JP3642599B2 - Lighting device for observation / imaging device - Google Patents

Lighting device for observation / imaging device Download PDF

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Publication number
JP3642599B2
JP3642599B2 JP03941495A JP3941495A JP3642599B2 JP 3642599 B2 JP3642599 B2 JP 3642599B2 JP 03941495 A JP03941495 A JP 03941495A JP 3941495 A JP3941495 A JP 3941495A JP 3642599 B2 JP3642599 B2 JP 3642599B2
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optical path
illumination
light
peripheral side
outer peripheral
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JPH08211328A (en
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一 村上
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Scalar Corp
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Scalar Corp
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Priority to JP03941495A priority Critical patent/JP3642599B2/en
Priority to DE69525007T priority patent/DE69525007T2/en
Priority to US08/536,276 priority patent/US5580162A/en
Priority to EP95306947A priority patent/EP0704695B1/en
Priority to KR1019950033949A priority patent/KR960011384A/en
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Description

【０００１】
【産業上の利用分野】
本発明は、任意の各種被験体試料（以下、単に被験体試料という）の表面像を観察、もしくは撮像するために適用する観察・撮像装置の照明装置に関し、さらに詳しくは、観察対象としての被験体試料の被観察部表面の照明を、必要に応じて、側斜光照明、落斜光照明の何れか一方に任意に選択して行ない得るようにした観察・撮像装置の照明装置に係るものである。
【０００２】
【従来の技術】
従来から、この種の観察対象としての被験体試料における被観察部の表面に対面させた状態で、例えば、それぞれに投光照明手段を内蔵する照明ヘッド、もしくは撮像ヘッドを臨ませて配置し、当該被観察部を照明することによって、その表面像、ないしは拡大された表面像を直接的に観察する観察装置、もしくはモニタテレビの画面上に表示させて間接的に観察する撮像装置にあっては、該被験体試料の被観察部表面に対して、これに斜行する側面側から斜め方向に向う斜行光線のみを照射する照明、いわゆる側射光を主体とする照明を行うようにするか、あるいは該被観察部表面に対して、これに正対する平面側から垂直方向に向う平行光線のみを照射する照明、いわゆる落射光を主体とする照明を行なうようにしているのが一般的である。
【０００３】
【発明が解決しようとする課題】
しかしながら、上記従来の側射光を主体とする照明手法、もしくは落射光を主体とする照明手法においては、例えば、観察対象となる被験体試料の平面部が比較的微細な凹凸のある形状である場合には、これらの各照明手法を個別に実行しても、該表面部の微細な凹凸形状を必ずしも精緻には観察できないという不利があり、また、これらの各照明手法を同時に実行する方法も考えられるが、装置自体の構成が徒らに複雑化するという問題点があった。
【０００４】
