JPS4973967A - - Google Patents

Info

Publication number
JPS4973967A
JPS4973967A JP9563973A JP9563973A JPS4973967A JP S4973967 A JPS4973967 A JP S4973967A JP 9563973 A JP9563973 A JP 9563973A JP 9563973 A JP9563973 A JP 9563973A JP S4973967 A JPS4973967 A JP S4973967A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9563973A
Other languages
Japanese (ja)
Other versions
JPS585496B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4973967A publication Critical patent/JPS4973967A/ja
Publication of JPS585496B2 publication Critical patent/JPS585496B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
JP48095639A 1972-09-29 1973-08-25 安定な熱電界放出陰極を再生可能に製造する方法 Expired JPS585496B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00293322A US3817592A (en) 1972-09-29 1972-09-29 Method for reproducibly fabricating and using stable thermal-field emission cathodes

Publications (2)

Publication Number Publication Date
JPS4973967A true JPS4973967A (es) 1974-07-17
JPS585496B2 JPS585496B2 (ja) 1983-01-31

Family

ID=23128615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48095639A Expired JPS585496B2 (ja) 1972-09-29 1973-08-25 安定な熱電界放出陰極を再生可能に製造する方法

Country Status (7)

Country Link
US (1) US3817592A (es)
JP (1) JPS585496B2 (es)
CA (1) CA1014602A (es)
DE (1) DE2345096A1 (es)
FR (1) FR2201533B1 (es)
GB (1) GB1445695A (es)
NL (1) NL7313420A (es)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019538A (ja) * 1997-03-27 1998-01-23 Hitachi Ltd 電子ビーム欠陥検査方法および装置
WO2024018570A1 (ja) * 2022-07-20 2024-01-25 株式会社日立ハイテク 荷電粒子源、荷電粒子銃、荷電粒子ビーム装置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947716A (en) * 1973-08-27 1976-03-30 The United States Of America As Represented By The Secretary Of The Army Field emission tip and process for making same
JPS5062766A (es) * 1973-10-05 1975-05-28
US3919580A (en) * 1974-09-11 1975-11-11 Us Energy Relativistic electron beam generator
US4324999A (en) * 1980-04-30 1982-04-13 Burroughs Corporation Electron-beam cathode having a uniform emission pattern
US4486684A (en) * 1981-05-26 1984-12-04 International Business Machines Corporation Single crystal lanthanum hexaboride electron beam emitter having high brightness
US4588928A (en) * 1983-06-15 1986-05-13 At&T Bell Laboratories Electron emission system
JPS60225345A (ja) * 1984-04-20 1985-11-09 Hitachi Ltd 電界放射方法およびそれに用いる電子線装置
EP0287774A3 (de) * 1987-04-24 1990-03-07 Balzers Aktiengesellschaft Thermionische Haarnadelkathode
US5012194A (en) * 1989-09-05 1991-04-30 Raytheon Company Method testing electron discharge tubes
US5459296A (en) * 1990-12-15 1995-10-17 Sidmar N.V. Method for the low-maintenance operation of an apparatus for producing a surface structure, and apparatus
FR2707795B1 (fr) * 1993-07-12 1995-08-11 Commissariat Energie Atomique Perfectionnement à un procédé de fabrication d'une source d'électrons à micropointes.
FR2750785B1 (fr) * 1996-07-02 1998-11-06 Pixtech Sa Procede de regeneration de micropointes d'un ecran plat de visualisation
US9159527B2 (en) * 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source
JP2006059513A (ja) * 2004-07-22 2006-03-02 Kuresutetsuku:Kk 電子ビーム照射装置および描画装置
US7888654B2 (en) * 2007-01-24 2011-02-15 Fei Company Cold field emitter
US8736170B1 (en) 2011-02-22 2014-05-27 Fei Company Stable cold field emission electron source
CN102629538B (zh) 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
US9697983B1 (en) * 2016-02-29 2017-07-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
US11887805B2 (en) 2021-09-30 2024-01-30 Fei Company Filament-less electron source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
US3356887A (en) * 1965-07-30 1967-12-05 Frederick C W Heil Fe cathode redesign

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF APPLIED PHYSICS=1972 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019538A (ja) * 1997-03-27 1998-01-23 Hitachi Ltd 電子ビーム欠陥検査方法および装置
WO2024018570A1 (ja) * 2022-07-20 2024-01-25 株式会社日立ハイテク 荷電粒子源、荷電粒子銃、荷電粒子ビーム装置

Also Published As

Publication number Publication date
GB1445695A (en) 1976-08-11
NL7313420A (es) 1974-04-02
US3817592A (en) 1974-06-18
JPS585496B2 (ja) 1983-01-31
FR2201533B1 (es) 1977-05-13
DE2345096A1 (de) 1974-04-04
CA1014602A (en) 1977-07-26
FR2201533A1 (es) 1974-04-26

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