JP3642598B2

JP3642598B2 - Lighting device for observation / imaging device

Info

Publication number: JP3642598B2
Application number: JP03941395A
Authority: JP
Inventors: 一村上
Original assignee: Scalar Corp
Current assignee: Scalar Corp
Priority date: 1995-02-06
Filing date: 1995-02-06
Publication date: 2005-04-27
Anticipated expiration: 2020-04-27
Also published as: JPH08211327A

Description

【０００１】
【産業上の利用分野】
本発明は、任意の各種被験体試料（以下、単に被験体試料という）の表面像を観察、もしくは撮像するために適用する観察・撮像装置の照明装置に関し、さらに詳しくは、観察対象としての被験体試料の被観察部表面の照明を、必要に応じて、側射光照明、落射光照明の何れか一方、もしくは双方によって行ない得るようにした観察・撮像装置の照明装置に係るものである。
【０００２】
【従来の技術】
従来から、この種の観察対象としての被験体試料における被観察部の表面に対面させた状態で、例えば、それぞれに投光照明手段を内蔵する照明ヘッド、もしくは撮像ヘッドを臨ませて配置し、当該被観察部を照明することによって、その表面像、ないしは拡大された表面像を直接的に観察する観察装置、もしくはモニタテレビの画面上に表示させて間接的に観察する撮像装置にあっては、該被験体試料の被観察部表面に対して、これに斜行する側面側から斜め方向に向う斜行光線のみを照射する照明、いわゆる側射光を主体とする照明を行うようにするか、あるいは該被観察部表面に対して、これに正対する平面側から垂直方向に向う平行光線のみを照射する照明、いわゆる落射光を主体とする照明を行なうようにしているのが一般的である。
【０００３】
【発明が解決しようとする課題】
しかしながら、上記従来の側射光を主体とする照明手法、もしくは落射光を主体とする照明手法においては、例えば、観察対象となる被験体試料の平面部が比較的微細な凹凸のある形状である場合には、これらの各照明手法を個別に実行しても、該表面部の微細な凹凸形状を必ずしも精緻には観察できないという不利があり、また、これらの各照明手法を同時に実行する方法も考えられるが、装置自体の構成が徒らに複雑化するという問題点があった。
【０００４】
本発明は、従来のこのような問題点を解消するためになされたもので、その目的とするところは、観察対象としての被験体試料における被観察部表面が、たとえ、比較的微細な凹凸を有する平面形状であっても、該被観察部表面の個々の観察目的に対応して、全外周上の側斜光と一部外周上の偏斜光とを主体とする各照明、または同軸上の落射光を主体とする照明、ないしは側斜光と落射光との合成光による照明の各照明像の観察のそれぞれを合わせて、簡略化された同一構成内で有効かつ適切に行ない得るようにした、同一視野で各照明像を観察しうる観察・撮像装置の照明装置を提供することである。
【０００５】
【課題を解決するための手段】
前記目的を達成するために、本発明に係る観察・撮像装置の照明装置は、次のように構成したものである
【０００６】
即ち、本発明は、筒状胴部の外周面一側部に照明光を導光する照明光導入部を配した本体鏡筒を有し、前記筒状胴部内には、中心光軸上で前記照明光導入部に対して所定角度で対面させると共に、下面側の周囲部分に環状ミラー部、中心部分にハーフミラー部を形成したハーフミラー部材を設け、且つ該ハーフミラー部材を包括する前記中心光軸上の外周囲に照明切替え筒体を可回動的に配設させ、また、前記ハーフミラー部材の下部側には、中心光軸上でハーフミラー部に対応させた対物レンズを含む撮像光学系、及び該撮像光学系の外側周囲部分を占めて環状ミラー部に対応させた環状集光レンズを配設させ、その下部側に、前記中心光軸上で観察対象としての被験体試料の被観察部表面に対面させる対物開口部を開口し、且つ前記環状集光レンズに対応させる集光ガイド部材を配設させ、さらに、前記照明切替え筒体の周壁部分には、前記照明光導入部を通して導光される照明光を少なくとも側斜光用、偏斜光用、落射光用、及び側斜光・落射光合成用の何れかに変換する複数種類の照明制御スリット部材を配し、且つ前記偏斜光用の照明制御スリット部材については、前記照明光導入部の入射光軸に直交して可回動的に構成し、必要に応じ、前記側斜光用、偏斜光用、落射光用、及び側斜光・落射光合成用の各照明制御スリット部材の何れかを前記照明光導入部に選択的に対面させて、前記被験体試料に対する側斜光、偏斜光、落射光、及び側斜光・落射光の合成光による照明をそれぞれに得られるようにし、併せて、前記偏斜光用の照明制御スリット部材が選択されたときには、該偏斜光用の照明制御スリット部材を前記照明光導入部の入射光軸上で選択的に回動させて、前記被験体試料に対する偏斜光照明角度を任意に設定し得るようにしたことを特徴とする観察・撮像装置の照明装置である。
【０００７】
また、前記観察、撮像装置の照明装置の構成において、前記各照明制御スリット部材が、前記照明光導入部を通して導光される照明光を平行光束にする集束光学系を内蔵していることを特徴とするものである。
【０００８】
【作用】
本発明においては、前記側斜光用、偏斜光用、落射光用、及び側斜光・落射光合成用の何れかの照明制御スリット部材を照明光導入部に選択的に対面させることで、該照明光導入部に導光される照明光を該当する側斜光、偏斜光、落射光、及び側斜光・落射光の合成光に変換して前記被験体試料の被観察部表面を照明し得るのであり、そして、偏斜光用の照明制御スリット部材が選択されたときは、これを回動させることで、被験体試料に対する偏斜光照明角度を任意に設定して同様に照明し得るのである。
【０００９】
また、前記各照明制御スリット部材に対して、前記照明光導入部を通して導光される照明光を平行光束にする集束光学系を内蔵させるときは、選択された側斜光、偏斜光、落射光、及び側斜光・落射光の合成光を平行光束にでき、前記被験体試料の被観察部表面を一層、効果的に照明し得る。
【００１０】
【実施例】
以下、本発明に係る観察・撮像装置の照明装置の一実施例につき、図１ないし図３、図４ないし図７を参照して詳細に説明する。
【００１１】
本実施例は、撮像装置に対して本照明装置を使用する場合であり、観察装置の照明装置としても適用可能なことは勿論である。
【００１２】
最初に、図１ないし図３に示す本実施例の撮像装置における照明装置の構成について述べる。
【００１３】
図１は、本発明の一実施例による照明装置を適用した撮像装置の概要構成を模式的に示す縦断面図、図２は、同上照明装置における照明切替え筒体を取り出して模式的に示す拡大横断面図である。
【００１４】
また、図３（ａ）ないし（ｄ）は、同実施例の照明切替え筒体における集束光学系内蔵型の各照明制御部材をそれぞれに展開して模式的に示すもので、同図３（ａ）は、側斜光用の照明制御スリット部材（以下、側斜光用スリット部材という）の正面説明図、同図３（ｂ）は、偏斜光用の照明制御スリット部材（以下、偏斜光用スリット部材という）の正面説明図、同図３（ｃ）は、落射光用の照明制御スリット部材（以下、落射光用スリット部材という）の正面説明図、同図３（ｄ）は、側斜光と落射光との合成光用の照明制御スリット部材（以下、側斜光・落射光の合成光用スリット部材という）の正面説明図である。
