JPS4953176A - - Google Patents

Info

Publication number
JPS4953176A
JPS4953176A JP48054173A JP5417373A JPS4953176A JP S4953176 A JPS4953176 A JP S4953176A JP 48054173 A JP48054173 A JP 48054173A JP 5417373 A JP5417373 A JP 5417373A JP S4953176 A JPS4953176 A JP S4953176A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48054173A
Other languages
Japanese (ja)
Other versions
JPS5147432B2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4953176A publication Critical patent/JPS4953176A/ja
Publication of JPS5147432B2 publication Critical patent/JPS5147432B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/34Edge-defined film-fed crystal-growth using dies or slits
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1004Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008Apparatus with means for measuring, testing, or sensing with responsive control means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1036Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/104Means for forming a hollow structure [e.g., tube, polygon]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP48054173A 1972-07-10 1973-05-17 Expired JPS5147432B2 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US269985A US3870477A (en) 1972-07-10 1972-07-10 Optical control of crystal growth

Publications (2)

Publication Number Publication Date
JPS4953176A true JPS4953176A (fi) 1974-05-23
JPS5147432B2 JPS5147432B2 (fi) 1976-12-15

Family

ID=23029412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48054173A Expired JPS5147432B2 (fi) 1972-07-10 1973-05-17

Country Status (11)

Country Link
US (1) US3870477A (fi)
JP (1) JPS5147432B2 (fi)
BE (1) BE799237A (fi)
BR (1) BR7303955D0 (fi)
CA (1) CA998922A (fi)
CH (1) CH575777A5 (fi)
DE (1) DE2325104C3 (fi)
FR (1) FR2191943B1 (fi)
GB (1) GB1374065A (fi)
IT (1) IT979997B (fi)
NL (1) NL7305454A (fi)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144888A (en) * 1977-05-25 1978-12-16 Agency Of Ind Science & Technol Producing apparatus for beltlike silicon crystal
JPS5488884A (en) * 1977-12-26 1979-07-14 Nippon Telegr & Teleph Corp <Ntt> Plate crystal producing equipment

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4032390A (en) * 1974-02-25 1977-06-28 Corning Glass Works Plural crystal pulling from a melt in an annular crucible heated on both inner and outer walls
US3953174A (en) * 1975-03-17 1976-04-27 Tyco Laboratories, Inc. Apparatus for growing crystalline bodies from the melt
US4116641A (en) * 1976-04-16 1978-09-26 International Business Machines Corporation Apparatus for pulling crystal ribbons from a truncated wedge shaped die
DE2632614A1 (de) * 1976-07-20 1978-01-26 Siemens Ag Vorrichtung zum ziehen eines einkristallinen koerpers aus einem schmelzfilm
JPS5453927U (fi) * 1977-09-22 1979-04-14
US4217165A (en) * 1978-04-28 1980-08-12 Ciszek Theodore F Method of growing a ribbon crystal particularly suited for facilitating automated control of ribbon width
US4242589A (en) * 1979-01-15 1980-12-30 Mobil Tyco Solar Energy Corporation Apparatus for monitoring crystal growth
US4318769A (en) * 1979-01-15 1982-03-09 Mobil Tyco Solar Energy Corporation Method of monitoring crystal growth
US4334948A (en) * 1981-02-23 1982-06-15 Rca Corporation Method of and apparatus for growing crystal ribbon
US4440728A (en) * 1981-08-03 1984-04-03 Mobil Solar Energy Corporation Apparatus for growing tubular crystalline bodies
SU1592414A1 (ru) * 1986-11-26 1990-09-15 Vni Pk T I Elektrotermicheskog Cпocoб bыpaщиbahия пpoфилиpobahhыx kpиctaллob tугoплabkиx coeдиhehий и уctpoйctbo для eгo ocущectbлehия
EP0516014B1 (en) * 1991-05-30 1996-02-07 Chichibu Cement Co., Ltd. Rutile single crystals and their growth processes
US5458083A (en) * 1992-05-29 1995-10-17 Chichibu Cement Co., Ltd. Growth method for a rod form of single oxide crystal
US5360599A (en) * 1993-06-21 1994-11-01 General Electric Company Crucible support heater for the control of melt flow pattern in a crystal growth process
DE102006041736A1 (de) * 2006-09-04 2008-03-20 Schott Solar Gmbh Verfahren und Anordnung zur Herstellung eines Rohres
CN101519797B (zh) * 2009-01-20 2012-05-02 洛阳金诺机械工程有限公司 晶体碎料拉制硅芯的方法及实施该方法的一种装置
CN104088011B (zh) * 2014-07-15 2017-01-18 牛玥 一种蓝宝石微毛细管的制备方法及其使用的模具
CN113280906B (zh) * 2021-06-18 2022-05-10 太原理工大学 基于计算机视觉的泡生法籽晶最佳接种时机振动感知方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3591348A (en) * 1968-01-24 1971-07-06 Tyco Laboratories Inc Method of growing crystalline materials

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL238924A (fi) * 1959-05-05
US3428436A (en) * 1963-12-16 1969-02-18 Monsanto Co Methods and apparatus for zone melting
US3291650A (en) * 1963-12-23 1966-12-13 Gen Motors Corp Control of crystal size
US3291574A (en) * 1963-12-23 1966-12-13 Gen Motors Corp Semiconductor crystal growth from a domical projection
NL6512921A (fi) * 1965-10-06 1967-04-07
US3650703A (en) * 1967-09-08 1972-03-21 Tyco Laboratories Inc Method and apparatus for growing inorganic filaments, ribbon from the melt
US3621213A (en) * 1969-11-26 1971-11-16 Ibm Programmed digital-computer-controlled system for automatic growth of semiconductor crystals
US3692499A (en) * 1970-08-31 1972-09-19 Texas Instruments Inc Crystal pulling system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3591348A (en) * 1968-01-24 1971-07-06 Tyco Laboratories Inc Method of growing crystalline materials

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144888A (en) * 1977-05-25 1978-12-16 Agency Of Ind Science & Technol Producing apparatus for beltlike silicon crystal
JPS609000B2 (ja) * 1977-05-25 1985-03-07 工業技術院長 帯状シリコン結晶の成長装置
JPS5488884A (en) * 1977-12-26 1979-07-14 Nippon Telegr & Teleph Corp <Ntt> Plate crystal producing equipment

Also Published As

Publication number Publication date
DE2325104C3 (de) 1980-10-09
FR2191943A1 (fi) 1974-02-08
GB1374065A (en) 1974-11-13
JPS5147432B2 (fi) 1976-12-15
BR7303955D0 (pt) 1974-02-12
FR2191943B1 (fi) 1978-06-30
US3870477A (en) 1975-03-11
BE799237A (fr) 1973-11-08
IT979997B (it) 1974-09-30
NL7305454A (fi) 1974-01-14
CA998922A (en) 1976-10-26
DE2325104B2 (de) 1980-02-21
DE2325104A1 (de) 1974-01-24
CH575777A5 (fi) 1976-05-31

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