JPS4993798A - - Google Patents

Info

Publication number
JPS4993798A
JPS4993798A JP48110595A JP11059573A JPS4993798A JP S4993798 A JPS4993798 A JP S4993798A JP 48110595 A JP48110595 A JP 48110595A JP 11059573 A JP11059573 A JP 11059573A JP S4993798 A JPS4993798 A JP S4993798A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48110595A
Other languages
Japanese (ja)
Other versions
JPS5241137B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4993798A publication Critical patent/JPS4993798A/ja
Publication of JPS5241137B2 publication Critical patent/JPS5241137B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
JP48110595A 1972-10-03 1973-10-03 Expired JPS5241137B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7213355A NL7213355A (enrdf_load_stackoverflow) 1972-10-03 1972-10-03

Publications (2)

Publication Number Publication Date
JPS4993798A true JPS4993798A (enrdf_load_stackoverflow) 1974-09-06
JPS5241137B2 JPS5241137B2 (enrdf_load_stackoverflow) 1977-10-17

Family

ID=19817064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48110595A Expired JPS5241137B2 (enrdf_load_stackoverflow) 1972-10-03 1973-10-03

Country Status (10)

Country Link
US (1) US3864572A (enrdf_load_stackoverflow)
JP (1) JPS5241137B2 (enrdf_load_stackoverflow)
BE (1) BE805539A (enrdf_load_stackoverflow)
CA (1) CA992670A (enrdf_load_stackoverflow)
DE (1) DE2349352C3 (enrdf_load_stackoverflow)
FR (1) FR2201540B1 (enrdf_load_stackoverflow)
GB (1) GB1440776A (enrdf_load_stackoverflow)
IT (1) IT994357B (enrdf_load_stackoverflow)
NL (1) NL7213355A (enrdf_load_stackoverflow)
SE (1) SE384759B (enrdf_load_stackoverflow)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533310U (enrdf_load_stackoverflow) * 1978-08-24 1980-03-04
JPS58126376U (ja) * 1982-02-20 1983-08-27 深沢　房次郎 扉のストツパ
US4496881A (en) 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
US4762975A (en) * 1984-02-06 1988-08-09 Phrasor Scientific, Incorporated Method and apparatus for making submicrom powders
US4829177A (en) * 1986-09-11 1989-05-09 Gregory Hirsch Point projection photoelectron microscope with hollow needle
JPH02134503A (ja) * 1988-11-15 1990-05-23 Mitsubishi Electric Corp 走査型トンネル顕微鏡
DE3839707A1 (de) * 1988-11-24 1990-05-31 Integrated Circuit Testing Verfahren zum betrieb eines elektronenstrahlmessgeraetes
JPH03190044A (ja) * 1989-12-19 1991-08-20 Ebara Corp 電子線加速器
US5015862A (en) * 1990-01-22 1991-05-14 Oregon Graduate Institute Of Science & Technology Laser modulation of LMI sources
ES2029426A6 (es) * 1991-03-22 1992-08-01 Univ Madrid Obtencion de una fuente atomica de iones metalicos produciendo una fusion superficial por medio de un campo electrico.
AU4958493A (en) * 1992-09-07 1994-03-29 Stephan Kleindiek Electromechanical positioning device
RU2145146C1 (ru) * 1998-03-31 2000-01-27 Оборин Андрей Павлович Способ преобразования энергии электронов, туннелированных через поляризованный диэлектрик
US6828996B2 (en) 2001-06-22 2004-12-07 Applied Materials, Inc. Electron beam patterning with a heated electron source
DE10245052A1 (de) 2002-09-26 2004-04-08 Leo Elektronenmikroskopie Gmbh Elektronenstrahlquelle und elektronenoptischer Apparat mit einer solchen
US6847164B2 (en) * 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
US11417492B2 (en) * 2019-09-26 2022-08-16 Kla Corporation Light modulated electron source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3388280A (en) * 1966-04-19 1968-06-11 Victor E. De Lucia Laser energized hot cathode type of electron discharge device
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
FR2201540B1 (enrdf_load_stackoverflow) 1976-11-19
DE2349352C3 (de) 1978-03-30
BE805539A (fr) 1974-04-01
DE2349352A1 (de) 1974-04-11
NL7213355A (enrdf_load_stackoverflow) 1974-04-05
FR2201540A1 (enrdf_load_stackoverflow) 1974-04-26
SE384759B (sv) 1976-05-17
CA992670A (en) 1976-07-06
IT994357B (it) 1975-10-20
US3864572A (en) 1975-02-04
DE2349352B2 (de) 1977-07-21
JPS5241137B2 (enrdf_load_stackoverflow) 1977-10-17
GB1440776A (en) 1976-06-23

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