JPS51116200A - Method for formation of uniform and single phase silicon carbide coati ng - Google Patents

Method for formation of uniform and single phase silicon carbide coati ng

Info

Publication number
JPS51116200A
JPS51116200A JP4034875A JP4034875A JPS51116200A JP S51116200 A JPS51116200 A JP S51116200A JP 4034875 A JP4034875 A JP 4034875A JP 4034875 A JP4034875 A JP 4034875A JP S51116200 A JPS51116200 A JP S51116200A
Authority
JP
Japan
Prior art keywords
silicon carbide
single phase
coati
uniform
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4034875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5743525B2 (https=
Inventor
Kunio Komaki
Yasukado Komatsu
Tomoo Matsushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP4034875A priority Critical patent/JPS51116200A/ja
Publication of JPS51116200A publication Critical patent/JPS51116200A/ja
Publication of JPS5743525B2 publication Critical patent/JPS5743525B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP4034875A 1975-04-04 1975-04-04 Method for formation of uniform and single phase silicon carbide coati ng Granted JPS51116200A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4034875A JPS51116200A (en) 1975-04-04 1975-04-04 Method for formation of uniform and single phase silicon carbide coati ng

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4034875A JPS51116200A (en) 1975-04-04 1975-04-04 Method for formation of uniform and single phase silicon carbide coati ng

Publications (2)

Publication Number Publication Date
JPS51116200A true JPS51116200A (en) 1976-10-13
JPS5743525B2 JPS5743525B2 (https=) 1982-09-16

Family

ID=12578120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4034875A Granted JPS51116200A (en) 1975-04-04 1975-04-04 Method for formation of uniform and single phase silicon carbide coati ng

Country Status (1)

Country Link
JP (1) JPS51116200A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01153600A (ja) * 1987-12-10 1989-06-15 Mitsui Eng & Shipbuild Co Ltd 炭化珪素単結晶の製造方法
JPH0489377A (ja) * 1990-07-27 1992-03-23 Natl Res Inst For Metals 高強度ＳｉＣ・炭素繊維複合材とその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01153600A (ja) * 1987-12-10 1989-06-15 Mitsui Eng & Shipbuild Co Ltd 炭化珪素単結晶の製造方法
JPH0489377A (ja) * 1990-07-27 1992-03-23 Natl Res Inst For Metals 高強度ＳｉＣ・炭素繊維複合材とその製造方法

Also Published As

Publication number Publication date
JPS5743525B2 (https=) 1982-09-16

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