JPS51113460A - Laser scriber system - Google Patents
Laser scriber systemInfo
- Publication number
- JPS51113460A JPS51113460A JP3843275A JP3843275A JPS51113460A JP S51113460 A JPS51113460 A JP S51113460A JP 3843275 A JP3843275 A JP 3843275A JP 3843275 A JP3843275 A JP 3843275A JP S51113460 A JPS51113460 A JP S51113460A
- Authority
- JP
- Japan
- Prior art keywords
- laser scriber
- scriber system
- scribing
- dust
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000000428 dust Substances 0.000 abstract 1
- 239000002360 explosive Substances 0.000 abstract 1
- 239000008188 pellet Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Electromechanical Clocks (AREA)
- Laser Beam Processing (AREA)
- Dicing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3843275A JPS51113460A (en) | 1975-03-29 | 1975-03-29 | Laser scriber system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3843275A JPS51113460A (en) | 1975-03-29 | 1975-03-29 | Laser scriber system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51113460A true JPS51113460A (en) | 1976-10-06 |
JPS5532020B2 JPS5532020B2 (enrdf_load_stackoverflow) | 1980-08-22 |
Family
ID=12525137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3843275A Granted JPS51113460A (en) | 1975-03-29 | 1975-03-29 | Laser scriber system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51113460A (enrdf_load_stackoverflow) |
-
1975
- 1975-03-29 JP JP3843275A patent/JPS51113460A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5532020B2 (enrdf_load_stackoverflow) | 1980-08-22 |
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