JPS51114877A - Coating equipment - Google Patents

Coating equipment

Info

Publication number
JPS51114877A
JPS51114877A JP3910175A JP3910175A JPS51114877A JP S51114877 A JPS51114877 A JP S51114877A JP 3910175 A JP3910175 A JP 3910175A JP 3910175 A JP3910175 A JP 3910175A JP S51114877 A JPS51114877 A JP S51114877A
Authority
JP
Japan
Prior art keywords
coating equipment
lower side
wafer lower
fine particles
current flowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3910175A
Other languages
Japanese (ja)
Other versions
JPS5337189B2 (en
Inventor
Tamotsu Sasaki
Yasushi Asami
Masamitsu Tazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3910175A priority Critical patent/JPS51114877A/en
Publication of JPS51114877A publication Critical patent/JPS51114877A/en
Publication of JPS5337189B2 publication Critical patent/JPS5337189B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: Prevent photoresist fine particles from attaching wafer lower side by making air current flowing the wafer lower side to flow faster.
COPYRIGHT: (C)1976,JPO&Japio
JP3910175A 1975-04-02 1975-04-02 Coating equipment Granted JPS51114877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3910175A JPS51114877A (en) 1975-04-02 1975-04-02 Coating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3910175A JPS51114877A (en) 1975-04-02 1975-04-02 Coating equipment

Publications (2)

Publication Number Publication Date
JPS51114877A true JPS51114877A (en) 1976-10-08
JPS5337189B2 JPS5337189B2 (en) 1978-10-06

Family

ID=12543671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3910175A Granted JPS51114877A (en) 1975-04-02 1975-04-02 Coating equipment

Country Status (1)

Country Link
JP (1) JPS51114877A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6088429A (en) * 1983-10-20 1985-05-18 Fuji Electric Co Ltd Semiconductor coat-diffusion method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026417U (en) * 1983-07-29 1985-02-22 株式会社クボタ Belt conveyor wiper device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6088429A (en) * 1983-10-20 1985-05-18 Fuji Electric Co Ltd Semiconductor coat-diffusion method

Also Published As

Publication number Publication date
JPS5337189B2 (en) 1978-10-06

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