【００１５】
即ち、これらの図１ないし図３に示す実施例装置の構成において、撮像装置の本体鏡筒１１は、外周面一側部の所定位置に光ファイバー束１３ａを通して入射光軸Ｂ土の照明光を導光する照明光導入部１３を配した筒状胴部１２を有しており、該筒状胴部１２内には、中心光軸Ａ上で、前記照明光導入部１３に対して４５°の角度で対面し、且つ下面側の外側周囲部分に対して別に蒸着された環状ミラー部１５、中心部分にハーフミラー部１６をそれぞれに形成したハーフミラー部材１４を設けると共に、該ハーフミラー部材１４を包括する外周囲にあって、詳細については後述する切替え操作リング３２付きの照明切替え筒体３１を中心光軸Ａ上で可回動的に配設してある。
【００１６】
また、前記ハーフミラー部材１４の下部側には、中心光軸Ａ上で、前記ハーフミラー部材１４のハーフミラー部１６に対応させた対物レンズを含む撮像光学系１７、該撮像光学系１７の外側周囲部分を占めて前記環状ミラー部１５に対応させた環状集光レンズ１８をそれぞれに設け、さらに、その下部側にあって、観察対象としての被験体試料Ｃの被観察部表面に対面させる対物開口部２０を開口すると共に、前記環状集光レンズ１８に対応させた内側周囲部分に集光段部２１を形成した集光ガイド部材１９を設けてある。
【００１７】
一方、前記ハーフミラー部材１４の上部側には、同様に中心光軸Ａ上で、フォーカス操作リング２３によってフォーカス作動されるフォーカス機構（公知態様のものであってよいので、詳細については省略する）２２を介し、可変倍率機構（ここでも、公知態様のものであってよいので、詳細については省略する）２５を有するＣＣＤ素子２４を配設してある。
【００１８】
さらに、前記切替え操作リング３２付きの照明切替え筒体３１は、図２、図３（ａ）ないし（ｄ）から明らかなように、前記ハーフミラー部材１４の周囲を切替え操作リング３２によって中心光軸Ａ上で回動可能にした保持筒、この場合、好ましくは、直角（９０゜）の角度範囲毎に節度的に回動し得るようにされた保持筒３３を有しており、該保持筒３３の同様に該当角度範囲毎に４分割した各周壁部分にあって、前記照明光導入部１３を通して導光される照明光を平行光束にするための集束光学系をそれぞれに内蔵した側斜光用スリット部材４１、偏斜光用スリット部材５１、落射光用スリット部材６１、及び側斜光・落射光合成用スリット部材７１をそれぞれ個別に嵌設したもので、これらの各照明制御スリット部材４１、５１、６１、及び７１は、切替え操作リング３２の選択的な切替え操作で照明光導入部１３に対面させ得るようになっている。
【００１９】
ここで、前記側斜光用スリット部材４１については、図３（ａ）に示した如くに、前記ハーフミラー部材１４での環状ミラー部１５の全周囲に対応する部分においてのみ光透過部としての環状をした照明光束の集束レンズ４２を設け、且つ他の部分を非光透過部４３としてある。
【００２０】
前記偏斜光用スリット部材５１については、図３（ｂ）に示した如くに、前記ハーフミラー部材１４での環状ミラー部１５の一部周囲、この場合は、右半部に対応する部分においてのみ光透過部としての半環状をした照明光束の集束レンズ５２を設け、且つ他の部分を非光透過部５３としてあり、且つ一方では、入射光軸Ｂ上で該集束レンズ５２を任意に回動可能にする回動操作リング５４を有している。
【００２１】
前記落射光用スリット部材６１については、図３（ｃ）に示した如くに、前記ハーフミラー部材１４でのハーフミラー部１６に対応する部分においてのみ光透過部としての照明光束の集束レンズ６２を設け、且つ他の部分を非光透過部６３としてある。
【００２２】
前記側斜光・落射光の合成光用スリット部材７１については、図３（ｄ）に示した如くに、前記ハーフミラー部材１４での環状ミラー部１５とハーフミラー部１６の全周囲とに対応する部分においてのみ光透過部としての照明光束の集束レンズ７２を設け、且つ他の部分を非光透過部７３としてある。
【００２３】
次に、上記実施例構成による照明装置を用い、図４ないし図７の各照明態様で被験体試料Ｃを観察する場合の作用について順次に述べる。
【００２４】
そして、この場合には、これらの各照明形態により、本体鏡筒１１の対物開口部２０を対面させる被験体試料Ｃに対して、予め、フォーカス操作リング２３によるフォーカス機構２２のフォーカス作動Ｄと可変倍率機構２５の変倍作動Ｅとがそれぞれになされているものとし、ここでは、該各照明形態によって被験体試料Ｃを照明したときの撮像光ｂが、適正にＣＣＤ素子２４へ入射するように設定されているものとする。
【００２５】
先ず、図４（ａ）、（ｂ）は、同上実施例による撮像装置を側斜光主体の照明形態（以下、第１の照明形態という）で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、同上第１の照明形態で選択された側斜光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【００２６】
本第１の照明形態では、同図４（ａ）、（ｂ）に見られるように、切替え操作リング３２の選択切替え操作により、照明切替え筒体３１の側斜光用スリット部材４１を照明光導入部１３に対面させて使用する。
【００２７】
即ち、本第１の照明形態による場合、照明光導入部１３に導光される照明光ａは、先ず、側斜光用スリット部材４１の環状に形成した集束レンズ４２のみを通して、平行光束にされた上で、ハーフミラー部材１４の全周囲に亘って形成した環状ミラー部１５により、中心光軸Ａ上で下方へ向けて反射され、且つ環状集光レンズ１８を経た後に、集光段部２１から集光ガイド部材１９内に導入されると共に、該集光ガイド部材１９で集光ガイドされ、対物開口部２０の全内周面から全周囲に亘る側斜光ａ_１として被験体試料Ｃの被観察部に照射されるもので、この場合には、該被験体試料Ｃの被観察部に対して、全周囲方向からの側斜光ａ_１を用いた照明が独立的になされる。
【００２８】
次いで、被験体試料Ｃの被観察部で反射された撮像光ｂ_１は、対物開口部２０から撮像光学系１７を通して導光され、ハーフミラー部材１４のハーフミラー部１６を経た後に、ＣＣＤ素子２４に入射されると共に、該ＣＣＤ素子２４により撮像光ｂ_１が電気信号に変換され、且つこれを図示しないモニタテレビの画面上に表示させることによって、所期通りの側斜光ａ_１による被観察部の照明像（観察像）、つまりは、第１の照明形態で照明された照明像を容易にしかも効果的に観察し得るのである。
【００２９】
次に、図５（ａ）、（ｂ）、（ｃ）は、同上実施例による撮像装置を偏斜光主体の照明形態（以下、第２の照明形態という）で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、同第２の照明形態で選択された偏斜光用スリット部材による照明光の照射範囲を示す説明図、同第２の照明形態で選択された偏斜光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【００３０】
本第２の照明形態では、同図５（ａ）、（ｂ）に見られるように、切替え操作リング３２の選択切替え操作により、照明切替え筒体３１の偏斜光用スリット部材５１を照明光導入部１３に対面させて使用する。
【００３１】
