JPH1164735A - Microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and rapidly change the modulation state of a luminous flux of illuminating light and a luminous flux of observation light or a projection pattern by constituting a modulating means of a liquid crystal element. SOLUTION: The microscope is provided with the illuminating means for guiding the illuminating light flux 1 onto the optical axis of the microscope so as to illuminate the surface of an object 3, a 1st modulating means 5 for modulating the cross sectional shape of the flux 1, and a 2nd modulating means 9 for modulating the cross sectional shape of the observation light flux 7 for the microscope. And the rugged state of the surface of the object 3 is detected based on the modulation states of the illuminating light flux 1 and the observation light flux 5 and the brightness/darkness of the observed image 11. Besides, the 1st and 2nd modulating means 5 and 9 are constituted of the liquid crystal elements. In the case of detecting the rugged part of the object 3 and the shape of the object 3, the modulation states of the 1st and 2nd modulating means 5 and 9 are instantaneously and easily changed by driving the liquid crystal elements constituting the 1st and 2nd modulating means 5 and 9 by a driving means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope for observing an object by appropriately modulating a cross-sectional intensity distribution of an illumination light beam or an observation light beam.

[0002]

2. Description of the Related Art Conventionally, as a microscope provided with a modulation means for modulating a cross-sectional intensity distribution of an illumination light beam or an observation light beam,
For example, an illuminating means for introducing an illuminating light beam onto the optical axis of the microscope to illuminate the surface of the test object, a first modulating means for modulating the cross-sectional shape of the illuminating light beam, and a modulating the cross-sectional shape of the observation light beam in the microscope There is known a microscope which includes a second modulating means for detecting the unevenness of the surface of a test object based on the modulation state of the illumination light beam and the observation light beam and the brightness of an observed image.

[0003] Further, there is provided projection means for forming a predetermined pattern on the focal plane of the microscope and projecting the pattern, and positioning the test object at the focal position by observing the pattern projected on the test object. Microscopes that can do this are known.

Further, there are provided illumination means for introducing the illumination light beam onto the optical axis of the microscope to illuminate the surface of the test object, and modulation means for modulating the cross-sectional shape of the illumination light beam and the cross-sectional shape of the observation light beam in the microscope. By restricting the illumination position and the observation light beam on the object to one point by the modulation means, one point on the object is observed, and the observation is performed on a plurality of points on the object. A confocal microscope capable of obtaining an image on an object is known (US Pat. No. 3,013,467).

[0005]

However, in these conventional microscopes, the modulating means or the projecting means is a mask having a pattern for modulating an illumination light beam or an observation light beam or a projection pattern on a test object fixedly. Since the mask or the test object is moved or rotated by mechanical means to modulate the illumination light beam or change the projection pattern, it is useful for changing or removing the modulation mode or the projection pattern. There is a problem that it takes time and is inconvenient in operation.

SUMMARY OF THE INVENTION An object of the present invention is to provide a microscope capable of easily and quickly changing a modulation mode of an illumination light beam or an observation light beam, or a projection pattern in view of the problems of the prior art.

[0007]

According to the present invention, there is provided a microscope provided with a modulation means for modulating a sectional intensity distribution of an illumination light beam or an observation light beam, wherein the modulation means is constituted by a liquid crystal element. And

Here, the liquid crystal element forms a predetermined pattern by indicating a light transmitting state, a light blocking state, or a halftone state thereof on a pixel-by-pixel basis, and the pattern is used to illuminate the liquid crystal element. The cross-sectional intensity distribution of the light beam or the observation light beam is modulated, and the modulated light beam is sent out.
The modulated illumination light beam or observation light beam is used for observation in various modes by a microscope as described later. At this time, the modulation mode of the light beam is instantaneously and easily changed by driving the liquid crystal element, and switching to the normal, ie, non-modulated, observation state by making the liquid crystal element entirely transparent is also possible. Instant and easy.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In a first preferred embodiment of the present invention, an illuminating means for illuminating a test object by introducing an illuminating light beam onto an optical axis of a microscope, and modulating a cross-sectional intensity distribution of the illuminating light beam. And a second modulating means for modulating the cross-sectional intensity distribution of the observation light beam in the microscope, and a test object based on the modulation state of the illumination light beam and the observation light beam and the brightness of the observed image. In the microscope for detecting the surface unevenness state or the internal refractive index fluctuation state,
The first and second modulating means are constituted by liquid crystal elements.

