JPH1187901A - Apparatus and method for arraying metal spheres - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent arraying fault of metal spheres by temporarily arraying the spheres on a temporary array plate, having holding holes of a predetermined size at positions corresponding to metal sphere suction holes of a metal sphere array jig in advance, and sucking the spheres to the suction holes. SOLUTION: Metal spheres supplied from a metal sphere container 6 and rolled down on an oblique plate 20 are dropped in metal sphere holding holes 3 of a temporary array plate 2 on the way. Then, the spheres 1 each having a normal diameter larger than a lower limit of a standard are held in the holes 3. The spheres each has a smaller diameter than the lower limit of the standard or outside the standard are passed through a part having a sectional shape of an innermost side 8 of each of the holes 3 and dropped at a lower side of the plate 2. Hence only the spheres 1, each having the normal diameter, are held in the holes 3. The residual spheres 1 not held in the holes 3 are slidably dropped on the plate 20, contained in a metal sphere container 6' prepared downward, and returned to an upper metal sphere container 6 via a part feeder. Thus, the spheres out of the standard in smaller diameter dropped under the plate 2 are recovered as material which are outside the standard.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for arranging metal spheres on a metal ball arrangement object, and more particularly to an electrode on a semiconductor chip, an electrode on a semiconductor mounting substrate or a semiconductor element electrode as a ball bump. The present invention relates to a method and an apparatus for arranging fine metal spheres.

[0002]

2. Description of the Related Art As means for arranging and fixing metal balls collectively on an object, a metal ball arrangement jig having metal ball suction holes arranged at positions corresponding to positions where the metal balls are arranged on the object is used. 2. Description of the Related Art There is known a technique of preparing a metal sphere, adsorbing the metal sphere to a metal sphere suction hole, and simultaneously transferring the metal sphere to an object. In particular, bumps that serve as bonding media between electrodes of the semiconductor chip and external circuits,
Alternatively, as a bump of a ball grid array (BGA), a technique of transferring a fine metal to a semiconductor substrate, a semiconductor chip, or the like to form a bump has become important. A metal ball array jig having a metal ball suction hole at a position corresponding to an electrode of a semiconductor chip or the like is prepared, and a fine metal ball on which a bump is to be formed is previously sucked into the suction hole, and the metal ball array jig is transferred. The metal sphere is transferred to a transfer table and transferred to a metal sphere joining position of an electrode such as a semiconductor chip on a transfer table.

In the above-mentioned known technique, a large number of fine metal spheres having a uniform size are prepared in a container, and the surface of the metal ball arrangement jig where the metal sphere suction holes are opened is placed in the container. , The pressure of the back surface of the metal sphere suction hole is reduced, and air is sucked to adsorb fine metal spheres in the metal sphere suction hole. Vibration is given to the metal sphere container at the time of suction to cause the metal sphere to jump within the container, so that the suction can be performed more easily.

[0004] The fine metal sphere supplied into the metal sphere container is
Although very small, metal spheres whose diameters are out of the upper and lower limits of the standard may be mixed. A metal sphere having a large diameter outside the upper limit of the specification can be easily removed at the stage of manufacturing the metal sphere, but a small metal sphere having a diameter outside the lower limit of the specification may not be sufficiently removed. In the conventional metal ball arrangement device, there was no function to eliminate defective balls whose diameter was below the lower limit of the specification.If defective balls were mixed, metal balls with insufficient diameter were mounted on products such as ball grid arrays. Will be done. Further, when the metal ball is a solder ball, a means for temporarily mounting the solder ball on the mounting target electrode by the adhesive force of the flux is used, but with a solder ball having a small diameter, the flux is not applied to the solder ball. This leads to defects such as solder balls not reaching the electrodes. When the metal ball is a gold ball, a means for pressing the gold ball to the electrode by thermocompression bonding is used. However, a gold ball having a small diameter is not sufficiently pressurized, resulting in a failure to be pressed.

