JPS5022639A - - Google Patents

Info

Publication number
JPS5022639A
JPS5022639A JP48072263A JP7226373A JPS5022639A JP S5022639 A JPS5022639 A JP S5022639A JP 48072263 A JP48072263 A JP 48072263A JP 7226373 A JP7226373 A JP 7226373A JP S5022639 A JPS5022639 A JP S5022639A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48072263A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48072263A priority Critical patent/JPS5022639A/ja
Priority to NL7407524A priority patent/NL7407524A/xx
Priority to GB2660374A priority patent/GB1473535A/en
Priority to DE19742430653 priority patent/DE2430653C3/de
Priority to FR7422500A priority patent/FR2235401B1/fr
Publication of JPS5022639A publication Critical patent/JPS5022639A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08207—Selenium-based

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Light Receiving Elements (AREA)
JP48072263A 1973-06-28 1973-06-28 Pending JPS5022639A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP48072263A JPS5022639A (ja) 1973-06-28 1973-06-28
NL7407524A NL7407524A (ja) 1973-06-28 1974-06-04
GB2660374A GB1473535A (en) 1973-06-28 1974-06-14 Vacuum evaporation plating method and apparatus
DE19742430653 DE2430653C3 (de) 1973-06-28 1974-06-26 Verfahren und Vorrichtung zum Vakuumaufdampfen eines photoleitfähigen Materials aus mindestens zwei Elementen auf ein Substrat
FR7422500A FR2235401B1 (ja) 1973-06-28 1974-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48072263A JPS5022639A (ja) 1973-06-28 1973-06-28

Publications (1)

Publication Number Publication Date
JPS5022639A true JPS5022639A (ja) 1975-03-11

Family

ID=13484214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48072263A Pending JPS5022639A (ja) 1973-06-28 1973-06-28

Country Status (5)

Country Link
JP (1) JPS5022639A (ja)
DE (1) DE2430653C3 (ja)
FR (1) FR2235401B1 (ja)
GB (1) GB1473535A (ja)
NL (1) NL7407524A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002348658A (ja) * 2001-05-23 2002-12-04 Anelva Corp 蒸着源並びにそれを用いた薄膜形成方法及び形成装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3508484B2 (ja) * 1997-07-14 2004-03-22 松下電器産業株式会社 機能性薄膜の形成方法及び形成装置
US7431807B2 (en) 2005-01-07 2008-10-07 Universal Display Corporation Evaporation method using infrared guiding heater
DE102021006249A1 (de) 2021-12-17 2023-06-22 Singulus Technologies Aktiengesellschaft Beschichtungsquelle, Beschichtungsanlage und Verfahren zur Beschichtung von Substraten
DE102021006288A1 (de) 2021-12-21 2023-06-22 Singulus Technologies Aktiengesellschaft Beschichtungsquelle mit Nachfüllvorrichtung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002348658A (ja) * 2001-05-23 2002-12-04 Anelva Corp 蒸着源並びにそれを用いた薄膜形成方法及び形成装置
JP4593008B2 (ja) * 2001-05-23 2010-12-08 キヤノンアネルバ株式会社 蒸着源並びにそれを用いた薄膜形成方法及び形成装置

Also Published As

Publication number Publication date
GB1473535A (en) 1977-05-11
FR2235401B1 (ja) 1981-09-25
NL7407524A (ja) 1974-12-31
DE2430653A1 (de) 1975-01-23
FR2235401A1 (ja) 1975-01-24
DE2430653C3 (de) 1980-03-20
DE2430653B2 (de) 1979-07-12

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