The illuminating means has a half mirror for reflecting the illuminating light beam in the direction of the test object between the objective lens and the imaging lens of the microscope and introducing the illuminating light beam onto the optical axis of the microscope.
The first modulating means modulates the illumination light beam before being introduced onto the optical axis of the microscope, and the second modulating means modulates the observation light beam between the half mirror and the imaging lens. Is what you do.

In the second embodiment, there is provided projection means for forming a predetermined pattern on the focal plane of the microscope and projecting the pattern, and observing the pattern projected on the test object by observing the pattern. In a microscope capable of positioning an inspection object at a focal position, the pattern is constituted by a liquid crystal element.

In this case, a more specific example further includes illumination means for illuminating the surface of the test object by introducing an illumination light beam onto the optical axis of the microscope, and the illumination means is connected to an objective lens of the microscope. A half mirror for reflecting the illumination light beam toward the test object between the image lens and introducing the illumination light beam onto the optical axis of the microscope; The image of the pattern is formed on a surface.

In the confocal microscope according to the third embodiment, an illuminating means for introducing an illuminating light beam onto the optical axis of the microscope to illuminate an object, and modulating a cross-sectional shape of the illuminating light beam. A first modulating means; and a second modulating means for modulating a cross-sectional shape of an observation light beam in a microscope, wherein the first and second modulating means are constituted by a liquid crystal element. Set the illumination position on the test object to 1
Observing one or more points on the test object by restricting the observation light beam to one or more points by the second modulating means in accordance with the restriction to points or a plurality of points that do not affect each other. An image on the test object is obtained by performing this observation on a large number of points on the test object.

In this case, as a more specific example, the illuminating means reflects the illuminating light beam toward the test object between the objective lens and the imaging lens of the microscope and introduces the illuminating light beam onto the optical axis of the microscope. A half mirror, wherein the first modulating means modulates the illumination light beam before being introduced onto the optical axis of the microscope, and wherein the second modulating means is provided between the half mirror and the imaging lens. Is used to modulate the observation light beam.

Alternatively, the illuminating means introduces the illuminating light beam onto the optical axis of a microscope at a position opposite to the object as viewed from the second modulating means. May also serve as the first modulation means.

Further, in any of the embodiments, there is provided driving means for driving the liquid crystal element and thereby appropriately changing a pattern formed by the liquid crystal element. By driving the liquid crystal element by this driving means, the modulation mode and projection pattern of the illumination light beam can be easily and quickly changed. Hereinafter, embodiments of the present invention will be further described through examples.

[0017]

FIG. 1 is a view schematically showing a microscope according to a first embodiment of the present invention. As shown in the figure, this microscope introduces an illumination light beam 1 onto the optical axis of the microscope and
Illuminating means for illuminating the surface, first modulating means 5 for modulating the cross-sectional shape of the illuminating light beam 1, and observation light beam 7 in the microscope
And a second modulating means 9 for modulating the cross-sectional shape of the object 3, and detects an uneven state of the surface of the test object 3 based on the modulation state of the illumination light beam 1 and the observation light beam 5 and the brightness of the observed image 11. The first and second modulation means 5 and 9 are constituted by liquid crystal elements.

The illuminating means is a half mirror 17 for reflecting the illumination light beam 1 in the direction of the test object 3 between the objective lens 13 and the eyepiece 15 of the microscope and introducing the same onto the optical axis of the microscope.
The first modulation means 5 modulates the illumination light beam 1 before being introduced onto the optical axis of the microscope, and the second modulation means 9
Is for modulating the observation light beam 7 between the half mirror 17 and the eyepiece 15.

The first modulating means 5 and the second modulating means 9
Here, as shown in FIG. 2, the cross-sectional shapes of the illumination light beam 1 and the observation light beam 7 are respectively set to 4 (a) to (d).
Can be modulated to type.