本発明は、従来のこのような問題点を解消するためになされたもので、その目的とするところは、観察対象としての被験体試料における被観察部表面が、たとえ、比較的微細な凹凸を有する平面形状であっても、該被観察部表面の個々の観察目的に対応して、全外周囲上の側斜光を主体とする照明、または同軸上の落射光に近似した落斜光を主体とする照明による各照明の何れか一方を任意に選択して対応する各照明像の観察を簡略化された同一構成内で有効かつ適切に行ない得るようにした、同一視野で各照明像を観察しうる観察・撮像装置の照明装置を提供することである。
【０００５】
【課題を解決するための手段】
前記目的を達成するために、本発明に係る観察・撮像装置の照明装置は、次のように構成したものである
【０００６】
即ち、本発明は、筒状胴部の外周面一側部に照明光を導光する照明光導入部を配した本体鏡筒を有し、前記筒状胴部内には、中心光軸上で前記照明光導入部に対して所定角度で対面させると共に、下面側の周囲部分に環状ミラー部、中心部分にハーフミラー部を形成したハーフミラー部材を配設させ、また、前記ハーフミラー部材の下部側には、中心光軸上で前記ハーフミラー部に対応させた対物レンズを含む観察光学系を配設し、且つ前記環状ミラー部に対向させる上面導光側に外周側光路と内周側光路とを切換える光路切換えダンパーを有すると共に、下方に延長される外周側光路には、中心光軸上で観察対象としての被験体試料の被観察部表面に対面させる対物開口部を開口し、且つ内周側光路の下方開口部を被験体試料に向け開口して構成し、必要に応じ、前記光路切換えダンパーを内周側に切換えて、前記外周側光路に導入される照明光を前記対物開口部の内周面から側斜光として被験体試料に照射可能にし、且つ外周側に切換えて、前記内周側光路に導入される照明光を前記下方開口部の開口面から落斜光として被験体試料に照射可能にしたことを特徴とする観察・撮像装置の照明装置である。
【０００７】
【作用】
本発明においては、光路切換えダンパーを内周側、または外周側に任意選択的に切換えることで、照明光導入部に導光される照明光を該当する側斜光、または落斜光として被験体試料の被観察部表面を照明し得るのである。
【０００８】
【実施例】
以下、本発明に係る観察・撮像装置の照明装置の一実施例につき、図１及び図２を参照して詳細に説明する。
【０００９】
本実施例は、撮像装置に対して本照明装置を使用する場合であり、観察装置の照明装置としても適用可能なことは勿論である。
【００１０】
最初に、図１に示す本実施例の撮像装置における照明装置の概要構成について述べる。
【００１１】
図１は、本発明の一実施例による照明装置を適用した撮像装置の概要構成を模式的に示す縦断面図であり、本図１においては、被験体試料に対して側斜光による照明を行なう場合を示している。
【００１２】
即ち、図１に示す実施例装置の構成において、撮像装置の本体鏡筒１１は、外周面一側部の所定位置に光ファイバー束１３ａを通して入射光軸Ｂ上の照明光を導光する照明光導入部１３を配した筒状胴部１２を有しており、該照明光導入部１３には、入射光軸Ｂ上の全周囲に対応する部分においてのみ光透過部としての環状をした照明光束の集束レンズ１４を設けることで、導入される照明光を環状の平行光束にして筒状胴部１２の内部側に導光し得るようにし、且つその他の中心部分を非光透過部１５として照明光を遮断する。
【００１３】
また、前記筒状胴部１２内には、中心光軸Ａ上で、前記照明光導入部１３に対して４５°の角度で対面させると共に、下面側の外側周囲部分に対して別に蒸着処理することで、前記集束レンズ１４を通して環状に導光される照明光束を下方に全反射する環状ミラー部１７を形成し、且つ中心部分にハーフミラー部１８を形成したハーフミラー部材１６を設けてある。
【００１４】
さらに、前記ハーフミラー部材１６の下部側には、中心光軸Ａ上で、該ハーフミラー部材１６のハーフミラー部１８に対応させた対物レンズを含む観察光学系１９を設けてあり、且つ環状ミラー部１７に対向させる上面導光側に外周側光路２１と内周側光路２２とを切換える光路切換えダンパー２３を有すると共に、下方に延長される外周側光路２１に対しては、中心光軸Ａ上で観察対象としての被験体試料Ｃの被観察部表面に対面させる対物開口部２４を開口し、且つ内周側光路２２に対しては、その下方開口部２５を被験体試料Ｃに向けて開口した集光ガイド部材２０を設けてある。
【００１５】
一方、前記ハーフミラー部材１６の上部側には、同様に中心光軸Ａ上で、フォーカス操作リング２７によってフォーカス作動されるフォーカス機構（公知態様のものであってよいので、詳細については省略する）２６を介し、可変倍率機構（ここでも、公知態様のものであってよいので、詳細については省略する）２９を有するＣＣＤ素子２８を配設してある。
【００１６】