Further, a large amount of metal spheres are supplied to the metal sphere container, and if necessary, vibration is applied to the container in order to make the metal spheres jump inside the container. Therefore, dust is unavoidably mixed into the container from the surroundings. Since dust is mixed with a large amount of metal balls in the metal ball container, it is impossible to remove the dust.
If this dust is sucked into the metal ball suction holes of the metal ball array jig instead of the metal balls, the metal ball array will fail.

[0006]

DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned problems, and removes metal balls having small diameters which fall outside the lower limit of the standard and mixed dust before adsorbing the metal balls on the metal ball array jig. The purpose is to prevent misalignment of the sphere.

[0007]

According to the present invention, first, a metal sphere is adsorbed to the metal sphere adsorbing hole of a metal sphere array jig having a metal sphere adsorbing hole, and the group of adsorbed metal spheres is then metallized. In the metal ball arranging method in which the metal spheres are transferred to the ball arranging target and the metal spheres are collectively mounted on the metal sphere arranging object, the holding holes for holding the metal spheres at positions corresponding to the metal sphere suction holes of the metal sphere arranging jig in advance. The cross-sectional shape of the opening is a shape through which a metal sphere with a maximum diameter can pass, and a metal sphere with a cross-section on the back side with a diameter larger than the metal sphere with a minimum diameter cannot pass and a metal sphere with a smaller diameter The metal balls are temporarily arranged in the holding holes of the temporary arrangement plate having the holding holes having a shape that can pass therethrough, and then the metal balls temporarily arranged in the temporary arrangement plate are adsorbed to the metal ball adsorption holes of the metal ball arrangement jig. This is a method of arranging metal spheres. In temporarily arranging the metal balls on the temporary array plate, the metal balls can be sucked by reducing the pressure on the side opposite to the opening of the metal ball holding hole of the temporary array plate. Further, when the metal balls are temporarily arranged on the temporary arrangement plate, vibration can be applied to the temporary arrangement plate. When temporarily arranging the metal balls on the temporary arrangement plate, an air current can be blown onto the surface of the temporary arrangement plate.

In the second aspect of the present invention, a metal sphere is attracted to the metal sphere attracting hole of the metal ball arranging jig in which the metal ball attracting hole is arranged, and then the attracted metal sphere group is transferred to a metal ball arranging object. A metal ball arraying device for mounting metal balls on the metal ball arraying object at a time, wherein the metal ball arraying jig has a holding hole for holding the metal ball at a position corresponding to the metal ball suction hole. The cross-sectional shape of the part is a shape that allows the metal sphere with the maximum diameter to pass through, and the cross-sectional shape on the back side cannot pass through the metal sphere with a diameter larger than the metal sphere with the minimum diameter, and can pass through the metal sphere with a small diameter A temporary arrangement plate having a holding hole having a shape, a metal ball arrangement jig in which a metal ball suction hole for sucking metal balls temporarily arranged in the holding hole of the temporary arrangement plate is provided, and a metal of the metal ball arrangement jig is provided. Metal sphere array for transferring metal spheres adsorbed to sphere adsorption holes to the metal sphere array target A metal ball array device having a printing station for placing an elephant. Further, the cross-sectional shape on the back side of the holding hole of the temporary array plate can be rectangular. Further, the holding hole of the temporary array plate may be tapered such that the cross section becomes narrower from the opening side toward the back side. The holding hole of the temporary array plate is
It is possible to have a suction means for depressurizing the holding hole from behind and sucking the metal ball. Further, it is possible to have a vibrating means for vibrating a temporary arrangement plate in which metal balls are provisionally arranged. Further, it is possible to have a means for blowing an air current onto the surface of the temporary arrangement plate on which the metal balls are temporarily arranged.

According to the present invention, before the metal spheres are sucked into the metal sphere suction holes of the metal sphere arrangement jig, the metal spheres are temporarily arranged in the holding holes of the temporary arrangement plate. Small metal spheres and fine dust fall through the holding hole and fall to the opposite side of the opening. Therefore, it is possible to prevent the small diameter metal spheres and minute dust from being adsorbed by the metal sphere arrangement jig and being transferred to the metal sphere arrangement target.