In this configuration, for example, as shown in FIG. 1, the first modulating means 5 is set so as to transmit only the upper half of the illuminating light beam 1, and the second modulating means 9 is set to the right of the observation light beam 7. It is assumed that only half is set to be transmitted. Then, only the upper half of the illumination light beam 1 is reflected by the half mirror 17 and introduced into the microscope. The introduced illumination light beam passes through the right side of the optical axis of the microscope and is condensed on the surface of the test object 3 by the objective lens 13 and is reflected. If the surface of the test object 3 is flat as shown in FIG. 1, the reflected light passes through substantially the left side of the optical axis of the microscope, and
The light is substantially blocked by the modulating means 9 and the image 11 therefore exhibits a constant brightness. However, as shown in FIG. 3, when a convex portion 19 exists on the surface of the test object 3,
When the illumination light beam illuminates the right side of the convex portion 19, the reflected light passes more to the right than the optical axis of the microscope, and the image 11 becomes bright. When the illumination light beam illuminates the left side of the convex portion 19, most of the reflected light is completely blocked by the second modulating means 9, and the image 11 becomes dark. That is, when the test object 3 is moved rightward (in the direction of the arrow 21), when the visual field of the microscope passes through the convex portion 19, the image 11 changes in brightness as shown in FIG. Thereby, the existence of the convex portion 19 can be recognized.

According to the same principle, as shown in FIG. 3, when the optical axis of the microscope is near the apex of the convex portion 19, the modulation modes of the first modulation means 5 and the second modulation means 9 are changed. The shape of the convex portion 19 can be read by making various changes and combinations according to the modulation mode shown in FIG. In the same manner, the test object 3
The presence of a concave portion on the surface can be detected and its shape can be read.

In detecting such irregularities and shapes, the liquid crystal elements constituting the first and second modulating means 5 and 9 are driven by the driving means to thereby obtain the first modulating means.
And the modulation mode of the second modulation means 5, 7 can be changed instantaneously and easily.

FIG. 5 is a diagram schematically showing a microscope according to a second embodiment of the present invention. This microscope has a projection unit that forms and projects a predetermined pattern on the focal plane of the microscope, and observes the image of the pattern projected on the test object 3 as shown in FIG. Thus, the test object 3 can be positioned at the focal position. The pattern is constituted by the liquid crystal element 23. Reference numeral 25 in FIG. 5 denotes an imaging unit that captures an image observed by a microscope.

This microscope also has illumination means for introducing the illumination light beam 1 onto the optical axis of the microscope to illuminate the surface of the test object 3. This illumination means comprises an auxiliary condenser lens 27 and an objective of the microscope. A half mirror 17 is provided between the lens 13 and the imaging lens 15 to reflect the illumination light beam 1 from the auxiliary condenser lens 27 in the direction of the test object 3 and to introduce the same on the optical axis of the microscope. It modulates the cross-sectional shape of the illumination light flux 1 and forms an image of the pattern formed by the liquid crystal element 23 on the focal plane of the microscope via the auxiliary condenser lens 27. That is, this pattern is illuminated by the illumination light for illuminating the test object 3 and is projected on the surface of the test object 3 via a part of the illumination unit.

In this configuration, in order to align the surface of the test object 3 with the focal plane of the microscope, a predetermined pattern is formed by driving the liquid crystal device 23 by the driving means of the liquid crystal device 23 and this pattern is formed. Project on a surface. Then, the projected pattern image is observed by the imaging means 25 via the microscope, and the vertical position of the surface of the test object 3 is adjusted so that the contrast of the pattern image is maximized. When the surface of the test object 3 is inclined with respect to the optical axis of the microscope, the vertical position of the test object 3 is adjusted so that the contrast is maximized at a desired position in the visual field of the microscope. Thereby, the subject 3 can be positioned so that the surface of the subject 3 crosses the focal plane of the microscope at the desired position.

After the position of the test object 3 in the vertical direction has been adjusted in this manner, the liquid crystal element 23 is made to be in the entire transmission state, and the pattern formation by the liquid crystal element 23 is released.
The observation of the surface or the inside of the test object 3 can be performed without being obstructed by the pattern image.

It is necessary to appropriately select a pattern to be projected from a grid-like pattern or a random pattern as needed.
Can be easily performed by the driving means.