即ち、本第２の照明形態による場合にも、照明光導入部１３に導光される照明光ａは、先ず、偏斜光用スリット部材５１の右半部に相当する半環状に形成した集束レンズ５２のみを通して平行光束にされた上で、ハーフミラー部材１４の環状ミラー部１５の内の該当する右半部により、中心光軸Ａ上で下方へ向けて反射され、且つ同様に環状集光レンズ１８の右半部を経た後に、対応する集光段部２１から集光ガイド部材１９内に導入されると共に、該集光ガイド部材１９で集光ガイドされ、対物開口部２０の右半部該当の内周面から半周囲に亘る偏斜光ａ_２として被験体試料Ｃの被観察部に照射されるもので、この場合には、該被験体試料Ｃの被観察部に対して、半周囲方向からの偏斜光ａ_２を用いた照明が独立的になされる。
【００３２】
次いで、被験体試料Ｃの被観察部で反射された撮像光ｂ_２は、ここでも、対物開口部２０から撮像光学系１７を通して導光され、ハーフミラー部材１４のハーフミラー部１６を経た後に、ＣＣＤ素子２４に入射されると共に、該ＣＣＤ素子２４により撮像光ｂ_２が電気信号に変換され、且つこれを図示しないモニタテレビの画面上に表示させることによって、所期通りの偏斜光ａ_２による被観察部の照明像（観察像）、つまりは、第２の照明形態で照明された照明像を容易にしかも効果的に観察し得るのである。
【００３３】
そして、本第２の照明形態による場合には、回動操作リング５４を入射光軸Ｂ上で任意選択的に回動操作することにより、前記した偏斜光ａ_２による照明光の照射角度範囲を中心光軸Ａ上で変更して観察し得るのである。
【００３４】
次に、図６（ａ）、（ｂ）は、同実施例による撮像装置を落射光照明（以下、第３の照明形態という）で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、同第３の照明形態で選択された落射光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【００３５】
本第３の照明形態では、同図６（ａ）、（ｂ）に見られるように、切替え操作リング３２の選択切替え操作により、照明切替え筒体３１の落射光用スリット部材６１を照明光導入部１３に対面させて使用する。
【００３６】
即ち、本第３の照明形態による場合にも、照明光導入部１３に導光される照明光ａは、先ず、落射光用スリット部材６１の中心部に相当して形成した集束レンズ６２のみを通して平行光束にされた上で、ハーフミラー部材１４のハーフミラー部１６により、中心光軸Ａ上で下方に向けて反射され、且つ撮像光学系１７を経た後に、対物開口部２０から落射光ａ_３として被験体試料Ｃの被観察部に照射されるもので、この場合には、該被験体試料Ｃの被観察部に対して、垂直方向からの落射光ａ_３を用いた照明が独立的になされる。
【００３７】
次いで、被験体試料Ｃの被観察部で反射された撮像光ｂ_３は、再度、対物開口部２０から撮像光学系１７を通して導光され、ハーフミラー部材１４のハーフミラー部１６を経た後に、ＣＣＤ素子２４に入射されると共に、該ＣＣＤ素子２４により撮像光ｂ_３が電気信号に変換され、且つこれを図示しないモニタテレビの画面上に表示させることによって、所期通りの落射光ａ_３による被観察部の照明像（観察像）、つまりは、第３の照明形態で照明された照明像を容易にしかも効果的に観察し得るのである。
【００３８】
次に、図７（ａ）、（ｂ）は、同実施例による撮像装置を側斜光と落射光の合成光照明（以下、第４の照明形態という）で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、同第４の照明形態で選択された落射光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【００３９】
本第４の照明形態では、同図７（ａ）、（ｂ）に見られるように、切替え操作リング３２の選択切替え操作により、照明切替え筒体３１の側斜光・落射光合成用スリット部材７１を照明光導入部１３に対面させて使用する。
【００４０】
即ち、本第４の照明形態による場合、照明光導入部１３に導光される照明光ａは、先ず、一方において、前記第１の照明形態による場合と同様に、側斜光・落射光合成用スリット部材７１の集束レンズ７２の内で、周囲相当の環状部分のみを通して、平行光束にされた上で、ハーフミラー部材１４の全周囲に亘って形成した環状ミラー部１５により、中心光軸Ａ上で下方へ向け側斜光ａ_４ａとして反射され、また、他方において、前記第３の照明形態による場合と同様に、前記側斜光・落射光合成用スリット部材７１の集束レンズ７２の内で、中心部分のみを通して平行光束にされた上で、ハーフミラー部材１４の中心部分に形成したハーフミラー部１６により、中心光軸Ａ上で下方に向け落射光ａ_４ｂとして反射されることになる。
【００４１】
そして、前記前者相当の一方の側斜光ａ_４ａについては、環状集光レンズ１８を経た後に、集光段部２１から集光ガイド部材１９内に導入されると共に、該集光ガイド部材１９で集光ガイドされ、対物開口部２０の全内周面から全周囲に亘って被験体試料Ｃの被観察部に照射され、また、前記後者相当の他方の落射光ａ_４ｂについては、撮像光学系１７を経た後に、対物開口部２０を通して垂直方向から被験体試料Ｃの被観察部に照射されることになり、この場合には、該被験体試料Ｃの被観察部に対して、全周囲方向からの側斜光ａ_４ａを用いた照明と、垂直方向からの落射光ａ_４ｂとの両者、つまり、これらの側斜光ａ_４ａと落射光ａ_４ｂとの合成光ａ_４を用いた照明が独立的になされる。
【００４２】
次いで、被験体試料Ｃの被観察部で反射された撮像光ｂ_４は、再度、対物開口部２０から撮像光学系１７を通して導光され、ハーフミラー部材１４のハーフミラー部１６を経た後に、ＣＣＤ素子２４に入射されると共に、該ＣＣＤ素子２４により撮像光ｂ_４が電気信号に変換され、且つこれを図示しないモニタテレビの画面上に表示させることによって、所期通りの側斜光ａ_４ａと落射光ａ_４ｂとの合成光ａ_４による被観察部の照明像（観察像）、つまりは、第４の照明形態で照明された照明像を容易にしかも効果的に観察し得るのである。
【００４３】
なお、前記実施例においては、各照明制御スリット部材に平行光束を得るための集光レンズを設けているが、照明光導入部との間にあって、照明光を平行光束にする光学系を介在させることにより、該集光レンズに代えて単なる導光スリットを設けるようにしてもよい。
【００４４】
【発明の効果】
以上、実施例、及び各使用形態例によって詳述したように、本発明によれば、筒状胴部の外周面一側部に照明光を導光する照明光導入部を配した本体鏡筒を設けて、筒状胴部内には、中心光軸上で照明光導入部に対し所定角度で対面させると共に、下面側の周囲部分に環状ミラー部、中心部分にハーフミラー部を形成したハーフミラー部材を設け、且つハーフミラー部材を包括する中心光軸上の外周囲に照明切替え筒体を可回動的に配設させ、ハーフミラー部材の下部側には、中心光軸上でハーフミラー部に対応させた対物レンズを含む撮像光学系、及び該撮像光学系の外側周囲部分を占めて環状ミラー部に対応させた環状集光レンズを配設させ、その下部側に、中心光軸上で観察対象としての被験体試料の被観察部表面に対面させる対物開口部を開口し、且つ環状集光レンズに対応させる集光ガイド部材を配設させ、照明切替え筒体の周壁部分には、照明光導入部を通して導光される照明光を少なくとも側斜光用、偏斜光用、落射光用、及び側斜光・落射光合成用の何れかに変換する複数種類の照明制御スリット部材を配し、且つ偏斜光用の照明制御スリット部材については、照明光導入部の入射光軸に直交して可回動的に構成し、必要に応じて、各照明制御スリット部材の何れかを照明光導入部に選択的に対面させ得るようにし、併せて、偏斜光用の照明制御スリット部材が選択されたときには、該偏斜光用の照明制御スリット部材を照明光導入部の入射光軸上で選択的に回動させて、前記被験体試料に対する偏斜光照明角度を任意に設定し得るようにしたから、観察目的に対応して、側斜光用、偏斜光用、落射光用、及び側斜光・落射光合成用の何れかの照明制御スリット部材を照明光導入部に選択的に対面させるだけの簡単な操作で、照明光導入部に導光される照明光を該当する側斜光、偏斜光、落射光、及び側斜光・落射光の合成光の何れかに変換して被験体試料の被観察部表面をそれぞれの目的に相応して効果的に照明でき、また、偏斜光用の照明制御スリット部材が選択されたときは、これを回動させることで、被験体試料に対する偏斜光照明角度を任意に設定して同様に観察し得るのであり、しかも装置構成自体も比較的簡単で容易に実施し得る等の優れた特長がある。