次に、上記実施例構成による照明装置を用い、各別の照明形態で被験体試料Ｃを観察する場合の作用について順次に述べる。ここで、これらの各照明形態により、本体鏡筒１１の対物開口部２４を対面させる被験体試料Ｃに対して、予め、フォーカス操作リング２７によるフォーカス機構２６のフォーカス作動Ｄと可変倍率機構２９の変倍作動Ｅとがそれぞれになされているものとし、ここでは、該各照明形態によって被験体試料Ｃを照明したときの撮像光ｂが、適正にＣＣＤ素子２８へ入射するように設定されているものとする。
【００１７】
先ず、同上実施例による撮像装置を側斜光主体の照明形態（以下、第１の照明形態という）で使用する場合の照明光と撮像光との光路態様は、図１に示す通りである。
【００１８】
本第１の照明形態では、同図１に見られるように、光路切換えダンパー２３を内周側へ選択的に切換えることにより、集光ガイド部材２０の外周側光路２１を活用する。ここで、該光路切換えダンパー２３の内周側への切換えは、外周側光路２１内を通した側斜光による被験体試料Ｃの照明に対応する。
【００１９】
即ち、本第１の照明形態による場合、照明光導入部１３に導光される照明光ａは、先ず、集束レンズ１４によって環状の平行光束にされると共に、ハーフミラー部材１６の環状ミラー部１７で全反射されて集光ガイド部材２０の上面導光側に導かれ、内周側光路２１内に導入される。ついで、該内周側光路２１内では、光路切換えダンパー２３の切換え外面を含んで自身の各内面で反射を繰り返した後に、対物開口部２４の開口された全内周面側から全周囲に亘る落斜光ａ1 として被験体試料Ｃの被観察部に照射されるもので、この場合には、該被験体試料Ｃの被観察部に対して、全周囲方向からの側斜光ａ1 を用いた照明が独立的になされる。
【００２０】
その後、被験体試料Ｃの被観察部で反射された撮像光ｂ1 は、対物開口部２４から観察光学系１９を通して導光され、ハーフミラー部材１６のハーフミラー部１８を経た上で、ＣＣＤ素子２８に入射されると共に、該ＣＣＤ素子２８により該撮像光ｂ1 が電気信号に変換され、且つこれを図示しないモニタテレビの画面上に表示させることにより、所期通りの側斜光ａ1 による被観察部の照明像（観察像）、つまりは、第１の照明形態で照明された照明像を容易にしかも効果的に観察し得るのである。
【００２１】
続いて、同上実施例による撮像装置を落斜光主体の照明形態（以下、第２の照明形態という）で使用する場合の照明光と撮像光との光路態様は、図２に示す通りである。
【００２２】
本第１の照明形態では、同図２に見られるように、光路切換えダンパー２３を外周側へ選択的に切換えることにより、集光ガイド部材２０の内周側光路２２を活用する。ここで、該光路切換えダンパー２３の外周側への切換えは、内周側光路２１内を通した落斜光による被験体試料Ｃの照明に対応する。
【００２３】
即ち、本第２の照明形態による場合にも、照明光導入部１３に導光される照明光ａは、先ず、集束レンズ１４によって環状の平行光束にされ、且つハーフミラー部材１６の環状ミラー部１７で全反射されて集光ガイド部材２０の上面導光側に導かれ、ここでは、内周側光路２２内に導入される。ついで、該内周側光路２２内では、光路切換えダンパー２３の切換え内面を含んで自身の各内面で反射を繰り返した後に、下方開口部２５の開口された全下面側から全周囲に亘る落斜光ａ2 として被験体試料Ｃの被観察部に照射されるもので、この場合には、該被験体試料Ｃの被観察部に対して、全周囲方向からの落斜光ａ2 を用いた照明が独立的になされる。
【００２４】
その後、被験体試料Ｃの被観察部で反射された撮像光ｂ2 は、対物開口部２４から観察光学系２０を通して導光され、ハーフミラー部材１６のハーフミラー部１８を経た上で、ＣＣＤ素子２８に入射されると共に、該ＣＣＤ素子２８により該撮像光ｂ2 が電気信号に変換され、且つこれを図示しないモニタテレビの画面上に表示させることにより、所期通りの落斜光ａ2 による被観察部の照明像（観察像）、つまりは、第２の照明形態で照明された照明像を容易にしかも効果的に観察し得るのである。
【００２５】
【発明の効果】
以上、実施例、及び各使用形態例によって詳述したように、本発明によれば、筒状胴部の外周面一側部に照明光を導光する照明光導入部を配した本体鏡筒を有し、筒状胴部内には、中心光軸上で前記照明光導入部に対して所定角度で対面させると共に、下面側の周囲部分に環状ミラー部、中心部分にハーフミラー部を形成したハーフミラー部材を配設させ、また、ハーフミラー部材の下部側には、中心光軸上でハーフミラー部に対応させた対物レンズを含む観察光学系を配設し、且つ環状ミラー部に対向させる上面導光側に外周側光路と内周側光路とを切換える光路切換えダンパーを有すると共に、下方に延長される外周側光路に、中心光軸上で観察対象としての被験体試料の被観察部表面に対面させる対物開口部を開口し、且つ内周側光路の下方開口部を被験体試料に向け開口して構成したので、観察目的に対応して、光路切換えダンパーを内周側、または外周側に選択的に切換えるだけの簡単な操作により、照明光導入部に導光される照明光を該当する側斜光、または落斜光の何れかに変換して被験体試料の被観察部表面をそれぞれの目的に相応して効果的に照明でき、しかも装置構成自体も極めて簡単で容易に実施し得る等の優れた特長がある。
