JPS5013223B1 - - Google Patents
Info
- Publication number
- JPS5013223B1 JPS5013223B1 JP44087236A JP8723669A JPS5013223B1 JP S5013223 B1 JPS5013223 B1 JP S5013223B1 JP 44087236 A JP44087236 A JP 44087236A JP 8723669 A JP8723669 A JP 8723669A JP S5013223 B1 JPS5013223 B1 JP S5013223B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19681807414 DE1807414C3 (de) | 1968-11-07 | Verfahren zum Ätzen von Kupfer und Kupferlegierungen, insbesondere von kupferkaschierten Schichtpreßstoffen |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5013223B1 true JPS5013223B1 (US07655688-20100202-C00086.png) | 1975-05-17 |
Family
ID=5712562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP44087236A Pending JPS5013223B1 (US07655688-20100202-C00086.png) | 1968-11-07 | 1969-10-30 |
Country Status (10)
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3951711A (en) * | 1974-10-24 | 1976-04-20 | General Dynamics Corporation | System for maintaining uniform copper etching efficiency |
US3964956A (en) * | 1974-10-24 | 1976-06-22 | General Dynamics Corporation | System for maintaining uniform copper etching efficiency |
US3962005A (en) * | 1975-06-30 | 1976-06-08 | Zenith Radio Corporation | Method for etching shadow mask and regenerating etchant |
US4190481A (en) * | 1977-12-30 | 1980-02-26 | Chemcut Corporation | Apparatus for ion control of solutions |
DE3035864A1 (de) * | 1980-09-23 | 1982-05-06 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zur regenerierung salzsaurer kupferchlorid-aetzloesungen |
EP0178347B1 (de) * | 1984-10-19 | 1988-09-07 | Ibm Deutschland Gmbh | Verfahren zum automatischen Regenerieren von Kupferchlorid-Ätzlösungen |
DE3539874A1 (de) * | 1985-11-11 | 1987-05-14 | Hoellmueller Maschbau H | Anlage zum aetzen von zumindest teilweise aus metall, vorzugsweise kupfer, bestehendem aetzgut |
US5013395A (en) * | 1987-08-28 | 1991-05-07 | International Business Machines Corporation | Continuous regeneration of acid solution |
US5246023A (en) * | 1990-04-24 | 1993-09-21 | Electronic Controls Design, Inc. | Method and apparatus to clean and cleanliness test printed circuit boards |
US5227010A (en) * | 1991-04-03 | 1993-07-13 | International Business Machines Corporation | Regeneration of ferric chloride etchants |
US5259979A (en) * | 1993-01-13 | 1993-11-09 | Oliver Sales Company | Process for regeneration of cleaning compounds |
JP3074366B2 (ja) * | 1993-02-22 | 2000-08-07 | 東京エレクトロン株式会社 | 処理装置 |
TW256929B (US07655688-20100202-C00086.png) * | 1993-12-29 | 1995-09-11 | Hirama Rika Kenkyusho Kk | |
US5534078A (en) * | 1994-01-27 | 1996-07-09 | Breunsbach; Rex | Method for cleaning electronic assemblies |
JPH09199467A (ja) * | 1996-01-17 | 1997-07-31 | Mitsubishi Electric Corp | 洗浄装置及びその方法 |
JP3093975B2 (ja) * | 1996-07-02 | 2000-10-03 | 株式会社平間理化研究所 | レジスト剥離液管理装置 |
KR100652044B1 (ko) * | 2001-12-18 | 2006-11-30 | 엘지.필립스 엘시디 주식회사 | 스트립 장치 |
US6746547B2 (en) | 2002-03-05 | 2004-06-08 | Rd Chemical Company | Methods and compositions for oxide production on copper |
SE531697C2 (sv) * | 2007-07-11 | 2009-07-07 | Sigma Engineering Ab | Etsnings- och återvinningsförfarande |
WO2010030505A1 (en) * | 2008-09-10 | 2010-03-18 | Austin American Technology Corporation | Cleaning and testing ionic cleanliness of electronic assemblies |
CN109811343B (zh) * | 2019-03-19 | 2020-11-17 | 惠州市瑞翔丰科技有限公司 | 不含氨氮的环保蚀刻液及蚀刻方法 |
CN113046746B (zh) * | 2021-03-12 | 2023-03-10 | 合肥颀材科技有限公司 | 一种cof卷带精准蚀刻管控方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL100682C (US07655688-20100202-C00086.png) * | 1954-08-26 | |||
US2927871A (en) * | 1956-03-26 | 1960-03-08 | Bethlehem Steel Corp | Control of pickling baths |
US2977199A (en) * | 1956-12-31 | 1961-03-28 | Ind Rayon Corp | Method for the continuous testing of flowing materials |
US2908557A (en) * | 1957-01-07 | 1959-10-13 | Rca Corp | Method of etching copper |
US3000385A (en) * | 1957-10-30 | 1961-09-19 | Wean Engineering Co Inc | Pickling apparatus |
US3074277A (en) * | 1958-03-20 | 1963-01-22 | Inland Steel Co | Method and apparatus for automatic control of acid concentration in pickling system |
US3312189A (en) * | 1963-12-24 | 1967-04-04 | Hooker Chemical Corp | Automatic solution control system |
-
1969
- 1969-05-09 CH CH731869A patent/CH505213A/de not_active IP Right Cessation
- 1969-09-19 AT AT892569A patent/AT293812B/de not_active IP Right Cessation
- 1969-10-22 BE BE740609D patent/BE740609A/xx not_active IP Right Cessation
- 1969-10-24 ES ES372831A patent/ES372831A1/es not_active Expired
- 1969-10-28 LU LU59712D patent/LU59712A1/xx unknown
- 1969-10-30 JP JP44087236A patent/JPS5013223B1/ja active Pending
- 1969-11-03 FR FR6937729A patent/FR2022757A1/fr active Pending
- 1969-11-05 US US874100A patent/US3880685A/en not_active Expired - Lifetime
- 1969-11-06 GB GB54532/69A patent/GB1244415A/en not_active Expired
- 1969-11-07 NL NL6916811.A patent/NL167477C/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL167477B (nl) | 1981-07-16 |
NL6916811A (US07655688-20100202-C00086.png) | 1970-05-11 |
DE1807414A1 (de) | 1970-06-18 |
US3880685A (en) | 1975-04-29 |
LU59712A1 (US07655688-20100202-C00086.png) | 1970-01-12 |
BE740609A (US07655688-20100202-C00086.png) | 1970-04-01 |
DE1807414B2 (de) | 1971-03-18 |
ES372831A1 (es) | 1971-11-01 |
GB1244415A (en) | 1971-09-02 |
FR2022757A1 (US07655688-20100202-C00086.png) | 1970-08-07 |
CH505213A (de) | 1971-03-31 |
NL167477C (nl) | 1981-12-16 |
AT293812B (de) | 1971-10-25 |