【図面の簡単な説明】
【図１】本発明の一実施例による照明装置を適用した撮像装置の概要構成を模式的に示す縦断面図である。
【図２】同上実施例の照明装置における照明切替え筒体を取り出して模式的に示す拡大横断面図である。
【図３】同上実施例の照明切替え筒体における集束光学系内蔵型の各照明制御部材をそれぞれに展開して模式的に示すもので、（ａ）は、側斜光用の照明制御スリット部材の正面説明図、（ｂ）は、偏斜光用の照明制御スリット部材の正面説明図、（ｃ）は、落射光用の照明制御スリット部材の正面説明図、（ｄ）は、側斜光と落射光との合成光用照明制御スリット部材の正面説明図である。
【図４】（ａ）は、同上実施例による撮像装置を側斜光照明形態で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、（ｂ）は、同上照明形態で選択された側斜光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【図５】（ａ）は、同上実施例による撮像装置を偏斜光照明形態で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、（ｂ）は、同上照明形態で選択された偏斜光用スリット部材による照明光の照射範囲を示す説明図、（ｃ）は、同上照明形態で選択された偏斜光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【図６】（ａ）は、同上実施例による撮像装置を落射光照明形態で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、（ｂ）は、同上照明形態で選択された落射光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【図７】（ａ）は、同上実施例による撮像装置を側斜光と落射光の合成光照明形態で使用する場合の照明光と撮像光との光路態様を示す縦断面説明図、（ｂ）は、同上照明形態で選択された側斜光・落射光の合成光用スリット部材と被験体試料に対する照明光、及び撮像光との関係を示す説明図である。
【符号の説明】
１１本体鏡筒
１２筒状胴部
１３照明光導入部
１３ａ光ファイバー束
１４ハーフミラー部材
１５環状ミラー部
１６ハーフミラー部
１７撮像光学系
１８環状集光レンズ
１９集光ガイド部材
２０対物開口部
２１集光段部
２２フォーカス機構
２３フォーカス操作リング
２４ＣＣＤ素子
２５可変倍率機構
３１照明切替え筒体
３２切替え操作リング
３３スリット保持筒
４１側斜光用の照明制御スリット部材（側斜光用スリット部材）
４２照明光束の集束レンズ
４３非光透過部
５１偏斜光用の照明制御スリット部材（偏斜光用スリット部材）
５２照明光束の集束レンズ
５３非光透過部
５４回動操作リング
６１落射光用の照明制御スリット部材（落射光用スリット部材）
６２照明光束の集束レンズ
６３非光透過部
７１側斜光と落射光の合成光用の照明制御スリット部材（側斜光・落射光の合成光用スリット部材）
７２照明光束の集束レンズ
７３非光透過部
Ａ中心光軸
Ｂ入射光軸
Ｃ被験体試料
ａ照明光
ａ_１、ａ_４ａ側斜光
ａ_２偏斜光
ａ_３、ａ_４ｂ落射光
ａ_４側斜光と落射光の合成光
ｂ_１、ｂ_２、ｂ_３、ｂ_４撮像光[0001]
[Industrial application fields]
The present invention relates to an illuminating device for an observation / imaging device applied for observing or imaging a surface image of any of various subject samples (hereinafter simply referred to as a subject sample), and more specifically, a test as an observation target. The present invention relates to an illuminating device for an observation / imaging device that can illuminate the surface of an observation part of a body sample by either one or both of side illumination and epi-illumination as required.
[0002]
[Prior art]
Conventionally, in a state of facing the surface of the observed portion in the subject sample as this type of observation target, for example, each of them is arranged with an illumination head that incorporates a projection illumination means, or facing the imaging head, In an observation apparatus that directly observes the surface image or an enlarged surface image by illuminating the observed part, or an imaging apparatus that indirectly displays the image on a monitor television screen. The illumination of the subject sample surface to be observed is performed by illuminating only the oblique light beam directed obliquely from the side surface obliquely inclined thereto, so-called side illumination is mainly performed. Alternatively, the surface of the observed portion is generally illuminated with only parallel rays directed in the vertical direction from the plane side facing the surface, that is, illumination mainly composed of so-called incident light. .