【図面の簡単な説明】
【図１】本発明の一実施例による照明装置を適用した側斜光照明の場合の撮像装置の概要構成を模式的に示す縦断面図である。
【図２】同上実施例の照明装置における落斜光照明の場合の撮像装置の概要構成を模式的に示す縦断面図である。
【符号の説明】
１１ 本体鏡筒
１２ 筒状胴部
１３ 照明光導入部
１３ａ 光ファイバー束
１４ 環状集光レンズ
１５ 非光透過部
１６ ハーフミラー部材
１７ 環状ミラー部
１８ ハーフミラー部
１９ 撮像光学系
２０ 集光ガイド部材
２１ 外周側光路
２２ 内周側光路
２３ 光路切換えダンパー
２４ 対物開口部
２５ 下方開口部
２６ フォーカス機構
２７ フォーカス操作リング
２８ ＣＣＤ素子
２９ 可変倍率機構
Ａ 中心光軸
Ｂ 入射光軸
Ｃ 被験体試料
ａ 照明光
ａ1 側斜光
ａ2 落斜光
ｂ1 、ｂ2 撮像光[0001]
[Industrial application fields]
The present invention relates to an illuminating device for an observation / imaging device applied for observing or imaging a surface image of any of various subject samples (hereinafter simply referred to as a subject sample), and more specifically, a test as an observation target. The present invention relates to an illuminating device for an observation / imaging device that can arbitrarily select either side oblique illumination or falling oblique illumination as necessary to illuminate the surface of a body sample to be observed. .
[0002]
[Prior art]
Conventionally, in a state of facing the surface of the observed portion in the subject sample as this type of observation target, for example, each of them is arranged with an illumination head that incorporates a projection illumination means, or facing the imaging head, In an observation apparatus that directly observes the surface image or an enlarged surface image by illuminating the observed part, or an imaging apparatus that indirectly displays the image on a monitor television screen. The illumination of the subject sample surface to be observed is performed by illuminating only the oblique light beam directed obliquely from the side surface obliquely inclined thereto, so-called side illumination is mainly performed. Alternatively, the surface of the observed portion is generally illuminated with only parallel rays directed in the vertical direction from the plane side facing the surface, that is, illumination mainly composed of so-called incident light. .
