JPS51124681A - A method of rf supttering - Google Patents

A method of rf supttering

Info

Publication number
JPS51124681A
JPS51124681A JP4907875A JP4907875A JPS51124681A JP S51124681 A JPS51124681 A JP S51124681A JP 4907875 A JP4907875 A JP 4907875A JP 4907875 A JP4907875 A JP 4907875A JP S51124681 A JPS51124681 A JP S51124681A
Authority
JP
Japan
Prior art keywords
supttering
vacuum
film
thin
sputtering method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4907875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS551983B2 (en:Method
Inventor
Susumu Shibata
Tsutomu Nomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4907875A priority Critical patent/JPS51124681A/ja
Publication of JPS51124681A publication Critical patent/JPS51124681A/ja
Publication of JPS551983B2 publication Critical patent/JPS551983B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP4907875A 1975-04-24 1975-04-24 A method of rf supttering Granted JPS51124681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4907875A JPS51124681A (en) 1975-04-24 1975-04-24 A method of rf supttering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4907875A JPS51124681A (en) 1975-04-24 1975-04-24 A method of rf supttering

Publications (2)

Publication Number Publication Date
JPS51124681A true JPS51124681A (en) 1976-10-30
JPS551983B2 JPS551983B2 (en:Method) 1980-01-17

Family

ID=12821042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4907875A Granted JPS51124681A (en) 1975-04-24 1975-04-24 A method of rf supttering

Country Status (1)

Country Link
JP (1) JPS51124681A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01257397A (ja) * 1988-04-07 1989-10-13 Mitsubishi Heavy Ind Ltd 金属プリント基板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01257397A (ja) * 1988-04-07 1989-10-13 Mitsubishi Heavy Ind Ltd 金属プリント基板

Also Published As

Publication number Publication date
JPS551983B2 (en:Method) 1980-01-17

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