[0003]
[Problems to be solved by the invention]
However, in the above-described conventional illumination method mainly based on side light or illumination method mainly based on incident light, for example, the planar portion of the subject sample to be observed has a relatively fine uneven shape. However, there is a disadvantage that even if each of these illumination methods is executed individually, the fine uneven shape of the surface portion cannot always be observed precisely, and a method of simultaneously executing each of these illumination methods is also considered. However, there is a problem that the configuration of the device itself is complicated.
[0004]
The present invention has been made in order to solve the conventional problems as described above. The object of the present invention is to provide a relatively fine unevenness on the surface of the observed portion of the subject sample as an observation target. Even if it has a planar shape, each illumination mainly composed of side oblique light on the entire outer periphery and declination light on a part of the outer periphery, or a coaxial drop corresponding to the individual observation purpose of the surface of the observed portion. It is the same that can be performed effectively and appropriately in the same simplified structure by combining each illumination image of illumination mainly composed of incident light or combined illumination of side oblique light and incident light. An illumination device of an observation / imaging device capable of observing each illumination image in a visual field.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, an illumination device for an observation / imaging device according to the present invention is configured as follows.
[0006]
That is, the present invention has a main body barrel in which an illumination light introducing portion for guiding illumination light is arranged on one side portion of the outer peripheral surface of the cylindrical barrel portion, and the cylindrical barrel portion has a central optical axis on the central optical axis. The center that faces the illumination light introduction part at a predetermined angle, provides a half mirror member in which a ring mirror part is formed in a peripheral part on the lower surface side and a half mirror part is formed in a central part, and includes the half mirror member An illumination switching cylinder is rotatably disposed around the outer periphery on the optical axis, and an imaging including an objective lens corresponding to the half mirror portion on the central optical axis is provided on the lower side of the half mirror member. An optical condensing lens that occupies the outer peripheral portion of the optical system and the imaging optical system and that corresponds to the annular mirror portion is disposed, and a lower portion of the subject sample as an observation target on the central optical axis is disposed. Open the objective opening that faces the surface of the observation part, and make the ring A condensing guide member corresponding to the optical lens is disposed, and the illumination light guided through the illumination light introducing portion is at least for side oblique light, oblique light, and falling on the peripheral wall portion of the illumination switching cylinder. A plurality of types of illumination control slit members to be converted into one for incident light and one for side oblique light and incident light synthesis are arranged, and the illumination control slit member for declination light is arranged on the incident optical axis of the illumination light introducing section. It is configured to be orthogonal and pivotable, and if necessary, any one of the illumination control slit members for the side oblique light, the declination light, the incident light, and the side oblique light and incident light synthesis is used as the illumination light introducing unit. To each other, so that illumination by side oblique light, oblique light, incident light, and combined light of side oblique light and incident light can be obtained for the subject sample, respectively, and illumination for the oblique light is also obtained. When the control slit member is selected The oblique light illumination control slit member is selectively rotated on the incident light axis of the illumination light introducing section so that the oblique light illumination angle with respect to the subject sample can be arbitrarily set. This is an illumination device for an observation / imaging device.
[0007]
Further, in the configuration of the illumination device of the observation and imaging device, each illumination control slit member includes a focusing optical system that converts the illumination light guided through the illumination light introducing unit into a parallel light beam. It is what.
[0008]
[Action]
In the present invention, any one of the illumination control slit members for side oblique light, declination light, incident light, and side oblique light and incident light synthesis is selectively faced to the illumination light introducing portion, thereby the illumination light. The illumination light guided to the introduction part can be converted into the corresponding side oblique light, declination light, incident light, and combined light of side oblique light and incident light to illuminate the surface of the observed part of the subject sample, And when the illumination control slit member for oblique light is selected, it can be illuminated in the same manner by arbitrarily setting an oblique illumination angle for the subject sample by rotating it.
[0009]
Further, when the focusing optical system for making the illumination light guided through the illumination light introducing portion into a parallel light beam is built in each illumination control slit member, the selected side oblique light, declination light, incident light, In addition, the combined light of the side oblique light and the incident light can be converted into a parallel light beam, and the surface of the observed portion of the subject sample can be illuminated more effectively.
[0010]
【Example】
Hereinafter, an embodiment of an illumination device for an observation / imaging device according to the present invention will be described in detail with reference to FIGS. 1 to 3 and FIGS. 4 to 7.
[0011]
The present embodiment is a case where the present illuminating device is used for an imaging device, and of course can also be applied as an illuminating device for an observation apparatus.
[0012]
First, the configuration of the illumination device in the imaging apparatus of the present embodiment shown in FIGS. 1 to 3 will be described.
[0013]
FIG. 1 is a longitudinal sectional view schematically showing a schematic configuration of an imaging apparatus to which an illumination device according to an embodiment of the present invention is applied. FIG. 2 is an enlarged view schematically showing an illumination switching cylinder in the illumination device. It is a cross-sectional view.
[0014]
3 (a) to 3 (d) schematically show the respective illumination control members with built-in focusing optical system in the illumination switching cylinder of the same embodiment. ) Is a front explanatory view of an illumination control slit member for side oblique light (hereinafter referred to as a side oblique light slit member), and FIG. 3B is an illumination control slit member for oblique light (hereinafter referred to as an oblique light slit member). FIG. 3C is a front explanatory view of an illumination control slit member for incident light (hereinafter referred to as an incident light slit member), and FIG. It is front explanatory drawing of the illumination control slit member for synthetic lights with incident light (henceforth the slit member for synthetic lights of side oblique light and incident light).
[0015]
That is, in the configuration of the embodiment apparatus shown in FIGS. 1 to 3, the body barrel 11 of the imaging apparatus guides the illumination light of the incident optical axis B through the optical fiber bundle 13a to a predetermined position on one side of the outer peripheral surface. It has a cylindrical body portion 12 provided with a illuminating light introduction portion 13 that emits light, and the tubular body portion 12 has a 45 ° angle with respect to the illumination light introduction portion 13 on the central optical axis A. An annular mirror portion 15 which is faced at an angle and is separately deposited on the outer peripheral portion on the lower surface side, and a half mirror member 14 formed with a half mirror portion 16 in the center portion are provided, and the half mirror member 14 is provided. An illumination switching cylinder 31 with a switching operation ring 32, which will be described later in detail, is disposed on the central optical axis A so as to be rotatable.
[0016]
Further, on the lower side of the half mirror member 14, an imaging optical system 17 including an objective lens corresponding to the half mirror portion 16 of the half mirror member 14 on the central optical axis A, and the outside of the imaging optical system 17. An annular condenser lens 18 occupying a peripheral portion and corresponding to the annular mirror portion 15 is provided on each of them, and further, an objective on the lower side of the lens to face the surface of the subject to be observed of the subject sample C as an observation target. A condensing guide member 19 having a condensing step portion 21 formed in an inner peripheral portion corresponding to the annular condensing lens 18 is provided while opening the opening 20.