FIG. 6 is a diagram schematically showing a microscope according to a third embodiment of the present invention. As shown in FIG. 1, the microscope includes an illumination unit that introduces an illumination light beam 1 onto the optical axis of the microscope to illuminate the surface of the test object 3, and a first modulation unit that modulates a cross-sectional shape of the illumination light beam 1. 29, and a second modulating means 31 for modulating the cross-sectional shape of the observation light beam 7 in the microscope. The first modulating means 29 restricts the illumination position on the test object 3 to a plurality of points and corresponds to this. A plurality of points on the test object 3 are observed by restricting the observation light beam 7 to a plurality of points by the second modulating means 31, and the observation is performed on a large number of points on the test object 3 so that the observation light beam 7 on the test object 3 is observed. It is a confocal microscope that can obtain an image. The first and second modulation means 29 and 31 are constituted by liquid crystal elements. The second modulating means 31 is arranged at an image forming position of the microscope. The plurality of points observed at the same time are selected so as to have a sufficient distance from each other so that the effects of halation do not affect each other.

The illuminating means illuminates the illumination light beam 1 from the auxiliary condenser lens 27 and the auxiliary condenser lens 27 between the objective lens 13 and the eyepiece 15 of the microscope with the object 3.
A first mirror 29 for modulating the illumination light beam 1 before being introduced onto the optical axis of the microscope, and a second modulating means 29; 31 modulates the observation light flux 7 between the half mirror 17 and the eyepiece 15. 33 is a magnifying lens for enlarging an observation image limited to a plurality of points by a second modulation means,
Reference numeral 25 denotes an imaging unit that captures an observation image enlarged by the magnifying lens 33.

In this configuration, the illumination light beam 1 modulated by the first modulating means 29 so as to pass through only a plurality of points A passes through the lens 27, the half mirror 17, and the objective lens 13 and is on the test object 3. A plurality of points are illuminated, and an image of each point is formed on the plurality of points B on the second modulating means 31 by the objective lens 13 and the eyepiece 15. At this time, the modulating means 31 modulates the observation light beam 7 so that the observation light beam 7 passes only at each point B.
The image at each point is magnified via the magnifying lens 33 and is imaged by the image sensor 25. Thus, the test object 3
Although an image of a plurality of points above is obtained, by performing this for each point of the entire predetermined observation region on the test object 3, an image of the observation region without halation at a high magnification can be obtained. At this time, the passing points A and B of the illumination light beam and the observation light beam determined by the first and second modulating means 29 and 31 are sequentially changed so as to correspond to each other. This can be easily and quickly performed by the driving means of the liquid crystal element.

Further, by setting each liquid crystal element as a whole in a transmissive state, it is possible to instantaneously and easily switch to use in an observation state in a normal mode. Note that such observation of the test object 3 can be performed not only on the surface of the test object 3 but also inside the test object 3.

It is also possible to introduce illumination light from the same position as that of a conventional confocal microscope. In this case, the illumination light beam 1 is covered by the second modulation means 31 as shown in FIG. It is introduced on the optical axis of the microscope at a position opposite to the specimen 3. In this case, the second modulating means 31
The modulation of the illumination light beam 1 and the observation light beam 7 is performed using only the light beam. That is, the second modulation unit 31 also functions as the first modulation unit 29.

[0033]

As described above, according to the present invention, since the various modulation elements used in the microscope are constituted by liquid crystal elements, the modulation mode of the modulation elements can be changed easily and quickly. Further, switching to use in a normal observation mode in which the illumination light beam or the observation light beam is not modulated can be performed quickly and easily.

Further, in a confocal microscope,
When the modulation of the illumination light beam and the modulation of the observation light beam are performed by separate first and second modulation means, both the first modulation means and the second modulation means are constituted by liquid crystal elements.
A number of observation points on the test object can be observed while easily making the illumination position restricted by the first modulation means correspond to the observation light beam restricted by the second modulation means. That is, the modulation of the illumination light beam and the modulation of the observation light beam can be easily and separately performed, so that the degree of freedom of the introduction position of the illumination light beam is improved.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a microscope according to a first embodiment of the present invention.

FIG. 2 is a diagram showing four types of cross-sectional shapes of an illumination light beam and an observation light beam modulated in the microscope of FIG.

