kogaku Kk <Nikon> | Projection and exposure apparatus |
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