[0003]
[Problems to be solved by the invention]
However, in the above-described conventional illumination method mainly based on side light or illumination method mainly based on incident light, for example, the planar portion of the subject sample to be observed has a relatively fine uneven shape. However, there is a disadvantage that even if each of these illumination methods is executed individually, the fine uneven shape of the surface portion cannot always be observed precisely, and a method of simultaneously executing each of these illumination methods is also considered. However, there is a problem that the configuration of the device itself is complicated.
[0004]
The present invention has been made in order to solve the conventional problems as described above. The object of the present invention is to provide a relatively fine unevenness on the surface of the observed portion of the subject sample as an observation target. Even if it has a planar shape, the illumination is mainly composed of side oblique light on the entire outer periphery, or oblique light approximating the incident light on the same axis, corresponding to the individual observation purpose of the surface of the observed part. Each illumination image is observed in the same field of view so that any one of the illuminations can be arbitrarily selected and the corresponding illumination image can be observed effectively and appropriately in the same simplified configuration. It is to provide an illumination device for an observation / imaging device.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, an illumination device for an observation / imaging device according to the present invention is configured as follows.
That is, the present invention has a main body barrel in which an illumination light introducing portion for guiding illumination light is arranged on one side portion of the outer peripheral surface of the cylindrical barrel portion, and the cylindrical barrel portion has a central optical axis on the central optical axis. A half mirror member having a circular mirror portion formed in a peripheral portion on a lower surface side and a half mirror portion formed in a central portion is disposed at a predetermined angle with respect to the illumination light introducing portion, and a lower portion of the half mirror member On the side, an observation optical system including an objective lens corresponding to the half mirror part on the central optical axis is disposed, and an outer peripheral side optical path and an inner peripheral side optical path on the upper surface light guide side opposed to the annular mirror part The optical path switching damper for switching between the objective aperture and the outer peripheral side optical path extending downward is provided with an objective aperture that faces the surface of the observed portion of the subject sample to be observed on the central optical axis. Open the lower opening of the circumferential optical path toward the subject sample. Configure, if necessary, switch the optical path switching damper to the inner peripheral side, and enable illumination light introduced into the outer peripheral side optical path to irradiate the subject sample as side oblique light from the inner peripheral surface of the objective opening, An illumination device for an observation / imaging device, wherein the illumination device is switched to the outer peripheral side so that illumination light introduced into the inner peripheral optical path can be irradiated onto the subject sample as falling oblique light from the opening surface of the lower opening. It is.
[0007]
[Action]
In the present invention, by selectively switching the optical path switching damper to the inner peripheral side or the outer peripheral side, the illumination light guided to the illumination light introducing unit is converted into the corresponding side oblique light or falling oblique light of the subject sample. The surface of the observed part can be illuminated.
[0008]
【Example】
Hereinafter, an embodiment of an illumination device for an observation / imaging device according to the present invention will be described in detail with reference to FIGS.
[0009]
The present embodiment is a case where the present illuminating device is used for an imaging device, and of course can also be applied as an illuminating device for an observation apparatus.
[0010]
First, the schematic configuration of the illumination device in the imaging apparatus of the present embodiment shown in FIG. 1 will be described.
[0011]
FIG. 1 is a longitudinal sectional view schematically showing a schematic configuration of an imaging apparatus to which an illumination apparatus according to an embodiment of the present invention is applied. In FIG. 1, illumination with a side oblique light is performed on a subject sample. Shows the case.
[0012]
That is, in the configuration of the embodiment apparatus shown in FIG. 1, the body barrel 11 of the imaging apparatus introduces illumination light that guides illumination light on the incident optical axis B through the optical fiber bundle 13a to a predetermined position on one side of the outer peripheral surface. A cylindrical body portion 12 provided with a portion 13, and the illumination light introduction portion 13 includes an annular illumination light beam as a light transmission portion only in a portion corresponding to the entire circumference on the incident optical axis B. By providing the focusing lens 14, the illumination light to be introduced can be guided to the inside of the cylindrical body 12 as an annular parallel light beam, and the other central part is used as the non-light transmission part 15 to provide illumination light. Shut off.