FIG. 3 is a diagram showing how a convex portion is detected by the microscope of FIG. 1;

FIG. 4 is a diagram showing a change in brightness of an image when a convex portion is detected by the microscope of FIG. 1;

FIG. 5 is a diagram schematically showing a microscope according to a second embodiment of the present invention.

FIG. 6 is a diagram schematically showing a microscope according to a third embodiment of the present invention.

FIG. 7 is a diagram schematically showing a modified example of the microscope shown in FIG. 6 in which an introduction position of an illumination light beam is changed.

[Explanation of symbols]

1: illumination light flux, 3: subject, 5: modulation means, 7: observation light flux, 9: second modulation means, 11: image, 13: objective lens, 15: eyepiece, 17: half mirror, 19: Convex portion, 23: liquid crystal element, 25: imaging means, 27: auxiliary condensing lens, 29: first modulation means, 31: second modulation means, 33: magnifying lens.

Claims (9)

[Claims] 1. A microscope provided with a modulation means for modulating a cross-sectional intensity distribution of an illumination light beam or an observation light beam, wherein the modulation means is constituted by a liquid crystal element. 2. Illumination means for introducing an illumination light beam onto an optical axis of a microscope to illuminate an object, first modulation means for modulating a cross-sectional intensity distribution of the illumination light beam, and a cross section of an observation light beam in the microscope. Second modulation means for modulating the intensity distribution,
In a microscope for detecting an uneven state on the surface of a test object or a refractive index change state inside based on the modulation state of the illumination light beam and the observation light beam and the contrast of an observed image, the first and second modulations are performed. A microscope characterized in that the means is constituted by a liquid crystal element. 3. The illuminating means includes a half mirror for reflecting the illuminating light beam between the objective lens and the imaging lens of the microscope in the direction of the test object and introducing the illuminating light beam onto the optical axis of the microscope. The first modulating means modulates the illumination light beam before being introduced onto the optical axis of the microscope, and the second modulating means modulates the observation light beam between the half mirror and the imaging lens. The microscope according to claim 2, wherein 4. A projection means for forming a predetermined pattern on a focal plane of a microscope and projecting the pattern, and positioning the test object at a focal position by observing the pattern projected on the test object. A microscope according to claim 1, wherein said pattern is constituted by a liquid crystal element. 5. An illumination device for illuminating a surface of a test object by introducing an illumination light beam onto an optical axis of a microscope, wherein the illumination device includes:
A half mirror that reflects the illumination light beam toward the object between the objective lens and the imaging lens of the microscope and introduces the illumination light beam onto the optical axis of the microscope, wherein the projection unit adjusts a cross-sectional intensity distribution of the illumination light beam. The microscope according to claim 4, wherein the microscope is configured to modulate the light so as to form an image of the pattern on the focal plane. 6. An illumination means for introducing an illumination light beam onto the optical axis of a microscope to illuminate an object, a first modulation means for modulating a cross-sectional shape of the illumination light beam, and a cross-sectional shape of an observation light beam in the microscope. And second modulation means for modulating
And the second modulating means is constituted by a liquid crystal element. The first modulating means limits the illumination position on the test object to one point or a plurality of points, and observes the light by the second modulating means in accordance with the position. Observe one or more points on the test object by restricting the light flux to one or more points, and obtain an image on the test object by performing this observation on multiple points on the test object A confocal microscope. 7. The illuminating means includes a half mirror for reflecting the illuminating light beam between the objective lens and the imaging lens of the microscope in the direction of the test object and introducing the illuminating light beam onto the optical axis of the microscope. The first modulating means modulates the illumination light beam before being introduced onto the optical axis of the microscope, and the second modulating means modulates the observation light beam between the half mirror and the imaging lens. The microscope according to claim 6, wherein 8. The illuminating means for introducing the illuminating light beam onto the optical axis of a microscope at a position opposite to the object when viewed from the second modulating means, wherein the second modulating means The microscope according to claim 6, wherein the microscope also functions as the first modulation unit. 9. The microscope according to claim 1, further comprising a driving unit that drives the liquid crystal element and thereby appropriately changes a pattern formed by the liquid crystal element.