Further, in the present invention, the cross-sectional shape of the metal ball holding hole of the temporary arrangement plate on the back side is made rectangular, so that the clogging of the metal ball into the holding hole is reduced as compared with the case where the cross-sectional shape is circular. Can be prevented. This is because the metal sphere passes more easily when the cross-sectional shape is rectangular. By reducing the pressure of the holding holes when the metal balls are temporarily arranged on the temporary arrangement plate, the small diameter balls and dust can be more easily passed.

Further, in the present invention, when the metal balls are temporarily arranged on the temporary arrangement plate, vibration is applied to the temporary arrangement plate so that one metal ball is securely held in each holding hole,
In addition, by blowing the airflow onto the surface of the temporary array plate, when the metal holes are held in the holding holes, the metal balls can be removed.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS.

The type and size of the metal ball 1 are not limited, but may be a gold ball as a bump serving as a bonding medium between an electrode of a semiconductor chip and an external circuit, or a solder ball as a ball bump of a ball grid array. This is particularly effective for fine metal spheres having a diameter of 40 μm to 800 μm.

In FIG. 1, metal ball holding holes 3 are arranged on the temporary arrangement plate 2 at positions corresponding to positions where metal balls of the metal ball arrangement target 5 are to be arranged, and the holding holes 3 pass through the temporary arrangement plate. ing. The cross-sectional shape of the holding hole 3 on the opening side 7 allows a metal ball having a diameter larger than the upper limit diameter (maximum diameter) of the metal ball 1 to pass therethrough, and the cross-sectional shape on the back side 8 has the lower limit of the metal ball specification. The metal sphere having a diameter larger than the diameter (minimum diameter) has a cross-sectional shape that cannot pass and a metal sphere having a smaller diameter can pass. The holding hole 3 can be a hole having a two-stage cross-sectional shape. In this case, the depth of the portion of the holding hole 3 having the cross-sectional shape on the opening side 7 is such that the metal sphere 1 is formed in this portion. A depth suitable for holding is selected, but usually, about half the diameter of the metal sphere 1 is appropriate.

The temporary array plate 2 and the inclined plate 20 form a smooth inclined surface. The angle of inclination is preferably 2 ° to 15 °. A metal sphere container 6 containing the metal spheres 1 is arranged at the upper end of the inclined plate, and the metal spheres 1 are sequentially supplied to the inclined plate 20 by a metal sphere supply unit (not shown). The use of a parts feeder is optimal as the metal ball supply means.

The metal spheres supplied from the metal sphere container 6 and rolling down the inclined plate 20 fall into the metal sphere holding holes 3 of the temporary arrangement plate 2 on the way, and the metal spheres 1 having a regular diameter larger than the lower limit of the specification. Are held in the holding holes 3. The small-diameter non-standard metal sphere having a diameter smaller than the standard lower limit passes through the portion having the cross-sectional shape of the back side 8 of the holding hole 3 and falls down to the lower side of the temporary array plate 2. Holds only the metal ball 1 having a regular diameter. The remaining metal spheres 1 not held in the holding holes 3 are inclined plates 2
0 is slid down and stored in a metal ball container 6 'prepared below. The metal sphere 1 accommodated in the metal sphere container 6 'can be sent back to the upper metal sphere container 6 by a parts feeder (not shown). Further, the small-diameter out-of-spec metal balls that have fallen below the temporary array plate 2 through the holding holes 3 are collected as out-of-spec products.