[0017]
On the other hand, on the upper side of the half mirror member 14, a focus mechanism that is similarly focused on the central optical axis A by the focus operation ring 23 (it may be of a publicly known aspect and will not be described in detail). A CCD element 24 having a variable magnification mechanism 25 (again, since it may be of a publicly-known aspect and will not be described in detail) is provided via 22.
[0018]
Further, as is apparent from FIGS. 2 and 3A to 3D, the illumination switching cylinder 31 with the switching operation ring 32 has a central optical axis around the half mirror member 14 by the switching operation ring 32. A holding cylinder which can be rotated on A, and in this case, preferably has a holding cylinder 33 which can be rotated moderately for each angle range of 90 degrees. Similarly to 33, each of the peripheral wall portions divided into four for each corresponding angle range, and each of which has a focusing optical system for converting the illumination light guided through the illumination light introducing portion 13 into a parallel light beam, for side oblique light The slit member 41, the oblique light slit member 51, the incident light slit member 61, and the side oblique light and incident light combining slit member 71 are individually fitted, and each of these illumination control slit members 41, 51, 61 is provided. And 71 is adapted capable of facing the illumination light introducing section 13 in a selective switching operation of the switching operation ring 32.
[0019]
Here, as for the side oblique light slit member 41, as shown in FIG. 3 (a), the annular member as the light transmitting portion is provided only in the portion corresponding to the entire circumference of the annular mirror portion 15 in the half mirror member 14. A focusing lens 42 for the illumination light beam is provided, and the other part is a non-light transmission part 43.
[0020]
As for the oblique light slit member 51, as shown in FIG. 3 (b), only a portion around the annular mirror portion 15 of the half mirror member 14, in this case, the portion corresponding to the right half portion. A semicircular illumination light beam focusing lens 52 is provided as a light transmission part, and the other part is a non-light transmission part 53. On the other hand, the focusing lens 52 is arbitrarily rotated on the incident optical axis B. It has a pivoting ring 54 that enables it.
[0021]
With respect to the incident light slit member 61, as shown in FIG. 3C, an illumination light beam focusing lens 62 as a light transmitting portion is provided only in a portion corresponding to the half mirror portion 16 of the half mirror member 14. The other portion is provided as a non-light transmitting portion 63.
[0022]
The side oblique light and incident light combined light slit member 71 corresponds to the annular mirror portion 15 of the half mirror member 14 and the entire periphery of the half mirror portion 16 as shown in FIG. A focusing lens 72 for the illumination light beam as a light transmission part is provided only in the part, and the other part is a non-light transmission part 73.
[0023]
Next, operations in the case of observing the subject sample C in the respective illumination modes shown in FIGS. 4 to 7 using the illumination device according to the above-described embodiment will be sequentially described.
[0024]
In this case, the focus operation D of the focus mechanism 22 by the focus operation ring 23 and the variable of the subject sample C that faces the objective opening 20 of the main body barrel 11 are changed in advance according to each illumination mode. Here, it is assumed that the magnification mechanism 25 performs the magnification operation E, and here, the imaging light b when the subject sample C is illuminated by each illumination mode is appropriately incident on the CCD element 24. It is assumed that it is set.
[0025]
First, FIGS. 4A and 4B are optical path modes of illumination light and imaging light when the imaging apparatus according to the embodiment is used in an illumination mode mainly composed of side oblique light (hereinafter referred to as a first illumination mode). It is explanatory drawing which shows the relationship between the illumination light with respect to the slit member for side oblique light selected by the 1st illumination form same as the above, the illumination light with respect to a test object sample, and imaging light.
[0026]
In the first illumination mode, as shown in FIGS. 4A and 4B, illumination light is introduced into the side oblique light slit member 41 of the illumination switching cylinder 31 by the selection switching operation of the switching operation ring 32. It is used by facing the part 13.
[0027]
That is, in the case of the first illumination mode, the illumination light a guided to the illumination light introduction unit 13 is first converted into a parallel light beam only through the converging lens 42 formed in the annular shape of the side oblique light slit member 41. Above, after being reflected downward on the central optical axis A by the annular mirror portion 15 formed over the entire circumference of the half mirror member 14, and after passing through the annular condenser lens 18, from the condenser step portion 21. Side oblique light a introduced into the condensing guide member 19 and guided by the condensing guide member 19 from the entire inner peripheral surface to the entire periphery of the objective opening 20. ₁ In this case, the side oblique light a from all directions is applied to the observed portion of the subject sample C. ₁ Illumination using is performed independently.
[0028]
Next, the imaging light b reflected by the observed portion of the subject sample C ₁ Is guided from the objective opening 20 through the imaging optical system 17, passes through the half mirror portion 16 of the half mirror member 14, enters the CCD element 24, and is input to the imaging light b by the CCD element 24. ₁ Is converted into an electrical signal, and this is displayed on the screen of a monitor television (not shown), whereby the desired side oblique light a ₁ It is possible to easily and effectively observe the illumination image (observation image) of the portion to be observed, that is, the illumination image illuminated in the first illumination mode.
[0029]
Next, FIGS. 5A, 5 </ b> B, and 5 </ b> C illustrate illumination light and imaging when the imaging apparatus according to the embodiment is used in an illumination mode mainly based on oblique light (hereinafter referred to as a second illumination mode). Explanatory drawing which shows the optical path aspect with light, Explanatory drawing which shows the irradiation range of the illumination light by the slit member for oblique light selected by the 2nd illumination form, The oblique light selected by the 2nd illumination form It is explanatory drawing which shows the relationship between the illumination light with respect to the slit member for a test object, and a test subject sample, and imaging light.
[0030]
In the second illumination mode, as shown in FIGS. 5A and 5B, illumination light is introduced into the oblique light slit member 51 of the illumination switching cylinder 31 by the selection switching operation of the switching operation ring 32. It is used by facing the part 13.
[0031]
That is, also in the case of the second illumination mode, the illumination light “a” guided to the illumination light introduction unit 13 is first formed into a semi-annular focusing lens corresponding to the right half of the oblique light slit member 51. After being made into a parallel light flux only through 52, it is reflected downward on the central optical axis A by the corresponding right half part of the annular mirror part 15 of the half mirror member 14, and similarly the annular condenser lens. After passing through the right half of 18, the light is introduced into the light collection guide member 19 from the corresponding light collection step portion 21, and is condensed and guided by the light collection guide member 19, corresponding to the right half of the objective opening 20. Oblique light a that extends from the inner circumferential surface to the half circumference ₂ In this case, the oblique light a from the semi-periphery direction is applied to the observed portion of the subject sample C. ₂ Illumination using is performed independently.
