JPS4833903B1 - - Google Patents

Info

Publication number
JPS4833903B1
JPS4833903B1 JP44027401A JP2740169A JPS4833903B1 JP S4833903 B1 JPS4833903 B1 JP S4833903B1 JP 44027401 A JP44027401 A JP 44027401A JP 2740169 A JP2740169 A JP 2740169A JP S4833903 B1 JPS4833903 B1 JP S4833903B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP44027401A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP44027401A priority Critical patent/JPS4833903B1/ja
Priority to DE2016753A priority patent/DE2016753C3/de
Priority to US00199702A priority patent/US3737659A/en
Publication of JPS4833903B1 publication Critical patent/JPS4833903B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP44027401A 1969-04-08 1969-04-08 Pending JPS4833903B1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP44027401A JPS4833903B1 (ja) 1969-04-08 1969-04-08
DE2016753A DE2016753C3 (de) 1969-04-08 1970-04-08 Vorrichtung zur Justierung des Objektfeldes in Elektronenmikroskopen
US00199702A US3737659A (en) 1969-04-08 1971-11-17 Field of view adjusting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44027401A JPS4833903B1 (ja) 1969-04-08 1969-04-08

Publications (1)

Publication Number Publication Date
JPS4833903B1 true JPS4833903B1 (ja) 1973-10-17

Family

ID=12220028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP44027401A Pending JPS4833903B1 (ja) 1969-04-08 1969-04-08

Country Status (3)

Country Link
US (1) US3737659A (ja)
JP (1) JPS4833903B1 (ja)
DE (1) DE2016753C3 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
JPS5576560A (en) * 1978-12-01 1980-06-09 Hitachi Ltd Observation field moving device for electron microscope
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
DE3008404C2 (de) * 1980-03-05 1984-07-19 Helmut 8046 Garching Formanek Verfahren und Einrichtung zum Erzeugen von Elektronenstrahl-Beugungsbildern
JP2673900B2 (ja) * 1988-12-05 1997-11-05 株式会社日立製作所 電子顕微鏡
JP3859396B2 (ja) * 1999-07-19 2006-12-20 日本電子株式会社 走査型荷電粒子ビーム装置における試料像観察方法及び走査型荷電粒子ビーム装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE426347A (ja) * 1937-02-18
DE1019393B (de) * 1941-09-13 1957-11-14 Dr Heinrich Herbst Elektronenmikroskop
DE1019397B (de) * 1943-12-04 1957-11-14 Dr Heinrich Herbst Elektronen- oder Ionenmikroskop
NL67115C (ja) * 1946-01-12
US2617041A (en) * 1949-11-15 1952-11-04 Farrand Optical Co Inc Stereoscopic electron microscope
GB832500A (en) * 1955-12-12 1960-04-13 Ass Elect Ind Improvements relating to electron optical apparatus
DE1203401B (de) * 1962-02-17 1965-10-21 United Aircraft Corp Einrichtung zur Justierung eines Ladungstraegerstrahles und Verfahren zur Justierung eines Ladungstraegerstrahles
US3171955A (en) * 1962-03-30 1965-03-02 Rca Corp Temperature controlled and adjustable specimen stage for scientific instruments
US3445650A (en) * 1965-10-11 1969-05-20 Applied Res Lab Double focussing mass spectrometer including a wedge-shaped magnetic sector field

Also Published As

Publication number Publication date
DE2016753A1 (de) 1970-10-15
DE2016753B2 (de) 1973-08-02
DE2016753C3 (de) 1981-05-07
US3737659A (en) 1973-06-05

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