The metal balls 1 are inserted into all the holding holes 3 of the temporary arrangement plate 2.
After the elapse of a time sufficient to maintain the pressure, the supply of the metal balls 1 is stopped. In the example of supplying the solder balls, about 4 seconds is a suitable supply time. After the supply is stopped, the temporary arrangement plate is rotated to keep the surface horizontal. Next, as shown in FIG. 2A, the metal sphere suction jig 4 is moved, and the metal sphere suction hole 11 of the metal sphere suction jig 4 is arranged so that the corresponding metal sphere 1 can be sucked. Next, in order to adsorb the metal spheres, suction 12 for depressurizing the adsorption holes is performed. Usually a metal ball array head 1
0 is connected to a vacuum pump (not shown). Next, suction 1
2 is performed, the temporary arrangement plate 2 and the metal ball arrangement jig 4 are separated (FIG. 2 (b)). Further, as shown in FIG. Then, the metal sphere 1 is transferred to the metal sphere arrangement target 5. When the metal sphere is a solder ball, a flux is printed in advance at a position where the metal sphere of the metal sphere arrangement target 5 is transferred, and the metal sphere arrangement jig 4 is lowered to the arrangement target 5 and lightly pressed. Next, when the vacuum system of the metal ball arrangement jig 4 is released and the array jig 4 is raised, the metal ball 1 is held by the metal ball arrangement object 5 by the adhesive force of the flux.

As shown in FIG. 3, the provisional arrangement plate 2 may be provided with a provisional arrangement plate head 13 behind it, and the holding hole 3 may be depressurized by suctioning the back when holding the metal ball 1. As a result, the holding of the metal sphere 1 is ensured, and it is easy for small-diameter products and dust to pass through the holding holes 3, and it is possible to reliably remove small-diameter products and dust.

Further, a temporary arrangement plate 2 having a suction mechanism similar to that of FIG. 3 is used, and as shown in FIG.
Can be held in the holding hole 3. In this method, as shown in FIG. 4A, the metal sphere 1 is held in the container 6, and vibration is applied by a vibration generator 15 connected to the container 6 so that the metal sphere 1 jumps in the container 6. Next, the metal ball 1 can be adsorbed to the holding hole 3 by lowering the opening of the temporary array plate 2 into the container 6 with the opening downward, and performing suction 14. In this case, too, small-diameter products and dust are sucked into the temporary array plate head 13 through the holding holes 3. Next, the temporary arrangement plate 2 is inverted, and the metal ball arrangement jig 4 is brought into contact as shown in FIG. At the same time as the suction 12 of the metal ball array jig 4 is started, the suction of the temporary array plate 2 is stopped, and the metal ball 1 is moved to the metal ball array jig 4.
Then, the metal spheres are arranged in the same steps as in FIG.

When the suction mechanism is installed behind the temporary arrangement plate as shown in FIGS. 3 and 4, when the metal balls 1 are moved from the temporary arrangement plate 2 to the metal ball arrangement jig 4, The inside of the head 13 can be pressurized. If the diameter of the metal ball is within the acceptable range but is just outside the small diameter standard, the metal ball 1 may bite into the back side 8 of the holding hole 3, but is pressed into the holding hole 3 by pressing the inside of the head 13. The metal sphere 1 can be opened. The cross-sectional shape of the holding hole 3 of the temporary array plate 2 is shown in FIGS. In each of the figures, only four holding holes are illustrated, but the actual number of holding holes is not limited to four. Taking the example of the ball bump arrangement of the semiconductor substrate, several hundred holding holes are provided on the temporary arrangement plate like a grid.

The cross-sectional shape of the opening side 7 of the holding hole 3 may be any shape as long as a sphere having the upper limit diameter of the metal sphere can pass through. Usually, a circular or rectangular shape is adopted. For the back side 8 of the holding hole, a circular shape as shown in FIG. 6 can be adopted, but it is preferable to make the cross-sectional shape rectangular as shown in FIG. is there. The metal ball just outside the specification passes through the holding hole 3 while being in contact with the wall surface on the back side 8 of the holding hole 3, but the cross-sectional shape of the back side 8 of the holding hole 3 is circular as shown in FIG. 6. This is because the rectangular area as shown in FIG. 5 requires less contact area between the metal ball and the wall surface of the holding hole.