[0032]
Next, the imaging light b reflected by the observed portion of the subject sample C ₂ Here, the light is guided from the objective opening 20 through the imaging optical system 17, passes through the half mirror 16 of the half mirror member 14, and then enters the CCD element 24. ₂ Is converted into an electrical signal and displayed on the screen of a monitor television (not shown), so that the desired oblique light a ₂ It is possible to easily and effectively observe the illumination image (observation image) of the portion to be observed, that is, the illumination image illuminated in the second illumination mode.
[0033]
In the case of the second illumination mode, the above-described oblique light a is obtained by arbitrarily rotating the rotation operation ring 54 on the incident optical axis B. ₂ Thus, the illumination angle range of the illumination light can be changed on the central optical axis A for observation.
[0034]
Next, FIGS. 6A and 6B show optical path modes of illumination light and imaging light when the imaging apparatus according to the embodiment is used in epi-illumination (hereinafter referred to as a third illumination mode). It is longitudinal cross-sectional explanatory drawing, It is explanatory drawing which shows the relationship between the illumination light with respect to the slit member for incident light selected by the said 3rd illumination form, the test object sample, and imaging light.
[0035]
In the third illumination mode, as shown in FIGS. 6A and 6B, illumination light is introduced into the incident light slit member 61 of the illumination switching cylinder 31 by the selection switching operation of the switching operation ring 32. It is used by facing the part 13.
[0036]
That is, also in the case of the third illumination mode, the illumination light a guided to the illumination light introducing portion 13 first passes only through the focusing lens 62 formed corresponding to the central portion of the incident light slit member 61. After being converted into a parallel light beam, it is reflected downward on the central optical axis A by the half mirror portion 16 of the half mirror member 14, and after passing through the imaging optical system 17, the incident light a from the objective aperture 20. ₃ In this case, the incident light a from the vertical direction is applied to the observed part of the subject sample C. ₃ Illumination using is performed independently.
[0037]
Next, the imaging light b reflected by the observed portion of the subject sample C ₃ Is again guided from the objective aperture 20 through the imaging optical system 17, passes through the half mirror portion 16 of the half mirror member 14, and then enters the CCD element 24. ₃ Is converted into an electrical signal and displayed on the screen of a monitor television (not shown), so that the desired incident light a ₃ It is possible to easily and effectively observe the illumination image (observation image) of the part to be observed, that is, the illumination image illuminated in the third illumination mode.
[0038]
Next, FIGS. 7A and 7B show illumination light and imaging light when the imaging apparatus according to the embodiment is used in combined light illumination of side oblique light and incident light (hereinafter referred to as a fourth illumination form). FIG. 6 is a longitudinal cross-sectional explanatory diagram showing the optical path mode, and an explanatory diagram showing the relationship between the incident light slit member selected in the fourth illumination mode, the illumination light for the subject sample, and the imaging light.
[0039]
In the fourth illumination mode, as shown in FIGS. 7A and 7B, the side oblique light and incident light combining slit member 71 of the illumination switching cylinder 31 is changed by the selection switching operation of the switching operation ring 32. It is used by facing the illumination light introducing unit 13.
[0040]
That is, in the case of the fourth illumination mode, the illumination light a guided to the illumination light introducing unit 13 is first, on the one hand, the side oblique light and incident light combining slit, as in the case of the first illumination mode. In the converging lens 72 of the member 71, the light beam is converted into a parallel light beam only through an annular portion corresponding to the periphery, and is formed on the central optical axis A by the annular mirror portion 15 formed over the entire periphery of the half mirror member 14. Downward side oblique light a _4a On the other hand, in the same manner as in the case of the third illumination mode, after being converted into a parallel light flux only through the central portion of the converging lens 72 of the side oblique light / epi-illumination light combining slit member 71. The incident light a is directed downward on the central optical axis A by the half mirror portion 16 formed at the central portion of the half mirror member 14. _4b Will be reflected as.
[0041]
And one side oblique light a corresponding to the former _4a Is introduced into the condensing guide member 19 from the condensing step portion 21 after passing through the annular condensing lens 18, and is condensed and guided by the condensing guide member 19. The irradiated portion of the subject sample C is irradiated from the surface to the entire periphery, and the other incident light a corresponding to the latter is applied. _4b After passing through the imaging optical system 17, the object to be observed of the subject sample C is irradiated from the vertical direction through the objective opening 20, and in this case, the object to be observed of the subject sample C is irradiated. On the other hand, side oblique light a from all directions _4a Illumination using light and incident light a from the vertical direction a _4b That is, these side oblique light a _4a And incident light a _4b And combined light a ₄ Illumination using is performed independently.
[0042]
Next, the imaging light b reflected by the observed portion of the subject sample C ₄ Is again guided from the objective aperture 20 through the imaging optical system 17, passes through the half mirror portion 16 of the half mirror member 14, and then enters the CCD element 24. ₄ Is converted into an electrical signal, and this is displayed on the screen of a monitor television (not shown), whereby the desired side oblique light a _4a And incident light a _4b And combined light a ₄ It is possible to easily and effectively observe the illumination image (observation image) of the portion to be observed, that is, the illumination image illuminated in the fourth illumination mode.
[0043]
In the above embodiment, each illumination control slit member is provided with a condensing lens for obtaining a parallel light beam. However, an optical system for converting the illumination light into a parallel light beam is interposed between the light source and the illumination light introduction unit. Accordingly, a simple light guide slit may be provided instead of the condenser lens.
[0044]
【The invention's effect】
As described above in detail with reference to the examples and the respective usage patterns, according to the present invention, the main body barrel in which the illumination light introduction part for guiding the illumination light is arranged on one side of the outer peripheral surface of the cylindrical body part. A half mirror in which a circular mirror portion is formed in the peripheral portion on the lower surface side and a half mirror portion is formed in the central portion while facing the illumination light introducing portion on the central optical axis at a predetermined angle in the cylindrical body portion An illumination switching cylinder is rotatably disposed around the outer periphery of the central optical axis that includes the half mirror member, and a half mirror portion is provided on the lower side of the half mirror member on the central optical axis. An imaging optical system including an objective lens corresponding to the above, and an annular condensing lens that occupies the outer peripheral portion of the imaging optical system and corresponds to the annular mirror portion, and is disposed on the lower side thereof on the central optical axis Objective opening that faces the surface of the observed part of the subject sample to be observed A condensing guide member corresponding to the annular condensing lens is disposed, and the illumination light guided through the illumination light introducing portion is at least used for side oblique light and polarized on the peripheral wall portion of the illumination switching cylinder. A plurality of types of illumination control slit members that are converted into one for oblique light, incident light, and side oblique light / incident light synthesis are arranged. It is configured to be rotatable in a direction orthogonal to the axis so that any one of the illumination control slit members can be selectively faced to the illumination light introduction unit as necessary, and illumination control for oblique light is also performed. When a slit member is selected, the illumination control slit member for oblique light is selectively rotated on the incident optical axis of the illumination light introducing portion, and an oblique illumination angle with respect to the subject sample is arbitrarily set. So that it can be used for observation purposes. By simply operating the illumination control slit member for side oblique light, declination light, incident light, and side oblique light / incident light synthesis to the illumination light introduction part, the illumination light can be obtained. The illumination light guided to the introduction part is converted into one of the corresponding side oblique light, declination light, incident light, and combined light of side oblique light and incident light for each purpose of the surface of the subject part to be observed. When an illumination control slit member for oblique light is selected, the oblique illumination angle with respect to the subject sample can be set arbitrarily by rotating the illumination control slit member accordingly. In addition, the apparatus has an excellent feature such that the apparatus configuration itself is relatively simple and can be easily implemented.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view schematically showing a schematic configuration of an imaging apparatus to which an illumination apparatus according to an embodiment of the present invention is applied.