[0013]
Further, the cylindrical body portion 12 is faced at an angle of 45 ° with respect to the illumination light introducing portion 13 on the central optical axis A, and the outer peripheral portion on the lower surface side is separately vapor-deposited. Thus, an annular mirror portion 17 that totally reflects downward the illumination light beam guided annularly through the focusing lens 14 is formed, and a half mirror member 16 in which a half mirror portion 18 is formed at the center portion is provided.
[0014]
Furthermore, an observation optical system 19 including an objective lens corresponding to the half mirror portion 18 of the half mirror member 16 is provided on the lower side of the half mirror member 16 on the central optical axis A, and an annular mirror. An optical path switching damper 23 that switches between the outer peripheral side optical path 21 and the inner peripheral side optical path 22 is provided on the upper surface light guide side facing the portion 17, and the outer peripheral side optical path 21 that extends downward is on the central optical axis A The objective opening 24 that faces the surface of the subject to be observed of the subject sample C as an observation target is opened, and the lower opening 25 is opened toward the subject sample C with respect to the inner peripheral side optical path 22. The condensing guide member 20 is provided.
[0015]
On the other hand, on the upper side of the half mirror member 16, a focus mechanism that is similarly focused on the central optical axis A by the focus operation ring 27 (it may be of a publicly known aspect and will not be described in detail). 26, a CCD element 28 having a variable magnification mechanism 29 (again, since it may be of a publicly known aspect and will not be described in detail) is disposed.
[0016]
Next, operations in the case of observing the subject sample C in different illumination forms using the illumination device according to the above-described embodiment will be sequentially described. Here, the focus operation D of the focus mechanism 26 by the focus operation ring 27 and the variable magnification mechanism 29 are preliminarily applied to the subject sample C that faces the objective opening 24 of the main body barrel 11 by these illumination modes. Here, it is assumed that the zooming operation E is performed respectively, and here, the imaging light b when the subject sample C is illuminated by the respective illumination modes is set so as to appropriately enter the CCD element 28. Shall.
[0017]
First, the optical path mode of the illumination light and the imaging light when the imaging apparatus according to the embodiment is used in a side oblique light-based illumination mode (hereinafter referred to as a first illumination mode) is as shown in FIG.
[0018]
In the first illumination mode, as shown in FIG. 1, the optical path switching damper 23 is selectively switched to the inner peripheral side, thereby utilizing the outer peripheral side optical path 21 of the condensing guide member 20. Here, switching of the optical path switching damper 23 to the inner peripheral side corresponds to illumination of the subject sample C by side oblique light passing through the outer peripheral side optical path 21.
[0019]
That is, in the case of the first illumination mode, the illumination light a guided to the illumination light introducing unit 13 is first converted into an annular parallel light beam by the focusing lens 14 and the annular mirror unit 17 of the half mirror member 16. And is guided to the upper surface light guide side of the light collecting guide member 20 and introduced into the inner peripheral side optical path 21. Next, in the inner peripheral side optical path 21, the reflection is repeated on each inner surface including the switching outer surface of the optical path switching damper 23, and then extends from the entire inner peripheral surface side where the objective opening 24 is opened to the entire periphery. those as epi light a 1 is emitted to the observation area of the subject sample C, and this case, with respect to the observation area of said subject sample C, was used side oblique light a 1 from all circumferential directions Lighting is done independently.
[0020]
Thereafter, the imaging light b 1 reflected by the observed portion of the subject sample C is guided from the objective opening 24 through the observation optical system 19, passes through the half mirror portion 18 of the half mirror member 16, and then the CCD element. while being incident on 28, imaging light b 1 by the CCD element 28 is converted into an electric signal, and by displaying on a monitor TV screen (not shown) which, under by side oblique a 1 of the desired street The illumination image (observation image) of the observation unit, that is, the illumination image illuminated in the first illumination form can be easily and effectively observed.