The cross section of the holding hole 3 may be tapered as shown in FIG. In this case, the holding hole 3
The cross-sectional shape of the opening 7 has a shape through which a metal ball having a diameter of the upper limit of the specification can pass, and the cross-sectional shape of the back side 8 cannot pass through a metal ball having a diameter larger than the diameter of the lower limit of the specification, and has a small diameter. The metal sphere has a shape that can pass. Although the cross-sectional shape can be rectangular or circular, a rectangular shape having a small contact area between the metal sphere and the wall surface of the holding hole is preferable for smoothly releasing the held metal sphere 1.

In either case of employing the method shown in FIG. 1 or the method shown in FIG. 4A, as shown in FIG. 8A, an excess metal ball 1a adheres to the holding hole 3 in addition to the regular metal ball 1. May be. If the surplus metal sphere 1a remains adhered, the surplus metal sphere 1a eventually adheres to the metal sphere arrangement jig 4 and the extra metal sphere 1a is transferred to the metal sphere arrangement object 5, which is inconvenient. As shown in FIG. 8B, when the vibration generator 16 is brought into contact with the temporary arrangement plate 2 and vibration is applied to the temporary arrangement plate 2 at a timing at which the metal balls 1 are held by the temporary arrangement plate 2, the surplus metal balls 1a Can be eliminated, which is preferable.

As shown in FIG. 8 (c), a means 17 for blowing airflow onto the surface of the temporary arrangement plate 2 is arranged, and the airflow can be blown onto the surface of the temporary arrangement plate 2 at the timing when the metal balls 1 are held. In this case, it is possible to eliminate the surplus metal sphere 1a. As the gas to be blown, dry air, nitrogen gas and the like are suitable.

[0025]

[Example] Solder balls (metal balls) having a diameter of 300 μm
The present invention was applied to an apparatus in which 00 pieces are collectively mounted on an arrangement target. The outline of the apparatus is as shown in FIG. 1 and FIG. 2, and the temporary array plate employs a reduced pressure suction mechanism as shown in FIG.

The shape of the holding hole 3 of the temporary arrangement plate 2 is shown in FIG.
Glass with a 311 μmφ circular hole in a 200 μm thick photosensitive etching glass and 500 μm
It was manufactured by bonding a 289 μm square glass with a rectangular hole to a photosensitive etching glass having a thickness of m. The temporary arrangement plate 2 is arranged together with the inclined plate 20 at an inclination of 5 °, and solder balls are supplied from the metal ball container 6 by a parts feeder. During the supply of the solder balls, a vacuum pump is connected to the temporary arrangement plate head 13 behind the temporary arrangement plate 2 to reduce the pressure, thereby helping to hold the solder balls in the holding holes 3. A metal ball container 6 'is installed downstream of the inclined table 20 to collect excess balls. In addition, a solder ball out of a small diameter standard and minute dust pass through the holding hole 3 and are provided in a filter (not shown) installed in the temporary array plate head 13.
Captured by

The supply of the solder balls is continued for 4 seconds, and then the supply is stopped. During the supply of the solder balls and for a while after the supply is stopped, a nitrogen gas nozzle is disposed as a means 17 for blowing the gas shown in FIG. 8C from obliquely above the temporary arrangement plate 2, and nitrogen gas is blown toward the temporary arrangement plate 2. As a result, excess solder balls held in the holding holes 3 can be removed. Further, the provisional arrangement plate 2 may be provided with a vibration generator 16 shown in FIG. After the above is completed, the temporary arrangement plate 2 is rotated horizontally.

