FR2046204A5 - - Google Patents

Info

Publication number
FR2046204A5
FR2046204A5 FR7013694A FR7013694A FR2046204A5 FR 2046204 A5 FR2046204 A5 FR 2046204A5 FR 7013694 A FR7013694 A FR 7013694A FR 7013694 A FR7013694 A FR 7013694A FR 2046204 A5 FR2046204 A5 FR 2046204A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7013694A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2046204A5 publication Critical patent/FR2046204A5/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/20Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • H10W20/021Manufacture or treatment of interconnections within wafers or substrates
FR7013694A 1969-05-05 1970-04-16 Expired FR2046204A5 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82159269A 1969-05-05 1969-05-05

Publications (1)

Publication Number Publication Date
FR2046204A5 true FR2046204A5 (https=) 1971-03-05

Family

ID=25233779

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7013694A Expired FR2046204A5 (https=) 1969-05-05 1970-04-16

Country Status (5)

Country Link
US (1) US3577036A (https=)
JP (1) JPS4813877B1 (https=)
DE (1) DE2021809A1 (https=)
FR (1) FR2046204A5 (https=)
GB (1) GB1252097A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3774079A (en) * 1971-06-25 1973-11-20 Ibm Monolithically fabricated tranistor circuit with multilayer conductive patterns
US4109275A (en) * 1976-12-22 1978-08-22 International Business Machines Corporation Interconnection of integrated circuit metallization
JPH08130246A (ja) * 1994-10-28 1996-05-21 Ricoh Co Ltd 半導体装置とその製造方法
DE19824400C2 (de) * 1998-05-30 2000-05-18 Bosch Gmbh Robert Leiterbahn-Kontaktierungsanordnung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3303071A (en) * 1964-10-27 1967-02-07 Bell Telephone Labor Inc Fabrication of a semiconductive device with closely spaced electrodes
US3419765A (en) * 1965-10-01 1968-12-31 Texas Instruments Inc Ohmic contact to semiconductor devices

Also Published As

Publication number Publication date
JPS4813877B1 (https=) 1973-05-01
GB1252097A (https=) 1971-11-03
DE2021809B2 (https=) 1980-02-28
DE2021809A1 (de) 1970-11-19
US3577036A (en) 1971-05-04

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Legal Events

Date Code Title Description
ST Notification of lapse