[0021]
Subsequently, an optical path mode between the illumination light and the imaging light in the case where the imaging apparatus according to the embodiment is used in an illumination mode mainly composed of falling light (hereinafter referred to as a second illumination mode) is as shown in FIG.
[0022]
In the first illumination mode, as shown in FIG. 2, the optical path switching damper 23 is selectively switched to the outer peripheral side, thereby utilizing the inner peripheral optical path 22 of the condensing guide member 20. Here, the switching of the optical path switching damper 23 to the outer peripheral side corresponds to the illumination of the subject sample C by falling light passing through the inner peripheral optical path 21.
[0023]
That is, also in the case of the second illumination mode, the illumination light a guided to the illumination light introducing unit 13 is first converted into an annular parallel light beam by the focusing lens 14 and the annular mirror portion of the half mirror member 16. 17 is totally reflected and guided to the upper surface light guide side of the light collecting guide member 20, and is introduced into the inner peripheral side optical path 22 here. Next, in the inner peripheral side optical path 22, after reflection is repeated on each inner surface including the switching inner surface of the optical path switching damper 23, the falling light from the entire lower surface side where the lower opening 25 is opened to the entire periphery is reflected. a 2 is irradiated to the observed part of the subject sample C as a 2 , and in this case, the observed part of the subject sample C is illuminated using the falling light a 2 from all directions. Made independently.
[0024]
Thereafter, the imaging light b 2 reflected by the observed portion of the subject sample C is guided through the observation optical system 20 from the objective opening 24, passes through the half mirror portion 18 of the half mirror member 16, and then the CCD element. The image pickup light b 2 is converted into an electric signal by the CCD element 28 and is displayed on the screen of a monitor television (not shown), so that the incident light by the desired tilted light a 2 can be obtained. The illumination image (observation image) of the observation unit, that is, the illumination image illuminated in the second illumination mode can be easily and effectively observed.
[0025]
【The invention's effect】
As described above in detail with reference to the examples and the respective usage patterns, according to the present invention, the main body barrel in which the illumination light introduction part for guiding the illumination light is arranged on one side of the outer peripheral surface of the cylindrical body part. In the cylindrical body, the annular mirror portion is formed in the peripheral portion on the lower surface side, and the half mirror portion is formed in the central portion while facing the illumination light introducing portion on the central optical axis at a predetermined angle. A half mirror member is disposed, and an observation optical system including an objective lens corresponding to the half mirror portion on the central optical axis is disposed on the lower side of the half mirror member and is opposed to the annular mirror portion. An optical path switching damper that switches between the outer peripheral side optical path and the inner peripheral side optical path on the upper surface light guide side, and the surface of the observed part of the subject sample as the observation target on the central optical axis in the outer peripheral side optical path that extends downward The objective aperture that faces the lens is opened, and the inner circumference side optical path Since the lower opening is opened toward the subject sample, the illumination light introduction part can be easily operated by simply switching the optical path switching damper to the inner or outer peripheral side in accordance with the observation purpose. The illumination light guided to the object can be converted into either the corresponding side oblique light or falling oblique light to effectively illuminate the surface of the observed part of the subject sample according to each purpose, and also the device configuration itself. It has excellent features such as extremely simple and easy implementation.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view schematically showing a schematic configuration of an imaging apparatus in the case of side oblique illumination to which an illumination apparatus according to an embodiment of the present invention is applied.