Next, as shown in FIG. 2A, the metal ball suction jig 4 is moved, and the metal ball suction jig 4 is disposed so that the corresponding solder ball 1 can be suctioned by the metal ball suction hole 11. I do. Next, in order to adsorb the solder balls, the decompression of the holding holes 3 of the temporary arrangement plate 2 is released, and at the same time, the suction 12 for depressurizing the adsorption holes 11 of the metal ball adsorption jig 4 is performed. A vacuum pump (not shown) is connected to the metal ball array head 10.
Next, while the suction 12 is being performed, the temporary arrangement plate 2 and the metal sphere arrangement jig 4 are separated (FIG. 2B), and the metal sphere arrangement jig 4 is further moved as shown in FIG. Then, the solder ball 1 is moved to the position corresponding to No. 5 and the solder ball 1 is transferred to the metal ball arrangement target 5. A flux is printed in advance at a position where the solder ball of the metal ball arrangement target 5 is transferred, and the metal ball arrangement jig 4 is lowered to the arrangement target 5 and lightly pressed. Next, metal ball array jig 4
When the arrangement jig 4 is lifted by releasing the vacuum system, the solder ball 1 is held by the metal ball arrangement object 5 by the adhesive force of the flux.

As a result of successively performing the above-described arrangement processing 500 times, there was no dirt on the arrangement jig and no adhesion of dust to the metal ball suction holes. In addition, all solder balls out of the small diameter standard passed through the holding holes of the temporary arrangement plate and were removed. The solder ball mounting success rate in the unit of metal ball arrangement was 499 times / 500 times.

Regarding the method of manufacturing the holding holes 3 of the temporary array plate 2, those manufactured by the following methods in addition to the above-mentioned methods were used, but good results were obtained in each case. (1) On a 500 μm-thick photosensitive etching glass,
A rectangular hole having a tapered shape as shown in FIG. 1 and having an opening side of 311 μm square and a back side of 288 μm square was opened. (2) A tapered rectangular hole as shown in FIG. 7 having a thickness of 311 μm in a ceramic plate having a thickness of 600 μm.
A hole having a corner and a back side of 288 μm square was opened. (3) A circular through-hole of 289 μmφ is formed in a ceramic plate having a thickness of 500 μm, and 311 μmφ is formed at the same hole position.
Was drilled to a depth of 180 μm.

[0031]

By using the apparatus and method for arranging metal spheres of the present invention, metal spheres having a diameter smaller than the lower limit and mixed dust are eliminated before the metal spheres are adsorbed on the metal sphere arrangement jig. Failure to arrange the metal balls can be prevented.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a state where metal balls are temporarily arranged on a temporary arrangement plate of the present invention.

FIG. 2 is a cross-sectional view showing a state in which metal balls temporarily arranged on a temporary arrangement plate are sucked by a metal ball arrangement jig and transferred to a metal ball arrangement object, and FIG. The situation where the metal ball arrangement jig is in contact with the arrangement plate, (b) is the situation where the metal spheres are attracted to the metal sphere arrangement jig, and (c) is the metal spheres which have been attracted to the metal sphere arrangement jig. It is a figure showing the situation where it is pressing and transferring.

FIG. 3 is a cross-sectional view showing one embodiment of a temporary arrangement plate of the present invention.

4A and 4B are cross-sectional views showing another embodiment of the temporary arrangement plate of the present invention, wherein FIG. 4A is a cross-sectional view showing a state where metal balls are adsorbed to the temporary arrangement plate, and FIG. FIG. 4 is a cross-sectional view showing a state in which is adsorbed on a metal ball array jig.

FIG. 5 is a view showing an embodiment of a temporary arrangement plate of the present invention,
(A) is a front view, (b) is a sectional view.

FIG. 6 is a view showing an embodiment of a temporary arrangement plate of the present invention,
(A) is a front view, (b) is a sectional view.

FIG. 7 is a view showing an embodiment of a temporary arrangement plate of the present invention;
(A) is a front view, (b) is a sectional view.

