JPS51114877A - Coating equipment - Google Patents
Coating equipmentInfo
- Publication number
- JPS51114877A JPS51114877A JP3910175A JP3910175A JPS51114877A JP S51114877 A JPS51114877 A JP S51114877A JP 3910175 A JP3910175 A JP 3910175A JP 3910175 A JP3910175 A JP 3910175A JP S51114877 A JPS51114877 A JP S51114877A
- Authority
- JP
- Japan
- Prior art keywords
- coating equipment
- lower side
- wafer lower
- fine particles
- current flowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: Prevent photoresist fine particles from attaching wafer lower side by making air current flowing the wafer lower side to flow faster.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3910175A JPS51114877A (en) | 1975-04-02 | 1975-04-02 | Coating equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3910175A JPS51114877A (en) | 1975-04-02 | 1975-04-02 | Coating equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51114877A true JPS51114877A (en) | 1976-10-08 |
JPS5337189B2 JPS5337189B2 (en) | 1978-10-06 |
Family
ID=12543671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3910175A Granted JPS51114877A (en) | 1975-04-02 | 1975-04-02 | Coating equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51114877A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6088429A (en) * | 1983-10-20 | 1985-05-18 | Fuji Electric Co Ltd | Semiconductor coat-diffusion method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6026417U (en) * | 1983-07-29 | 1985-02-22 | 株式会社クボタ | Belt conveyor wiper device |
-
1975
- 1975-04-02 JP JP3910175A patent/JPS51114877A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6088429A (en) * | 1983-10-20 | 1985-05-18 | Fuji Electric Co Ltd | Semiconductor coat-diffusion method |
Also Published As
Publication number | Publication date |
---|---|
JPS5337189B2 (en) | 1978-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51114877A (en) | Coating equipment | |
JPS5219070A (en) | Distribution method | |
JPS5216171A (en) | Mask fitting device | |
JPS525268A (en) | Rotary coating device | |
JPS5244472A (en) | Air purifier | |
JPS5210179A (en) | Current flowing timer | |
JPS5363870A (en) | Assembling method of semiconductor device | |
JPS5260950A (en) | Differential relay system | |
JPS51115372A (en) | Continuous magnetic separator | |
JPS5370405A (en) | Mode switching unit in record-reproducing apparatus | |
JPS5375760A (en) | Manufacture for semiconductor device | |
JPS527059A (en) | Air curtain device | |
JPS52107788A (en) | Semiconductor razor | |
JPS51141521A (en) | Circuit for the positioning of horizontal raster | |
JPS5286071A (en) | Metallic mask | |
JPS526879A (en) | Anti-skid control mechanism | |
JPS528450A (en) | Indicative line relay device | |
JPS523762A (en) | Separator | |
JPS5287849A (en) | Room air conditioner | |
JPS51140759A (en) | Flow meter | |
JPS52155972A (en) | Production of semiconductor device | |
JPS5365070A (en) | Wafer prober | |
JPS51151086A (en) | Semiconductor apparatus | |
JPS51126860A (en) | A flow meter | |
JPS5240730A (en) | Control rectifier device |