FIG. 2 is a longitudinal sectional view schematically showing a schematic configuration of an imaging apparatus in the case of oblique illumination in the illumination apparatus of the embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 Main body barrel 12 Cylindrical trunk | drum 13 Illumination light introduction part 13a Optical fiber bundle 14 Annular condensing lens 15 Non-light transmissive part 16 Half mirror member 17 Annular mirror part 18 Half mirror part 19 Imaging optical system 20 Condensing guide member 21 Outer circumference Side optical path 22 Inner peripheral side optical path 23 Optical path switching damper 24 Objective opening 25 Lower opening 26 Focus mechanism 27 Focus operation ring 28 CCD element 29 Variable magnification mechanism A Center optical axis B Incident optical axis C Subject sample a Illuminating light a 1 Side oblique light a 2 Falling oblique light b 1 , b 2 Imaging light

Claims (1)

筒状胴部の外周面一側部に照明光を導光する照明光導入部を配した本体鏡筒を有し、前記筒状胴部内には、中心光軸上で前記照明光導入部に対して所定角度で対面させると共に、下面側の周囲部分に環状ミラー部、中心部分にハーフミラー部を形成したハーフミラー部材を配設させ、
また、前記ハーフミラー部材の下部側には、中心光軸上で前記ハーフミラー部に対応させた対物レンズを含む観察光学系を配設し、且つ前記環状ミラー部に対向させる上面導光側に外周側光路と内周側光路とを切換える光路切換えダンパーを有すると共に、下方に延長される外周側光路には、中心光軸上で観察対象としての被験体試料の被観察部表面に対面させる対物開口部を開口し、且つ内周側光路の下方開口部を被験体試料に向け開口して構成し、
必要に応じ、前記光路切換えダンパーを内周側に切換えて、前記外周側光路に導入される照明光を前記対物開口部の内周面から側斜光として被験体試料に照射可能にし、且つ外周側に切換えて、前記内周側光路に導入される照明光を前記下方開口部の開口面から落斜光として被験体試料に照射可能にしたことを特徴とする観察・撮像装置の照明装置。A main body barrel having an illumination light introduction part for guiding illumination light is arranged on one side of the outer peripheral surface of the cylindrical body part, and the illumination light introduction part is located on the central optical axis in the cylindrical body part. A half mirror member in which an annular mirror portion is formed in the peripheral portion on the lower surface side and a half mirror portion is formed in the center portion is disposed while facing at a predetermined angle.
Also, an observation optical system including an objective lens corresponding to the half mirror part on the central optical axis is disposed on the lower side of the half mirror member, and on the upper light guide side facing the annular mirror part. An optical path switching damper that switches between the outer peripheral side optical path and the inner peripheral side optical path, and the outer peripheral side optical path that extends downward is an objective that faces the surface of the subject to be observed on the subject sample on the central optical axis. Open the opening, and configure the lower opening of the inner peripheral side optical path toward the subject sample,
If necessary, the optical path switching damper is switched to the inner peripheral side so that illumination light introduced into the outer peripheral side optical path can be irradiated to the subject sample as side oblique light from the inner peripheral surface of the objective opening, and the outer peripheral side The illumination device of the observation / imaging device is characterized in that illumination light introduced into the inner peripheral optical path can be irradiated onto the subject sample as falling oblique light from the opening surface of the lower opening.
JP03941495A 1994-09-30 1995-02-06 Lighting device for observation / imaging device Expired - Fee Related JP3642599B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP03941495A JP3642599B2 (en) 1995-02-06 1995-02-06 Lighting device for observation / imaging device
DE69525007T DE69525007T2 (en) 1994-09-30 1995-09-29 Lighting device for a viewing or imaging device
US08/536,276 US5580162A (en) 1994-09-30 1995-09-29 Lighting device for an observation/image pickup apparatus
EP95306947A EP0704695B1 (en) 1994-09-30 1995-09-29 Lighting device for an observation or image pickup apparatus
KR1019950033949A KR960011384A (en) 1994-09-30 1995-09-30 Illuminator of observation and imaging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03941495A JP3642599B2 (en) 1995-02-06 1995-02-06 Lighting device for observation / imaging device

Publications (2)

Publication Number Publication Date
JPH08211328A JPH08211328A (en) 1996-08-20
JP3642599B2 true JP3642599B2 (en) 2005-04-27

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