JPS4813877B1 - - Google Patents
Info
- Publication number
- JPS4813877B1 JPS4813877B1 JP45031290A JP3129070A JPS4813877B1 JP S4813877 B1 JPS4813877 B1 JP S4813877B1 JP 45031290 A JP45031290 A JP 45031290A JP 3129070 A JP3129070 A JP 3129070A JP S4813877 B1 JPS4813877 B1 JP S4813877B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
- H10W20/021—Manufacture or treatment of interconnections within wafers or substrates
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US82159269A | 1969-05-05 | 1969-05-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4813877B1 true JPS4813877B1 (https=) | 1973-05-01 |
Family
ID=25233779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45031290A Pending JPS4813877B1 (https=) | 1969-05-05 | 1970-04-14 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3577036A (https=) |
| JP (1) | JPS4813877B1 (https=) |
| DE (1) | DE2021809A1 (https=) |
| FR (1) | FR2046204A5 (https=) |
| GB (1) | GB1252097A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3774079A (en) * | 1971-06-25 | 1973-11-20 | Ibm | Monolithically fabricated tranistor circuit with multilayer conductive patterns |
| US4109275A (en) * | 1976-12-22 | 1978-08-22 | International Business Machines Corporation | Interconnection of integrated circuit metallization |
| JPH08130246A (ja) * | 1994-10-28 | 1996-05-21 | Ricoh Co Ltd | 半導体装置とその製造方法 |
| DE19824400C2 (de) * | 1998-05-30 | 2000-05-18 | Bosch Gmbh Robert | Leiterbahn-Kontaktierungsanordnung |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3303071A (en) * | 1964-10-27 | 1967-02-07 | Bell Telephone Labor Inc | Fabrication of a semiconductive device with closely spaced electrodes |
| US3419765A (en) * | 1965-10-01 | 1968-12-31 | Texas Instruments Inc | Ohmic contact to semiconductor devices |
-
1969
- 1969-05-05 US US821592A patent/US3577036A/en not_active Expired - Lifetime
-
1970
- 1970-04-14 JP JP45031290A patent/JPS4813877B1/ja active Pending
- 1970-04-16 FR FR7013694A patent/FR2046204A5/fr not_active Expired
- 1970-04-24 GB GB1252097D patent/GB1252097A/en not_active Expired
- 1970-05-04 DE DE19702021809 patent/DE2021809A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| GB1252097A (https=) | 1971-11-03 |
| DE2021809B2 (https=) | 1980-02-28 |
| DE2021809A1 (de) | 1970-11-19 |
| FR2046204A5 (https=) | 1971-03-05 |
| US3577036A (en) | 1971-05-04 |