FIG. 8 is a diagram showing the status of the temporary sequence of the present invention, wherein (a)
Is a cross-sectional view showing a state where surplus metal spheres are adhered at the time of provisional arrangement, (b) is a cross-sectional view showing a state where surplus metal spheres are removed by vibration from a vibration generator, and (c) is a cross-sectional view showing excess air blasting It is sectional drawing which shows the situation which removes a metal ball.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Metal ball 2 Temporary arrangement plate 3 Holding hole 4 Metal ball arrangement jig 5 Metal ball arrangement object 6 Metal ball container 7 Opening side of metal ball holding hole 8 Back side of metal ball holding hole 9 Metal ball arrangement substrate 10 Metal ball Arrangement head 11 Metal ball suction hole 12 Suction for depressurizing metal ball suction hole 13 Temporary array plate head 14 Suction for depressurizing metal ball holding hole 15 Vibration generator 16 Vibration generator 17 Means for blowing airflow 18 Gas Infeed 19 Blowed airflow 20 Inclined plate

Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI // H01L 21/60 H01L 21/92 604H 604Z

Claims (10)

[Claims] 1. A metal sphere is attracted to a metal sphere attracting hole of a metal ball arranging jig having a metal ball attracting hole, and the attracted metal spheres are transferred to a metal ball arranging object to transfer the metal sphere to metal. In the metal ball arranging method, which is collectively mounted on the ball arranging object, the holding hole for holding the metal sphere at a position corresponding to the metal sphere suction hole of the metal sphere arrangement jig in advance, and the cross-sectional shape of the opening is the maximum diameter. The holding hole has a shape that allows the metal sphere to pass through, and the cross-sectional shape on the back side has a shape in which a metal sphere having a diameter larger than the metal sphere having the minimum diameter cannot pass and a metal sphere having a small diameter can pass. A method of arranging metal spheres, comprising: temporarily arranging metal balls in the holding holes of an array plate, and then adsorbing the metal balls temporarily arranged in the temporary array plate to the metal ball suction holes of the metal ball array jig. 2. When temporarily arranging metal balls on a temporary arrangement plate,
2. The metal ball arrangement method according to claim 1, wherein the metal ball is sucked by reducing the pressure on the side opposite to the opening of the metal ball holding hole of the temporary arrangement plate. 3. When temporarily arranging metal balls on a temporary arrangement plate,
The method according to claim 1 or 2, wherein vibration is applied to the temporary arrangement plate. 4. When provisionally arranging metal balls on a temporary arrangement plate,
4. The method according to claim 1, wherein an air current is blown onto the surface of the temporary arrangement plate. 5. A metal ball adsorbing hole of a metal ball adsorbing jig in which metal ball adsorbing holes are arranged, a metal ball is adsorbed to the metal ball adsorbing hole, and then the attracted metal ball group is transferred to a metal ball arraying object to transfer the metal ball to a metal ball. A metal ball arrangement device for mounting on a ball arrangement target collectively,
A holding hole for holding the metal sphere at a position corresponding to the metal sphere suction hole of the metal sphere array jig, wherein the cross-sectional shape of the opening is a shape through which a metal sphere having a maximum diameter can pass; A temporary arrangement plate having a holding hole whose shape is such that a metal sphere having a diameter larger than the metal sphere having a minimum diameter cannot pass therethrough and a metal sphere having a smaller diameter can pass therethrough; and a provisional arrangement in the holding holes of the temporary arrangement plate. A metal ball arraying jig having a metal ball attracting hole for sucking the metal ball attracted thereto, and a metal ball arraying jig for transferring the metal ball adsorbed to the metal ball attracting hole of the metal ball arraying jig to the metal ball arraying object. A metal ball arrangement device comprising: a transfer table on which an object is placed. 6. The metal ball arranging device according to claim 5, wherein the cross-sectional shape of the holding hole of the temporary arranging plate at the back side is rectangular. 7. The metal ball arranging device according to claim 5, wherein the holding holes of the temporary arranging plate have a tapered shape in which a cross section becomes narrower from the opening side to the inner side. 8. The metal ball arrangement device according to claim 5, wherein the holding holes of the temporary arrangement plate have suction means for reducing the pressure of the holding holes from behind and sucking the metal balls. 9. A vibrating means for vibrating a temporary arrangement plate on which metal balls are temporarily arranged is provided.
The metal ball arrangement device as described in the above. 10. The metal ball arrangement device according to claim 5, further comprising means for blowing an air current onto a surface of a temporary arrangement plate on which the metal balls are temporarily arranged.