FIG. 2 is an enlarged cross-sectional view schematically showing an illumination switching cylinder in the illumination device of the embodiment.
FIG. 3 schematically shows each of the illumination control members with a built-in focusing optical system in the illumination switching cylinder of the embodiment described above. FIG. 3 (a) is a diagram showing an illumination control slit member for side oblique light. Front explanatory view, (b) is a front explanatory view of an illumination control slit member for oblique light, (c) is a front explanatory view of an illumination control slit member for incident light, and (d) is side oblique light and incident light. It is front explanatory drawing of the illumination control slit member for synthetic lights.
4A is a longitudinal cross-sectional explanatory view showing an optical path mode of illumination light and imaging light when the imaging apparatus according to the embodiment is used in a side oblique illumination form, and FIG. 4B is an illumination form in the same way. It is explanatory drawing which shows the relationship between the illumination light with respect to the selected slit member for side oblique light, a test object sample, and imaging light.
FIG. 5A is a longitudinal cross-sectional explanatory view showing an optical path mode of illumination light and imaging light when the imaging apparatus according to the embodiment is used in the oblique illumination form, and FIG. 5B is an illumination form in the same way. Explanatory drawing which shows the irradiation range of the illumination light by the selected oblique light slit member, (c) is the relationship between the oblique light slit member selected in the illumination form same as above, the illumination light to the subject sample, and the imaging light It is explanatory drawing which shows.
6A is a longitudinal cross-sectional explanatory view showing an optical path mode of illumination light and imaging light when the imaging apparatus according to the embodiment is used in an incident light illumination form, and FIG. 6B is an illumination form in the same way. It is explanatory drawing which shows the relationship between the illumination light with respect to the selected slit member for incident light, a test object sample, and imaging light.
7A is a longitudinal cross-sectional explanatory view showing an optical path mode of illumination light and imaging light when the imaging apparatus according to the embodiment is used in a combined light illumination form of side oblique light and incident light; FIG. These are explanatory drawings which show the relationship between the illumination light and imaging light with respect to the test object sample, the slit member for the combined light of the side oblique light and the incident light selected in the same illumination form.
[Explanation of symbols]
11 Body barrel
12 cylindrical body
13 Illumination light introduction part
13a Optical fiber bundle
14 Half mirror material
15 Annular mirror
16 Half mirror
17 Imaging optical system
18 Annular condenser lens
19 Condensing guide member
20 Objective aperture
21 Condensing step
22 Focus mechanism
23 Focus operation ring
24 CCD elements
25 Variable magnification mechanism
31 Illumination switching cylinder
32 Switching operation ring
33 Slit holder
41 Illumination control slit member for side oblique light (side oblique light slit member)
42 Focusing lens for illumination beam
43 Non-light transmission part
51 Illumination control slit member for oblique light (slit member for oblique light)
52 Focusing lens for illumination beam
53 Non-light transmission part
54 Rotating operation ring
61 Illumination control slit member for incident light (slit member for incident light)
62 Focusing lens for illumination beam
63 Non-light transmission part
71 Illumination control slit member for combined light of side oblique light and incident light (Slit member for combined light of side oblique light and incident light)
72 Focusing lens for illumination beam
73 Non-light transmission part
A Center optical axis
B Incident optical axis
C Subject sample
a Illumination light
a ₁ , A _4a Side oblique light
a ₂ Declination
a ₃ , A _4b Incident light
a ₄ Composite light of side oblique light and incident light
b ₁ , B ₂ , B ₃ , B ₄ Imaging light

Claims

A main body barrel having an illumination light introduction part for guiding illumination light is arranged on one side of the outer peripheral surface of the cylindrical body part, and the illumination light introduction part is located on the central optical axis in the cylindrical body part. A half mirror member is formed with an annular mirror portion formed in the peripheral portion on the lower surface side and a half mirror portion formed in the central portion, and on the outer periphery on the central optical axis including the half mirror member. A lighting switch cylinder is pivotally arranged,
Further, on the lower side of the half mirror member, an imaging optical system including an objective lens corresponding to the half mirror portion on the central optical axis, and an outer peripheral portion of the imaging optical system are made to correspond to the annular mirror portion. An annular aperture lens is disposed, and an objective aperture that faces the observed surface of the subject sample as an observation target on the central optical axis is opened on the lower side thereof, and the annular aperture lens A corresponding light collecting guide member is arranged,
Further, on the peripheral wall portion of the illumination switching cylinder, the illumination light guided through the illumination light introducing portion is at least one of side oblique light, declination light, incident light, and side oblique light and incident light synthesis. A plurality of types of illumination control slit members to be converted are arranged, and the illumination control slit member for the oblique light is configured to be rotatable perpendicular to the incident optical axis of the illumination light introduction unit,
If necessary, the illumination light introduction section is selectively faced with any one of the illumination control slit members for side oblique light, declination light, incident light, and side oblique light and incident light synthesis. When the illumination control slit member for the oblique light is selected, the illumination by the side oblique light, the oblique light, the incident light, and the combined light of the side oblique light and the incident light can be obtained. The oblique illumination control slit member is selectively rotated on the incident optical axis of the illumination light introducing section so that the oblique illumination angle with respect to the subject sample can be arbitrarily set. An illumination device for an observation / imaging device.

The illumination of the observation / imaging device according to claim 1, wherein each of the illumination control slit members includes a focusing optical system that converts the illumination light guided through the illumination light introduction unit into a parallel light beam. apparatus.

The observation / imaging device according to claim 1 or 2, wherein the illumination control slit member for side oblique light has a focusing lens as a light transmission portion only in a portion corresponding to the annular mirror portion. Lighting equipment.

3. The observation according to claim 1, wherein the illumination control slit member for the oblique light has a focusing lens as a light transmission part only in a part corresponding to a part of the annular mirror part.・ Illumination device for imaging device.

The observation / imaging device according to claim 1 or 2, wherein the incident light slit control member for incident light has a focusing lens as a light transmitting portion only in a portion corresponding to the half mirror portion. Lighting equipment.

The illumination control slit member for combining side oblique light and incident light has a focusing lens as a light transmitting portion only in a portion corresponding to the annular mirror portion and the half mirror portion. The illumination device of the observation / imaging device according to 2.