JPS51123589A - Semi-conductor manufacturing method - Google Patents

Semi-conductor manufacturing method

Info

Publication number
JPS51123589A
JPS51123589A JP50048156A JP4815675A JPS51123589A JP S51123589 A JPS51123589 A JP S51123589A JP 50048156 A JP50048156 A JP 50048156A JP 4815675 A JP4815675 A JP 4815675A JP S51123589 A JPS51123589 A JP S51123589A
Authority
JP
Japan
Prior art keywords
semi
conductor manufacturing
conductor
manufacturing
silicon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50048156A
Other languages
English (en)
Other versions
JPS5317872B2 (ja
Inventor
Haruo Ito
Tadashi Saito
Shigekazu Minagawa
Mitsunori Ketsusako
Satoyoshi Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50048156A priority Critical patent/JPS51123589A/ja
Publication of JPS51123589A publication Critical patent/JPS51123589A/ja
Publication of JPS5317872B2 publication Critical patent/JPS5317872B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Photovoltaic Devices (AREA)
JP50048156A 1975-04-22 1975-04-22 Semi-conductor manufacturing method Granted JPS51123589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50048156A JPS51123589A (en) 1975-04-22 1975-04-22 Semi-conductor manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50048156A JPS51123589A (en) 1975-04-22 1975-04-22 Semi-conductor manufacturing method

Publications (2)

Publication Number Publication Date
JPS51123589A true JPS51123589A (en) 1976-10-28
JPS5317872B2 JPS5317872B2 (ja) 1978-06-12

Family

ID=12795498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50048156A Granted JPS51123589A (en) 1975-04-22 1975-04-22 Semi-conductor manufacturing method

Country Status (1)

Country Link
JP (1) JPS51123589A (ja)

Also Published As

Publication number Publication date
JPS5317872B2 (ja) 1978-06-12

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